Air cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 14 Position for application of grease Table 9 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 28 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.14, ) Pay attention to the mounting direction of the seal.

Air cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 12 Position for application of grease Table 9 Amount of grease A units: g Stroke 32 40 50 63 80 100 125 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 15 to 17 50st added 1 1 1 1.5 2 3 3 28 3-2-4.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

0 100 200 300 400 500 280 560 Data 10 4 8 7 6 5 MXY12 3 2.0 Shock absorber Rubber stopper screw 2 4 Load weight W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

Rotary Cylinder Series MRQ Size: 32, 40 1

of an isometric acceleration movement. 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Rotation time (s/90) Moment of inertia0.0025 kgm2 Rotation time0.7 s/90, size 40 will be selected.

IZx-OMX0087

/s 200 200 300 300 5m/s 2m/s 2m/s 400 400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6)

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

One-touch Fittings

S 1 4, 6 (Oval type release button) Oval type release button KQ2 8 to 16 H 08 01 G S (Round type release button) Male thread seal method Symbol Seal method Nil Without sealant S With sealant Model Thread material: Stainless steel 303 One-touch fittings Port size/Applicable tubing O.D.

CM2

13 5.5 19.5 8 M10 X 1.25 45 15 34.5 32 M26 X 1.5 26 22 41 8 10 14 46.5 24 16 7 21 11 M14 X 1.5 50 21.5 42.5 40 M32 X 2 32 Dimensions by stroke Boss-cut style (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ S ZZ S ZZ ZZ ZZ ZZ ZZ ZZ Bore Bore 87 141 112 166 137 191 20 20 128 153 178

MXS

6 CL MLGC r CNA !2 !3 t !

KP/KPQ/KPG

Clean One-touch fittings (for blowing) 04 06 08 10 12 4 6 8 10 12 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection Tubing (rod) connection K Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer M Plug Same dia. tubing H 4 6 8 10 12 Different dia. tubing (plug-in reducer

VP300/500/700

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

Digital Flow Switch (Manifold type)

Digital filter 6 Select from 0.5 s/1.0 s/2.0 s/5.0 s/10.0 s/15.0 s/20.0 s/30.0 s Enclosure IP65 Operating temp. range 0 to 50 oC (No freezing and condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H. (No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

4/5 Port Air Operated Valve SYJA3000 Series

SYJ7000-21-1A 1 pc. 5(R) 1 (P) (R)3 5(R) 1 (P) (R)3 3 position pressure center 4(A) (B)2 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 5(R) 1 (P) (R)3 Caution Be sure to read this before handling the products.

Compact Guide Cylinder

Max. speed Up to 300 mm/s Up to 400 mm/s Up to 500 mm/s Coefficient 1.7 1 0.6 10 MGPK Series L L m m Plate Material Carbon Steel /MGPKM Vertical Mounting Operating pressure: 0.5 MPa or more Operating pressure: 0.4 MPa MGPKFM12 to 50 50 mm stroke or less, V = 200 mm/s or less Over 50 mm stroke, V = 200 mm/s or less 100 100 50 50 40 40 32 32 10 10 25 25 Load mass m [kg] Load mass m [kg] 20

Electric Actuator Miniature Rod Type Miniature Slide table Type

Move M Speed Position Accel Decel PushingF TriggerLV PushingSp MovingF Area1 Area2 In pos mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 Absolute 100 10.00 3000 3000 85 85 20 150 12.00 17.00 10.00 0mm to 10mm.)

LEF-OM006xx

20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Assembly 1) Terminal box e connected with housing r should be reinstated.

Cylinder with Lock

Step (1) Precautions on Model Selection Warning Find the maximum load speed: V (mm/s) from the load movement time: t (s) and the movement distance: st (mm). 1.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

NCA1

LR DD E R F M FL Dimensions Part No.