Plug-in/Plug Lead: Single Unit

w q w VQ5100 VQ5101 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (

Compact Cylinder

4 y e q !3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.

4

Disassembly 1) After loosening the screw q, then if the housing w is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull the screw q out of the housing w. 3) On the bottom part of the terminal block e, theres a cut-off part o.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

Compact Cylinder Series NCQ8

Q J E D-rod Dia.

Slider Type Ball Screw Drive/11-LEFS Series

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w * Refer to the Operation Manual for using the products.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Possible to transfer a workpiece at low-speed.

5 q r q w r y !5 !6 i CRQ2X MSQX CRQ2X MSQX MRQ Component Parts Component Parts Description Material No. Description Material No.

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Vacuum Pad

q Pad unit Dimensions Part no.

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

RB/RBL/RBQ

RS Q G Basic type: RBL1411, RBL1412, RBL2015, RBL2725 With cap: RBLC1411, RBLC1412 RBLC2015, RBLC2725 RS H A Other dimensions are the same as the basic type.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MTS Air pressure supplied from A operates on both surfaces q and w. (Extension) MY q w A B Piping is concentrated in the head cover. CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Air pressure supplied from B operates on surfaces e.

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Tamper Proof and Flat Head Screw

How to Order 1F 06 D 200 AS Flow direction symbol on body Flat head screw driver adjustable type Body size 100 200 205 300 400 M5 standard Applicable tubing O.D. 1/8 standard Metric sizes 23 04 06 08 10 12 Inch sizes 1/4 standard 3.2 01 03 05 07 09 11 13 1/8 3/8 standard 4 5/32 1/2 standard 6 3/16 8 1/4 10 5/16 With One-touch fitting 12 3/8 1/2 Use 1/8 tubing.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

84 25 21 98 30 24 111 46 36 132 50 41 200 74 60 230 74 60 271 86 70 JIS Symbol 1 4 1 2 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Construction/Parts/Dimensions ANA1-01 to 06 Sound absorbing Case material (PFV ) End plate Hexagonal flats ANA1-06: PP How to

Quick Exhaust Valve Series AQ

(Refer to pages 371 and 372 for details.) 2 4 0 F 06 06 AQ Model Applicable tubing O.D.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

(Light ON) One auto switch One position, any of q, w Detection combinations and e can be detected. Two auto switches Two positions of A Pattern B q, w and e can C be detected. Step 1) Fully close the fingers. Step 1) Position fingers for gripping a workpiece. Step 1) Fully open the fingers.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0.5 depth 3 +0.030 0 0.05 D B 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2-M4 x 0.7 Piping port 2-M3 x 0.5 (Plug: M-3P) F 6 QL 13.5 17 0.05 Stroke: S M 2 M4 x 0.7 Mounting base side B D 7 5 2-M3 x 0.5 Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q

Compact Type

1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.