(Values at the initial period) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-23 24 Series VQ7-8 DIN Terminal Type 2 position single : VQ7-8-FG-S single (Reverse pressure): VQ7-8-YZ-S 154 154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 Manual
Different Diameter Module: KBR Component module T KBP2 KBV2-06 3 KBL2-R2S 1 KBP2 1 Model Body size VMG KBR2-1 KBR3-2 KBR4-3 KBV2-06 KBL2-R2S 4 Plug/Cap: KBP, KBC (P . 15-3-117) Component module KBV2-06 3 KBE2-06 1 KBP2 1 KBP2 KB P 1 KBE2-06 Body size KBE2-06 KBV2-06 Model Plug: KBP Cap: KBC Component module KBV2-06 2 KBE2-06 2 KBN2 1 Model Model Bracket mounting thread M6 x 1 x
, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
(SI unit side) Valve manifold Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories Bit No. 1 3 5 7 1 1 5 7 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.
(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED display LED display to indicate the status of the SI unit. 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.
(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED and switch LED display to indicate the status of the SI unit 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.
(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PFMC7501/7102 (M3 x 5, 2 pcs.)
BUS IN BUS OUT DRAIN 1 1 1 5 4 3 2 5 4 3 2 V+ 2 2 2 0 0 0 Bit No. 6 4 6 4 3 VSolenoid on side A Output No. 0 2 4 6 8 16 28 30 CAN_H 4 Side D 5 CAN_L (SI unit side) To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 4 5 Solenoid on side B 1 3 5 7 9 17 29 31 Output No.
M3 hexagon screw Tightening torque 0.6 Nm Troubleshooting If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.
Auto switch mounting screw (M3 x 0.5 x 10l) Auto switch spacer Auto switch mounting nut 4 Series RQ Dimensions/20, 25 Refer to pages 12 and 13 for proper auto switch mounting positions and height.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Tightening the threaded portion of an M3 fitting For KJS02-M3 (one-touch fitting), tighten it with a tightening tool by approx. 1/6 rotation after screwing it in by hand. Screwing the fitting in too far will cause air leakage due to thread breakage and gasket deformation. Screwing the fitting not far enough will also cause air leakage due to the loose screw. 1.
How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.
size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3 0 F S 02 06
(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101
OUT 1 Thread type Rc NPT NPTF G Nil N T F IN Voltage 1 2 3 4 5 6 36 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC 230VAC Port size Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Symbol 01 02 03 04 06 Class 4 Class B with AC has a built-in rectifying circuit. Class H is AC only. Without rectifying circuit. Contact P/A regarding other voltages.
(mm) Note) Type 04 06 08 10 12 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Made to Order (For details, refer to page 659.) Control type Note) For applicable tubing O.D. selection, refer to the Model.
B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.