MHZ

1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

SQ1000/2000

N1: 1/8" N3: 5/32" N7: 1/4" For top ported specification, indicate "LN". Note 2) Note 1) Except double (latching) type. Note 2) Except dual 3 port valves. Note 3) For specifying two or more functions, enter symbols in alphabetical order.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 NPT1/8 Symbol Operation manual*1 Calibration certificate*1 Nil Y K T N01 NPT1/8 Piping adapter ZS-46-N2 B Panel mount adapter *1 All texts are in both English and Japanese. Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no.

Modular F.R.L. Units

Example) AC30D-F03DE1-SV-16NR-B q w e r t y Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc N1 NPT F2 G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 + Ne Port size Nil Without auto drain C4 N.C. (Normally closed) Drain port is closed when pressure is not applied. D5 N.O.

MHZ2/MHZJ2

1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

1

Supply pressure normal Supply pressure drop Supply pressure increase Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 n1 n2 Vacuum Set value n1 n2 P1 Set value P2 n1 n2 P1 P2 P2 Time Normal mode Operating normally Operating normally Operating normally ON Time Reverse mode ON OFF Time OFF Time AUTO-SHIFT terminal When the Auto Shift Function is used.

SMC Electronic Switch Series Variations

Set value Vacuum P1 P2 P1 P2 P2 Time Operating normally Operating normally Operating normally ON Normal filled pressure Insufficient filled pressure Excessive filled pressure OFF Time n1 n2 When autoshift function is used n1 n2 n1 n2 Set value 10[ms] or longer GND Disconnected Time Reverse mode ON OFF Time When autoshift function is used Autoshift terminal 10[ms] or longer GND Disconnected

Metal Seal/Rubber Seal Series VQ Body Ported

(1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Direction Horizontal, Upward, Downward (Using elbow fittings for upward or downward) C6, C8, N7, N9 (Inch size elbow fitting is not available.) 1(P), 3/5(E) port Port size C2, C4, N1, N3, M3 SJ2000 4(A), 2(B) port C2, C4, C6, N1, N3, N7, M5 SJ3000 Weight W (g) Note 2) W = 51n + m + 133 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) When many valves are operated simultaneously,

Digital Flow Switch (Integrated display type)

(-L) 68 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-F1(-L) 70 14 2.8 depth 8.4 PF2M711/721-02(-L) 70 17 2.8 depth 6.2 PF2M711/721-N2(-L) 70 17 2.8 depth 6.2 PF2M711/721-F2(-L) 78 21 2.8 depth 6.2 -101No.PF-OMW0007-E PF2M7#L-#1/2(-L) (mm) Model A C B P PF2M701/702/705/710/725/750L-01(-L) 84.4 11 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-N1(-L) 84.4 12 14 2.8 depth 8.4 PF2M701/702/705/

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 23 (2 Stations/M8: 4 Inputs; 3 Pins), Input Block COM: N (-COM), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Enclosure: W (IP67), SI Unit: Q (for DeviceNetâ„¢), End Plate Type: 2 (Power Supply with M12 Connector, Max. Supplied Current 2 A), SI Unit Common: N (Negative Common), I/O Unit Stations: None, Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assy: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (1/4" One-touch Fitting), Mounting: D0 (DIN Rail Mounting

Enclosure: W (IP67), SI Unit: 0 (w/o SI Unit), End Plate Type: None, SI Unit Common: Positive Common, I/O Unit Stations: None, Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assy: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (5/32" One-touch Fitting), Mounting: D0 (DIN Rail Mounting, w/o DIN Rail)