Vacuum Regulator

140 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV20-C10 (One-touch fitting 10) IRV20 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 90 57.0 100 95 90 85 80 75 70 65 60 0 50 100 150 200 250 Flow rate (l/min (ANR)) VAC side pressure (kPa) 2 Vacuum Regulator Series IRV10/20 Construction

IDX-OM-Y002

50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ion state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron(mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ion (mg/L) Should not be Should not be Should not be inspected

IDX-OM-P023E

](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L) Shall not be detected.

Modular Type Regulator Series AR

It must be operated manually. 0.2 0.2 0.1 0.1 00 25 50 75 100 125 150 00 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) AR20 Rc 1/4 AR40-06 Rc 3/8 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 Caution 1. Be sure to unlock the knob before adjusting the pressure and lock it after setting the pressure.

COQ2BP

Foot , u Flange Clevis Moun~ 50 CQ-L050 CQ-F050 CQ0050 f~ ",,~~.~ 50 25, 30, 35, 40, 45, 50, 75, 100 ..63 CQ-L063 CQ-F063 CQ0063 63 25. 30. 35, 40, 45, 50, 75, 100 . 60 " CO-LOBO CO-FOeD CO-DOSO Notes. If foot bracket is required, order 2 pcsIcylinder.

PFxx-OMO0007CN

kPa0.5 MPa -50 kPa0.75 MPa 1.0 MPa NPN PNP 3 () 3 80 mA DC30 V(NPN ) NPN1 V (80 mA ) PNP1.5 V (80 mA ) 1 s 1F.S. 2F.S. 5F.S. 0 3 (3 digits) 50 ms 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 5 L/pulse 5F.S. 3 7 OUT1ON OUT2ON DC1224 V10 () 150 mA 160 mA 170 mA -35No.PF-OMO0007CN PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 IP65 050 -2585 () 3585R.H.() 3F.S.(1535 )5F.S.(050

XMD/XYD Series

Model XMD-25 XYD-25 XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 Flange (valve) size 25 40,CF070 50 63,CF114 80 Actuating type Normally closed(Pressurize to open, spring seal)[both main & initial exhaust valves] Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type: 5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Main pumping

JXCx-OMT0005CN

(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

Model Selection 1

Air operated, External pilot valve 2 port 0 to 1 Pilot pressure: 0.1 to 0.7 0 to 0.97 Pilot pressure: 0.1 to 0.7 Cylinder operated by external pilot air 7, 15, 20, 25, 32, 40, 50, 65, 80 VNC 1/8 to 3B 17-4-21 Single unit N.C./N.O. 7, 15, 20, 25, 32, 40, 50 1/8 to 2 (2B) 17-4-37 VND Single unit N.C.

CG5-X6011

63 80 100 Max Stroke 800 1200 1200 1400 1500 MP1 Double Rear Clevis MP2 Double Detatchable Rear Clevis MP3 Single Rear Clevis MP4 Single Detatchable Rear Clevis MF1 Front Flange MF2 Rear Flange MS1 End Angle MS2 Side Lug MS7 End Lug Cushion N A Rubber Bumper Air Cushion Seal Material R V NBR Viton Bore (mm) mm 40 50 63 80 100 In 1.50 2.00 2.50 3.25 4.00 40 50 63 80 100 Specifications Action

AIR COMBINATION

30.5 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-A 1/8 167.4 115.1 27 30 55.1 50 30.5 41 57.2 35 7 14 4 41 AC40C-A 1/8 220.4 147.1 33.5 38.4 72.6 75 36.1 50 75.2 40 9 18 5 48 1/43/81/2 AC40C-06-A 1/8 235.4 149.1 33.5 38.4 77.6 75 39.6 50 80.2 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications Round type Metal bowl With Round type With With auto drain Metal bowl Metal

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

Magnetically Coupled Rodless Cylinder Basic Type Series NCY3B ø6(1/4"), ø10(3/8"), ø15(5/8"), ø20(3/4"), ø25(1"), ø32(1-1/4"), ø40(1-1/2"), ø50(2"), ø63(2-1/2")

8 20 (3/4") X322 Outside of cylinder tube with hard chrome plating X324 Oil-free exterior specification (with dust seal) 6 15 (5/8") 100 X1468 Interchangeable specification with NCY2B6 4 With magnetic shielding plate XC24 50 With floating joint XC57 2 6 (1/4") Minimum Operating Pressure 0 25 50 75 100 0 25 50 75 100 Supply pressure (PSI) Supply pressure (PSI) 50, 60 30 600 Minimum operating

Title not found

o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude acting Srngle acting spnng refurn Single acting sprinq extend Larg bore siro Double acting

AMX-OM-Q015E

-5 to 55 -5 to 50 *Note1 Ambient temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Standard Performance 31 62 125 250 360 586 28 56 111 222 329 550 Outlet air atmospheric -20 -15 *Note2 pressure dew point oC Inlet air flow rate L/min(ANR) Standard Performance conditions Outlet air flow rate L/min(ANR) 25 50 100 200 300 500 25 50 100 200 300 500 6 12 25 50 60 86 3 6 11 22 29 50 Purge

AMX-OM-Q018E

-5 to 55 -5 to 50 *Note1 Ambient temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Standard Performance 31 62 125 250 360 586 28 56 111 222 329 550 Outlet air atmospheric -15 -20 *Note2 pressure dew point oC Inlet air flow rate L/min(ANR) Standard Performance conditions 25 50 100 200 300 500 25 50 100 200 300 500 Outlet air flow rate L/min(ANR) 6 12 25 50 60 86 3 6 11 22 29 50 Purge

Compact Electro-pneumatic Regulator Series ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

JXCx-OMT0061CN

(OUT05)OFF 11INPOFF ... 12BUSY ON 0mm 50mm 60mm 100mm 5 13DRIVEOFF 14No.2 ON (OUT1ON) 15INPON 16BUSYOFF 10mm 57 - 13.2 100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% 5mm (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1

Toggle Type Air Gripper

32, 40, 50, 63 Series MHT2 RoHS How to Order M9BW 32 2 MHT DZ Made to Order (Refer to page 645 for details.)