SMC Corporation of America
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R410A (HFC) GWP2,088 7) g 39010 53010 63010 78010 :0.1MPa) mm 12 R1 R1 1/2 R2 kg 49 68 95 110 :1 :2 1 2ANR[2065%] 3[3275%] 4 5 6R 30mA 7IPCC4 AR4 R410A GWP2090 8L V1.6MPa IDFA60/70/80/90 Series 7-1 IDX-OM-W094 oC 525 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 MPa 0.3 0.4 0.5 0.6 0.71.6 0.71 0.75 0.82 0.89 1.00 oC 225 30 35 40 45 1.0 0.85 0.80 0.73 0.62

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

Specications [mm] Table 1 Cylinder Strokes Bore size Stroke 16 15, 20, 25, 30 20, 25 15, 20, 25, 30, 35, 40, 45, 50 32 to 63 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Ambient and uid temperature range 32 to 302F [0 to 150C] Seal material Fluororubber Grease Heat resistant grease Standard stroke See Table 1. Dimensions See below.

Standard stroke 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer.

IDFA4E15E1 L N PE M3 6.5mm 1.25mm 2 1-1 IDFA Series 1 4 IDX-OM-W017 2 2 , 2 1 IDFA4E15E 20kg 2 2 2 2 2 1 2000m 240 050 600mm 600mm 600mm ( 600mm ) 600mm 2-1 IDFA Series 2 1 IDX-OM-W017 2 2 2 2 6 6-2 IDFA4E15E 2 2 3 50 50 2 2 4 10mm 2-2-2 IDFA Series 2 2 IDX-OM-W017 2 ( 2 2 5 6-1 IEC AC230V 30mA 5A 216AWG,3 ,812 1.25 0.1m 30m M3 1.25-3 6.5mm ()M3 0.61Nm

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

: 44 psi (0.3 MPa) Fluid: Water LVR20 LVR40 LVR50 12 [45] 26 [100] 1.1 [4] 24 [90] 11 [40] 0.9 [3.5] Flow rate gal/min [L/min] Flow rate gal/min [L/min] Flow rate gal/min [L/min] 21 [80] 9.2 [35] 0.8 [3] 18 [70] 7.9 [30] 0.7 [2.5] 16 [60] 6.6 [25] 13 [50] 0.5 [2] 5.3 [20] 11 [40] 0.4 [1.5] 4.0 [15] 8 [30] 0.3 [1] 2.6 [10] 5 [20] 0.1 [0.5] 1.3 [5] 2.6 [10] 0 0 0 0 0 0 15 [0.1] 29 [0.2] 44

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Installation of Threads Caution Selection Caution KQ2 1.

40 30 These observations illustrate that the use of so-called "oilfree" air sources and compressed air at low dew points make it difficult to eliminate ozone in pneumatic lines. 20 10 0 Initial value Measuring point 100 90 80 70 Residual ozone (%) Air with atmospheric dew point: 17C Air with atmospheric dew point: 10C 60 50 40 30 20 10 0 Initial value

Not required Unrestricted 150/30 Note 1) Be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation. Note 2) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.

or condensation) Ambient humidity range 35 to 85 %RH in operation and saving (with no condensation) Withstand voltage 500V AC for 1 min Insulation resistance 50 M or more (between live parts and pressure port at 500V DC) Switch output 1 NPN output and analog output 1 PNP output and analog output 2 NPN outputs 2 PNP outputs Maximum load current 80 mA (per output) Maximum applied voltage 30

A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

In power saving mode 2, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode. (Power saving is only enabled in measurement mode). In power saving mode 2, a decimal point flashes and moves across the display.

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

Coefficient factors Inlet air temperature (oC) 35 40 45 50 55 60 65 70 75 80 1.58 1.46 1.09 1.00 0.79 0.64 0.55 0.51 0.49 0.47 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 to 1.6 0.67 0.79 0.88 0.91 1.00 1.02 1.04 1.09 Ambient temperature (oC) 20 25 30 35 40 45 1.19 1.13 1.06 1.00 0.90 0.77 Calculation example: The air flow capacity when the dew point of IDFC60 is set to 10 oC

Applicable Fluids Material and fluid compatibility check list for high purity fluoropolymer fittings Chemical Compatibility LVC Acetic acid 100% LVA Acetone 100% Note 1,2) LVH Ammonium fluoride 40% Ammonium hydroxide 30% LVD Butyl acetate 100% LVQ Methylne chloride 100% LVP Hydrochloric acid 38% LVW Hydrofluoric acid 50% LQ1 LQ1 Hydrogen peroxide 60% LQ3 LQ3 Methanol 100% LVN LVN

LED 4M12 (5 ) . 8-1 EX245-DY1 56 No.EX-OMU0020CN 8.2. . 8-1 EX245-DY1 (WLH) mm 5412061 280 g PBT DC24 V SI US2 1.6 V 50 mA 4 x M12 5 (2 /) 0.5 A / 1 2 A / 1 1 8 PNP 57 No.EX-OMU0020CN 8.3. M12 5 . 8-2 EX245-DY1 TOP View 1 N.C. 2 2 n+1 3 5 1 3 0 V ( / ) 4 4 ( n) 5 FE/ SI IP65 IP65 8.4.