FREE MOUNT CYLINDER

(mm) d L 6 5 18 10 5 20 16 13 33 d 20 14 40 L 25 14 46 32 16 56 9/10 3. Maintenance ! Caution As a jig is required for bore size 6, do not disassemble when replacing seals etc. If overhaul is required, contact SMC Sales Office.

Multistage Ejector Series ZL112/212 1

90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Low Friction Cylinders Metal Seal Type

to 25: 0.005 to 0.7 5 to 3000 MQMLH 0.01 to 0.7 High speed/frequency Features 1 Application Examples (Metal Seal Type) /10, 16, 20, 25, 30, 40 /6, 10, 1 6, 20, 25 For pressure controling with fine pressure variations Applicable models: MQQT/MQML Scrubber resistance enables to cover the range of a driving were not available with the general cylinder.

VKF300

PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70 5 111 103 89 6 130 122 108 7 149 141 127 8 168 160 146 9 187 179 165 10

VXD21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC VXD21 DC AC VXD22 DC AC VXD23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil (3) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC

Power Valve: Economy Valve Series VEX5

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

Step Motor Controller (Servo / 24 VDC)

External Wiring Diagram . 20 4.1 CN1: Power connector . 20 4.2 CN2: Motor power connector and CN3: Encoder connector . 20 4.3 CN4: Serial I/O connector . 20 (1) Connection with the teaching box . 20 (2) Connection with a PC . 21 1 - 4.4 CN5: Parallel I/O connector. 21 5.

c

Fittings: Fluoropolymer fittings LQ1, LQ2, LQ3 Fluid Note 1) 2) 3) and applicable fittings Note 1) 2) 3) Max. operating pressure (MPa) Refer to the max. operating pressure curve. 20 12 10 6 25 20 35 20 60 30 95 60 220 160 400 290 500 360 Max. operating temperature Material Recommended radius Refraction value Min. bending radius (mm) Note 4) 260oC PFA (Tetrafluoroethylene perfluoroalkoxy vinyl

Title not found

/32 15/16 9/32 15/16 25/32 25/32 53 3/8 LB5 3/8 LB6 3/8 LB8 3/8 LB4 3/8 LB3 Tees: 3/8 NPT Male to Tube 1 3/4 11/16 Hex Typ. 1 7/16 1 5/16 9/32 25/32 15/16 25/32 #3 1 11/16 1 3/8 9/32 #4 25/32 15/16 54 3/8 T4 3/8 T3 3/8 T5 3/8 T6 3/8 T8 Page 13 Distributed by Power Aire, Inc.

VQ5000

Note Conductor resistance /km, 20C (68F) 65 or less 1.5m 3m 5m AXT100-DS25-015 Approx. 10 Cable: 25 cores x 24AWG AXT100-DS25-030 Withstand voltage 1min, VAC 1000 AXT100-DS25-050 L If a commercially available connector is purchased use a MIL-C-24308 standard 25 pin type female connector. Note) The minimum bending radius of the D sub connector cable is 20 mm.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

342 332 18 361 351 19 380 370 20 399 389 4-13-10

Ejector Valve Unit Series ZYY/ZYX 1

20 40 40 40 40 Suction flow rate Suction flow rate 10 10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70 5 111 103 89 6 130 122 108 7 149 141 127 8 168 160 146 9 187 179 165 10

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Applicable cylinder bore size (mm) 3.2 Metric size Inch size Model 1/8" 5/32" 3/16" 1/4" 6 8 5/16" 4 6, 10, 16, 20 AS1001FM 20, 25, 32 AS2001FM 20, 25, 32, 40 AS2051FM Specifications Air Fluid 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure 5 to 60C (No freezing) Ambient and fluid temperature 10 turns (20 turns (1)) Number of needle rotations Nylon, Soft

NCA1

SN 150 (1.5) 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 0.551 1/4-28 2 0.3 3/8 1.26 1.1 9/32 1/4-20 1.43 1 1.71 3 5/8 2.36 4 3/4 5/8 1 15/16 2 1/4 200 (2) 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2 1/2 0.3 3/8 1.26 1.06 7/16 5/16-18 1.84 1 1.71 3 5/8 2.4 4 3/4 7/8 1 15/16 2 1/4 250 (2.5) 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 1.3 1.06 19/32 3/8-16 2.19 1 1.75 3 3/4 2.48 4 7/8 1

PFxx-OMU0002

(refer to setting method on page 25) (When reversed output is selected, the main screen displays nL and nH.) [Accumulated output mode] Set each P (set value), referring to the Setting method on page 25. (When reversed output is selected, the main screen displays n.)

5 Port Solenoid Valve Series SQ1000/2000

25 or less 100 Rubber seal 33 or less 30/150m/s Impact/Vibration resistance 2.9 (0.16) SQ1530 20 or less 100 Metal seal 26 or less Dust proof Pressure Enclosure center 3.2 (0.18) SQ1531 25 or less 100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

30

25 8 10 14 18 1.25 1.25 1.5 1.5 44 49.5 60 74.5 20 25, 32 40 50, 63 Semi-standard type Pneumatic: to 1 MPa (mm) Maximum thread depth P Allowable eccentricity U Maximum operating tensile and compressive force N Applicable cylinder bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5

ZSE30/ISE30

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Elbow Straight A One-touch fitting size 4, 5/32" 6 1/4" C 18 20 20.5 B 10.4 12.8 13.2 B A 20 22.4 22.8 C B 14.4 11.2 B Straight Elbow With One-touch fitting With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 16-2-10 11 Series ZSE30/ISE30 High Precision, 2-color Display Digital