XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

1

Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].

S Couplers Series KK/KKH/KK13

5 !4 !5 !

VG342

15 to +10% of rated voltage Inrush 12.7 (50), 10.7 (60) 7.6 (50), 5.4 (60) 4.8 W, 5 W (With indicator light) Power consumption Note) N.C.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch size 1/8" 1/4" 5/32" 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.2 0.3 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Controlled flow 0.2 0.3 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Free flow 0.3 0.4 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.2 0.3 0.3 0.3

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Filtration degree should be 5 m or less. ( ): VHS500 1943 1944

Air Slide Table Series MXQ

Operating speed range 50 to 500mm/s (50 to 300mm/s with horizontal operation) MXQ25 0.045 0.045 0.045 0.05 0.06 0.07 0.09 0.115 0.125 Buffer stroke (mm) 5 10 At 0mm stroke At maximum stroke 5 10 13 17 21 3 Buffer stroke load (N) (Unit: mm) B side traveling parallelism to A side Graph 1 8 13 17 25 29 6 Note 1) Refer to page 51 for buffer mechanism handling precautions. 0.06 Note 2) The buffer

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

N9:With one-touch fitting for 5/16 (Gasket 10 is supplied as an accessory.)

PSxx-OMM0006CN

0 (1F.S.) 1 [LoC]1 ( [LoC]) < -> 5 LoCUnL () / -49No.PS-OMM0006CN-E < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 51/ [UnL], [FAL] 3[LoC] -50No.PS-OMM0006CN-E [000] <> (50)(50) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -51No.PS-OMM0006CN-E , (1015 ) <> 5 UnLLoC 5 5 (30) 5 000 (30) 51/ 1 -52No.PS-OMM0006CN-E ZSE40A(F)/ISE40A ( ) No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No

Compact Electric Actuator Series LG1

hole 5 5 5 5 120 130 5 5 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 7 8 9 10 Pin No. 11 12 13 14 15 16 17 19 20 Signal name Digital output power supply Failure Positioning completion Z phase pulse Symbol V+ ALM PF OP SG NP NG PP PG Signal name Shield Driver model MR-C10A MR-C10A1 Symbol SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

DC: DL (With indicator light) Option Grommet G D DIN terminal 5 Base mounted 0 Manifold 4 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 5 9 24 VDC Construction Other Body ported De-energized Base mounted De-energized Component Parts q Description Stainless steel Aluminum die-casted Material Note No.

Multi-channel Digital Sensor Monitor

R Current read value For example, when the display value is 1.000[MPa], 5%R.D. is 5% of 1.000[MPa], which becomes 0.05[MPa]. When the display value is 0.800[MPa], 5%R.D. is 5% of 0.800[MPa], which becomes 0.04[MPa]. R.D. The pressure range within which the product will meet all published specifications.

High Power Cylinder:

2 @5 !7 @1 !6 !5 w o !0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

Digital Pressure Switch

Low-cut function Part number Rated value kPa Pa mbar psi inHg mmHg inH2O mmH2O X576 500 Pa 0.003 3 0.03 0.001 0.02 0.01 0.3 X577 1 kPa 0.005 5 0.05 0.001 0.001 0.04 0.02 0.5 X578 2 kPa 0.01 10 0.1 0.001 0.003 0.1 0.04 1 X579 5 kPa 0.03 0.3 0.004 0.01 0.2 0.1 3 X580 10 kPa 0.05 0.5 0.01 0.01 0.4 0.2 5 : Low-cut function not available -: No units for display Press the or button

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage 1 2 3 4 5 6 7 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D: With connector T: Condait terminal E: Grommet terminal type has been discontinued.

High-precision Digital Pressure Switch

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -8No.PS-OMW0002-C Summary of Product parts Names of individual parts Body Power supply/ output connectors: Connects the power supply/ output lead wire. Operation/Display: Refer to the table below.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

PEEK

LVM09/090 LVM10/100 LVM20/200 Series Period of continuous energization 5 min. or less 30 min. or less 30 min. or less Duty ratio 50% or less 25C or less Ambient temperature Power-saving circuit None Duty ratio: ON time/(ON time + OFF time) For the LVM15/150, the type with power-saving circuit is standard.