Series VS

1 3 (EA)(P)(EB) 6 Series VS R8 Rubber Seal S HOW TO ORDER VALVE VS R 8 6 FG S 3EZ V1 A03T X1 Type of seal Special Options R Rubber S Metal NIL Standard X1 External Pilot Supply Size Subplate (NPTF) 6 Size 1 8 Size 2 10 Size 3 NIL Without Subplate A02T Side 1/4 For VSR/S8-6 A03T Side 3/8 For VSR/S8-6, 8-8 Configuration A04T Side 1/2 For VSR/S8-6, 8-8, 8-10 FG 2-position A06T Side 3/4 For

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

SYJA500 Series

Subsonic flow when (P2+0.100)/ (P1+0.100)>0.5 Q=240S P(P1+0.100) Sonic flow when (P2+0.100)/ (P1+0.100)0.5 Q=120S (P1+0.100) Q: Air flow ratedm 3 /min(ANR) 2 ) P: Differential pressure P1P2MPa P1: Upstream pressureMPa P2: Downstream pressureMPa Correction for different air temperatures Multiply the flow rate calculated with the about formula by a coefficient from the table below.

Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Contents 32 CK95W-32 15 Piston seal NBR 1 16 Cushion seal Urethane 2 40 CK95W-40 50 CK95W-50 63 CK95W-63 80 CK95W-80 100 CK96W-100 17 Cushion valve seal NBR 2 Kits include items !4 to !6, !8. 18 Cylinder tube gasket NBR 2 19 Bumper Urethane 2 20 Rod end nut Rolled steel 1 Trivalent zinc chromated 21 Magnet (1) * Seal kits consist of items !4 to !6, !

Round Type Hydraulic Cylinder

3, 4, 5) 20 + 35 D-M9V 5 20 35 CHS (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9V 5 15 25 CH2 (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 10 20 35 CHA (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 15 + 45 (n 2) 2 D-H7/H7W D-H7NF/H7BA 60 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 60 Related Products (n = 2, 4, 6) Note 3) 15 + 45

S Couplers

Rc1/8 Rc1/4 Rc3/8 Rc1/2 6 (1/4") 8 (1/4") 10 (3/8") 12 (1/2") 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 6 8 10 12 4.2 7.0 7.0 7.0 6.0 7.0 7.0 7.0 2.0 3.0 6.0 7.0 2.0 3.5 4.2 7.0 7.0 7.0 2.0 4.4 7.0 7.0 4 Male thread Flow rate m3/min (ANR) 3 Female thread 2 With barb fitting 1 KK130P-01MS+KK130S-01MS With nut fitting 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Pressure MPa This flow-rate characteristic

ZL112A

2 With valve Vacuum pressure sensor Ejector q Supply (P), Vacuum (V) port/One-touch tting connection size w Exhaust type Nil Silencer exhaust P Rc1/2 port exhaust PF G1/2 port exhaust1 PN 1/2-14NPT port exhaust Symbol Supply (P) port Vacuum (V) port Vacuum pressure gauge unit specications1 Nil 6 12 kPa N 1/4" 1/2" inHgpsi 1 When the vacuum pressure gauge (Symbol: G) is selected for i, these

Ionizer Nozzle type IZN10 Series IZS

IZH A 5 8 7 Piping port M3 x 0.5 thread depth 4 (Tap for ground wiring) 40 25 3.5 93.6 Energy saving static neutralization nozzle with right angles IZN10-0106--X367 3.4 6 12 8 6.5 Section A-A Air blow port Air blow port 2 x M3 x 0.5 thread depth 10 26 32 12 11 2 x 3.4 6/For elbow 1/4"/For elbow 1/4" 11.5 12 24.5 22 7 18.5 16 10 10.3 Refer to page 457 for dimensions of the model with bracket

PC Wiring System Series PCW

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram Power supply terminal block PCW-EC16Z00 PCW-EC16Z01 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS0) 0 1 2 3 4 5 6 7 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 9 8 7 6 5 4 3 2 1 0 F E D C B A 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8 4 3 2 1 CN9 4 3 2 1 CNA 4 3 2 1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Description Material Body A Elbow body Handle Body B Needle Needle guide Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Spacer Gasket Note PBT PBT PBT Brass(1) PBT PBT Brass(1) q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !



(Mounting hole) (Mounting thread) 4-M6 x 1 x 6 Rc 1 1/4 2-Rc1, 1 1/4 VEX1930 3-14, 20 Bracket (Option) Pressure gauge (Option) Air operated type Rc 1/8 2-M5 x 0.8 Rc 2 2-Rc 1 1/2, 2 4-M6 x 1 x12 (Mounting thread) (Mounting hole) 14-6-10 11 Precision Regulator Series VEX130 3 Base Mounted M5, Rc 1/8 VEX1B33-M5, 01 F.R.L.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

4-channel Flow Monitor ( compatible)

System error (Er0, 4, 6, 8, 40) is displayed. (2) Check if the power supply voltage 6 is in the range 12 to 24 VDC 10%. (2) Supply power in the range "HHH" is 12 to 24 VDC 10%. displayed. (1) Reset applied flow to a (1) Check if the flow exceeds the level within the set flow range.

Transfer

1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

Ionizer

x 5.4 22 4.5 32 20 Ionizer 27 2 100 Hexagon socket head cap screw M4 x 6 (Accessory) 6 Ionizer full length (L) Angle adjustable (90) (31) 12 2 Angle adjustment range is 45.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LQ 2 U 03 Tubing size Tubing O.D. 1/8", 3 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Body class Applicable fitting Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Type of fitting Applicable fitting LQ2 LQ1 Symbol Nil 1 2 Body class Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Applicable fitting 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type of

Compact Vacuum Ejector Series ZA

02 Symbol 0 2 3 5 6 P Applicable tubing O.D.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

2 !3 !4 !5 !6 !7 !8 !