SMC Corporation of America
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6 @3 @4 e !7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

Allow a sufficient margin of tube length in piping in order to prevent application of torsional, tensile or moment load to the tubes and fittings. 6.

[MPa] ZH30-X185 ZH40-X185 ---7 ---7 3,500 5,000 Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] 4,500 ---6 ---6 3,000 Discharge flow rate 4,000 Discharge flow rate Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Vacuum

Description Material AFF4B AFF8B AFF22B AFF37B AFF75B AFF2B Element assembly Cotton paper, Others AFF-EL11B AFF-EL4B AFF-EL8B AFF-EL22B AFF-EL37B AFF-EL75B AFF-EL2B r Element assembly: With gasket and O-ring AFF75A to 220A (OUT side) Guage port N-5 Drain N-4 N-6 Gauge port (IN side) Component Parts No. q w Description SGP-E, SS400 Material Note Case Cover SS400 Replacement Parts Drain (N

Drain flushing Remove drainage from the air filters regularly. -7- Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire

(Refer to pages 15-6-3 to 15-6-5 for details.) ASP ASN Model Applicable tubing O.D.

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Note 6) When the current output is selected.

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min(ANR)] S: Effective area (mm) P: Pressure drop (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Maintenance Correction for different air temperatures

Description Material Note 1 Body PFA 2 Housing PVDF 3 Diaphragm FKM 4 Plate PVDF 5 Diaphragm PTFE 6 Housing PVDF 7 Diaphragm PTFE 8 Guide PPS 9 End plate PVDF 10 Spring Stainless steel Fluorine coated 11 Nut PFA y r t !1 q u !0 o i Integral ttings/LQ1 w e Component Parts No.

E U N I T T Y P E D I M E N S I O N S S I N G L E U N I T: DIN R A I L M O U N T No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 105 140 175 210 245 L3 140 175 210 245 280 No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 36 71 106 141 Courtesy of Steven Engineering, Inc. !

3 SOL. 4 stations 4 SOL. 5 stations 5 SOL. 6 stations 6 SOL. 7 stations 7 SOL. 8 stations 8 SOL. 9 stations 9 A Black White SOL. 10 stations 10 w SOL. 11 stations 11 SOL. 12 stations 12 B SOL. 13 stations 13 q SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 2.9-5 3 Port Solenoid Valve Series

No.VQZ100V-OMK0002-B Solenoid Valve PRODUCT NAME VQZ Series MODEL/ Series Contents Safety Instructions -2,3 Precautions on Design -4,5 Selection -4,5 Mounting -5 Piping -6 Wiring -6 Lubrication -6 Air Supply -6,7 Operating Environment -7 Maintenance -7,8 Specific Product Precautions -9 ~15 Trouble shooting -16,17 -1No.VQZ100V-OMK0002-B Safety Instructions These safety instructions are intended

4 #6 !5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Cylinder for element decompression and compression Note) Refer to page 12 for detailed pneumatic circuit of the cylinder. q y (6) w B A r e IN OUT Series FN1 Low Maintenance Filter Liquid (Coolant) (Connections are all 1.)

% .% "-% "%% (%% (0 + "( + (0 + "( + ARX20 VCHR 3 4 45 4 466 4 5 4 4 6 7 6 7 6 4 6 5 ITV Construction IC Component Parts PVQ VEF VEP 1 Solenoid coil assembly 2 Core 3 Return spring VER 4 Armature assembly VEA 5 Body ! 6 O-ring VY2 Round head combination screw 7 "# $ % & $ "#' ( VBA VBAT 8 Sub-plate ! ) * )+,"% "& & AP100 A (2) P (1) P (1) A (2) !-.