2–4 A B W D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.
B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.
A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part (mm) Faston
U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .
Proper auto switch mounting position (Detection at stroke end) D-C73 D-H7B / H7A1 8.5 8.5 Auto switch Auto switch 16 16 approx. Hs approx. Hs A 26 B A 29 B D-B54 D-K59 / G59 Auto switch Auto switch 12 approx. Hs 12 approx.
Hs B 30 MLGP Auto Switch Proper Mounting Position (mm) ML1C Auto switch model D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) A A A B A B A B A B B A B B 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5
D-C7/C80 D-H7/H7W/H7F/H7BA 8.5 Hs Hs 8.5 16 16 B Auto switch 29 A 26 A Auto switch B D-C73C/C80C D-H7C Hs 8.5 Hs Auto switch 16 16 B Auto switch 38.2 A A 36.7 B D-G5/K59/G5W/K59W/G5BA/G59F/G5NT D-B5/B64/B59W Hs Hs 12 Auto switch 12 24.5 24.5 A B A B Auto switch 33 6.5 33 D-A3/G39/K39 D-A4 Hs Auto switch 36 Hs 36 Auto switch B A B A 49 49.5 G 1/2 (applicable cable 6.8 to 11.5) G 1/2 (applicable
(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B
Hs A B (mm) D-M9 D-M9W D-M9V D-M9WV D-A9V D-A9 Bore size (mm) A B A B W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 38.5 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 The value in parentheses [ ] is for 5 mm stroke with
A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage stroke =U B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-Y7NTL D-F7BAL B + First-stage stroke =U SMC =U B A D-A73C D-A80C D-J79C B + First-stage stroke =U =U B A D-A79W D-F7WV D-F7V D-F7BAVL B + First-stage stroke =U SMC =U B A 11 3 Position Cylinder Series RZQ D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV D-F9BAL B =U =U A B + First-stage
Hs MLU MLGP A B ML1C Proper Auto Switch Mounting Position (mm) Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL Hs D-A72/A7H D-A80H/A73C D-A80C/F7 D-F7V/F79F D-J79/J79C D-F7W/F7WV D-J79W/F7BAL D-F7BAVL Auto switch type Auto switch type D-F7V D-F7WV D-F7BAVL D-A73 D-A80 D-A7 D-A80 D-A73C D-A80C D-A79W D-F7NTL D-J79C D-A79W Bore size Bore size A Hs
Porting specifications Applicable stations Series Port size P, R Port location A, B C6 C3, C4, M5 VQ0 VQ1000 VQ2000 Side Max. 16 C3, C4, C6, M5 C4, C6, C8 C6 Side Max. 16 C8 Side Max. 16 D-sub connector (25 pin) 015 AXT100-DS25-030 050 Cable Assembly Wire color table by terminal number of D-sub connector cable assembly: ( ) The D-sub connector cable ass'y can be ordered individually or included
9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 D-R73, D-T79 D-R80, D-S79, S7P 180 D20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane 90 3 Basic type MSUB 7 Double vane D-R73, D-T79 D-R80, D-S79, S7P 180 20 Double vane is available with 90 rotation setting only. 149 Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location
Hs Auto switch 12 15 22.5 A B 33 101 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Proper auto switch mounting positions (mm) Auto switch type D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-A59W D-F5NTL D-F5F D-B5, D-B64 D-B59W Bore size (mm) A B A A A A A B A B B B B B 40 10.5 11.5 14.5 14 21 17 22 23 11 12 15 15.5 22 18 50 11 13
Hs A B A B 32 to 50 D-A73C D-A80C D-J79C D-A79W D-F7W D-F7V Approx. Hs Approx.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
(Note 3) 0 0. b JOG operation, positioning operation, programmed operation, DO forced output. (Note 1) # #. b (Note 3) Test operation mode Motor-less operation # #. d # #.
I r F I l f f i r ] Pilot valve specifications I I il*d*drffir -.-'l I lgh pr;iirr" lype, 15W coil I I at"hirg ly,pe I ),t.rra o tor. lW coil I o\,, walr rype 0 5W;o I a a ' t I o " o o c i o d o u b l e ' o l F n o ' o o v d a I 6 B v o n d o o l p d . " o I ' o' 1 .'|o-c I Coil voltages EtrT 'Consull SMC for available volages.
D D D D B B B Specifications and dimensions other than the above are the same as the standard type.