Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Nominal size Item 10 15 1 Size Suction flow rate L/min (ANR) 10/15 0.15 to 0.6 MPa 0.2 to 0.6 MPa 0 to 60C Operating pressure Ambient and fluid temperature 0.01 mm 180 c.p.m.
Bore size 6, 10, 15 Type M thread Rc NPT G Symbol BS Nil Shock Absorbers 20, 25, 32, 40 TN TF Type Bore size (mm) 25 32, 40 10, 15 20 6 Standard (shock absorber RB series) Magnetic holding force Refer to page 1517 for specifications.
Maintenance timing for emitter detection . 15 2-3. Indication/Setting Parts Description . 15 3. Selection and Setting of Product . 16 3-1. Sensing DC Mode . 16 3-2. Pulse DC Mode . 20 3-3. DC Mode . 25 3-4. Power supply cable wiring diagram . 27 4. Specifications . 29 4-1. Ionizer. 29 4-2.
B E E F G H L L M Model 2 x B L,L LQ3T11 LQ3T12 LQ3T21 LQ3T31 LQ3T32 LQ3T41 LQ3T51 LQ3T61 4 3 6 10 8 12 19 25 M 4.8 9.5 11 28.5 27.5 14 3.5 10 9 4 17 16 6 12 16 34.5 33.5 20 (E,E) (E,E) G H 9 18 21 47.5 44.5 25 5 22.5 19.5 L,L L,L 6 7 8 24 26.5 30 22 24 26 10 14 18 20 28 36 24 32 41 52.5 64 78 50.5 61.5 74 29 37 49 (E,E): Reference dimension for the inserted tubing from the end surface of
kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H
LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H
40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380 2,360 4,120 MHSHJ3-DB 520 770 1,340 2,310 4,120 5 3. 3-1. 1 2 3 3-2. 1 .
Other shapes do not comply with ISO1603 or ISO1179. 8) Light/surge voltage suppressor 7) Electrical entry Z Light/surge voltage suppressor L Lead wire length 0.3(m) L shaped plug connector LO Without connectors M Lead wire length 0.3(m) M plug connector MO Without connectors 9) Manual override Nil Non-locking push type D Push-turn locking slotted type E Push-turn locking (manual type) 10)
3/8 8.9 16.1 18.6 2.6 4.9 12.0 1.3 2.9 1.2 1.4 6.1 0.8 13.0 9.1 0.6 [226] [410] [473] [67] [125] [304] [33] [73] [31] [36] [154] [21] [330] [231] [15] 17.8 0.5 IDFB4E 1/2 [453] 17.8 [13] 1 1.1 10.8 [453] 1.2 [283] 3.1 [275] 10.8 17.9 10.6 1.7 9.1 1.3 0.6 9.4 3.1 IDFB6E [455] 0.6 [270] [31] [42] [80] [230] [32] [15] [240] [80] [275] 3/4 [15] IDFB8E 19.1 22.4 14.0 1 1.8 [300] IDFB11E [485]
Byte0 1 Byte1 2 Byte2 3 Byte3 PROFIBUS DP Byte4 ID(14h) Byte5 ID(11h) Byte6 Header Byte7 System diag.1 Byte8 System diag.2 Byte9 System diag.3 Byte10 System diag.4 Byte11 Reserved : : Byte18 Reserved Byte19 Header Byte20 0~7 Byte21 8~9 Byte22 Reserved : : Byte27 Reserved Byte28 A Byte29 A Byte30 A Byte31 B Byte32 B Byte33 B : : Byte61 L Byte62 L Byte63 L -71No.EX-OMN0027CN-D 1 7 6 5
Operating direction: Right Operating direction: Left a b c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .
nut C1 X L1 Auto switch D-A9, F9 Rod end male thread (mm) Bore size (mm) 63 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100
How to Order How to Order AMV AMP 20 Standard size Exhaust cleaner for vaccum Thread type Accessory Port size Port size Standard size Option Exhaust cleaner for clean room VEX Model Model AN Port size Max. air flow (l/min (ANR)) Accessory Option 1 4 3 8 1 2 3 4 Port size Max. air flow (l /min (ANR)) Standard size Thread type Standard size 360 650 1,500 3,700 7,500 16,000 2 3 4 3 6 15 37 75
20 25 Flow rate (l/min) IFW520 0.12 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.4 MPa P1 = 0.3 MPa 0.10 Pressure drop (MPa) P1 = 0.2 MPa 0.08 P1 = 0.1 MPa Rod 0.06 0.04 0.02 5 10 15 20 25 Flow rate (l/min) Working Principle Liquid flow creates a pressure differential nearby the orifice of the port of the body q.
) byte6 Wireless slave diagnostic information 1 (Wireless channel 1-7) Wireless slave module EX600-WSV# (Unit 3) (Wireless channel 001) Valve output: 32 points byte7 Wireless slave diagnostic information (Wireless channel 8-15) byte8 Wireless slave registration information (Wireless channel 1-7; bit 0 are fixed at "0".) byte9 Wireless slave registration information (Wireless channel 8-15)
Electrical Wiring 15 Without Output Function (IP8101-030 and IP8101-033) 15 With Output Function (IP8101-032 and 52-IP8101-034) 15 Electrical Wiring 16 C ATEX Intrinsic Safety Type of Explosion Protected Construction 17 ATEX Intrinsic Safety Type of Explosion Protected Construction 17 Explosion Protected Construction Rate 17 Wiring 17 Barrier 18 Description of Components 19 Contents of LCD
20 0 5 10 15 20 Pushing Position [mm] Pushing Position [mm] LAT3-30 LAT3-30 6 6 Thrust Setting Value3.9 5 5 Thrust Setting Value3.9 Pushing thrust [N] Pushing thrust [N] 4 4 Thrust Setting Value2.6 Thrust Setting Value2.6 3 3 2 Thrust Setting Value1 2 Thrust Setting Value1 1 1 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Pushing Position [mm] Pushing Position [mm] Operating conditions: Operating
PF-OMK0003CN-E PFMV505(F)-1 PFMV510(F)-1 [kPa] [kPa] [L/min] [L/min] PFMV530(F)-1 [kPa] [L/min] -21No. PF-OMK0003CN-E PFMV5 PFMV5 + L (ZS-36-A) 10n +24(n=15) 10n +14 L L L -22No.
VBA200: Qb = 500 [l/min (ANR)] VBA400: Qb = 1050 [l/min (ANR)] NO VBA400 NO Max. 0.05 MPa Avoid pulsation Judgement of flow rate Qb < Q YES VBA200 YES Can not get necessary pressure. Tank capacity (l) Tc [s] = L W Obtain the tank capacity V. Select tank from table below.
and switching valve to pad by piping system Q2 = S x 11.1 l/min (ANR) Q : Smaller one between the Q1 and Q2 l/min (ANR) S : Effective area of piping (mm 2) Adsorption flow (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Selection Procedure Tubing length (m) Air consumption From the point at which the valve's effective area of 18 mm 2 and the piping volume of 5 l intersect, the