VNH

Material Cast iron Undercover Body Plated Cast iron Aluminum alloy w e Cover Plate r Iron t Stainless steel Valve element A Valve element B Piston Return spring y Stainless steel u Aluminum alloy i Piano wire o Stainless steel Valve seat !0 Stainless steel Rod !1 Stainless steel Parallel pin !2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

SZ3000

0 3 position pressure center (A) 4 (B) 2 4(A) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA) 1(P) 3(EB) i Parts list Material Description No.

VHS

1 e 3(R) Effective area (mm2) Model Component Parts VHS 2500, 3500 5 VM/VR Description Material ADC12 ZDC2 ADC12 Zinc alloy Zinc alloy C3604B A2017B C3604B Description No. q w e r t y u i No. !0 !1 !2 !3 !4 !5 !6 !7 !

VXA21/22

VX070-020 VXA21 VXA22 01 ( ) 1 8 02 ( ) 02 ( ) VXA223l VXA224l VXA225l VXA226l VX070-022 1 4 1 4 03 ( ) 3 8 04 ( ) 1 2 VX070-029 Ordering Example (Example) Series VXA21, Orifice size 4.5mm, Normal closed, Rc(PT)1/4 (Part number)VXA2130-02 4.1-59 VXA21/22 Dimensions (Orifice size 3 mm, 4.5 mm, 6 mm) VXA212m, VXA213m, VXA223m, VXA224m Model Port size P Rc(PT) A B C D E F With bracket G H I

ZQ

Table (1) Combination of solenoid valve, pilot valve and power supply voltage Applicable power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 13-9-2 3 Compact Vacuum Ejector Series ZQ How

ZR

Material PVF PVF Manifold base Release flow rate adjustment needle Function plate Individual spacer Filter case y u i o !0 Refer to page 13-3-7. Refer to page 13-3-22. Refer to (4) below. ZR1-FZ (30 m) t Note) ZSE2-OR-15Note) Precautions on handling the filter case 1. The case is made of polycarbonate.

PF2D

1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

RB/RBL/RBQ

Component Parts Description Outer tube Piston rod Piston Bearing Return spring Stopper Material Rolled steel Special steel Special steel Description Check ball Accumulator Rod seal Scraper Bumper Material Bearing steel Fluoro rubber NBR NBR Polyurethane Treatment Treatment Black nickel plated Heat treated, Hard chrome plated Heat treated No. q w e r t y No. u i o !0 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

5 Port Air Operated Valve

(EB) u i 3 position pressure center 3 (EB) 2 (B) 1 (P) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) (Drawing shows a closed center type.)

Series VS

37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41 39 T 57 65

KP/KPQ/KPG

T 04 06 08 10 12 4 6 8 10 12 VMG Construction Description Material Component Parts No. q w e r t y u i o !0 !

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

VR4151/4152

1 i !8 y e !0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port !4 !3 w !2 !

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Number of step data (Points) I/O cable length [m] 2 2 stroke end points/ 12 intermediate points (Programless) Nil 1 3 5 Without cable 1.5 3 5 Parallel I/O type N P NPN PNP The controller is sold as single unit after the compatible actuator is set. Confirm that the combination of the controller and the actuator is correct.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Applicable filter model Set description Spare element O-ring for cover I-68S-A I-62S-A I-63S-A Element size (mm) 6 x 4 x L25 12 x 8 x L20 16 x 12 x L25 ZFC05 ZFC10 ZFC20 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. Note) Spare elements and O-rings for the cover (Applicable filter: ZFC10, 20) are sold in sets of 10 pieces each. *Do not wipe with alcohol, etc.

ZL112A

1 Multistage Ejector ZL112A Series 1 DC type only RoHS How to Order ZL112A Without valve M Z D A M L ZL112A K1 5 With valve q t o u i w e r y !0 !1 !

Space Saving Vacuum Ejector Series ZQ [Option] Note) CE compliant: For DC only.

Pilot valve symbol 200 AC 110 AC 220 AC 12 DC 100 AC 24 DC q K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y w e Nil r Nil Y t y Nil u Nil i Nil o Nil !0 Nil Combinations q to !

Mini Free Mount Cylinder

2 4 Built-in magnet Without magnet Single Acting, Spring Return u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male threaded Replacement Parts: Seal Kit Double Acting Component Parts Contents No. Description Note Material Kit no.