SMC Corporation of America
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Construction 3 1 Component Parts Description Material No. q w e r t y u 4 Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Resin Stainless Steel Stainless Steel Stainless Steel NBR NBR, Resin 2 5 6 7 4.3-5 Series VQ20/30 Dimensions/Series VQ20 In-line style/Grommet(G) VQ21A1-mGm-m Dotted line: Bracket mounting style (-F) 4.3-6 Series VQ20/30 For Dry Air,

Symbol Type Nil Rc F G N NPT Micro mist separator Mist separator Symbol Port size Applicable body size 70D 80D 90D 10 1 V 14 1 1/2 V V V 20 2 V Accessory Part Nos. 1 2 Description Model 70D 80D 90D Bracket AM-BM70D AM-BM90D L * Includes mounting bolts (2 pcs.) Construction: AFF, AM, AMD t q IN OUT w Component Parts No.

[cm] -70No.PF-OMS0001CN-A PFMC7501/7102/7202 2x A B D E F H K L N PFMC7501/7102 Rc1/2NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4NPT3/4G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0001CN-A M8 (ZS-40-A) -72No.PF-OMS0001CN-A Revision history A [September 2016]

5 Brass Plug Center roller Nitriding Carbon steel u !6 High carbon chrome bearing steel Spring Center pin Nitriding Carbon steel i !7 Cap Resin o Replacement Parts: Seal Kits No. Description Material Kit No. MHC2-16 MHC2-10 MHC2-20 MHC2-25 !8 !9 NBR MHC10-PS MHC16-PS MHC20-PS MHC25-PS Seal kit @0 @1 2.6-5

0.5% Within 1% Sensitivity Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (lvlax.) less than 0.25 SCFM @ 20 osi 0,7 SCFM @ /u osl 0.25 scFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFIVI @ 20 Dsi 0.7 SCFM @ 70 DSi Supply Pressure Variation Effect (Max.)

Flow Rate Characteristics Construction XT13-394-06, 10 Max. operating flow rate It is recommended to be used within the max. operating flow rate (negative) range. ( ) Conditions/ Inlet pressure: 0.5 MPa, Fluid: Water 0.5 82 SMC Outlet pressure MPa 0.4 K P C U O S H L 0.3 0.2 82 0.1 0.0 10 20 30 40 50 60 70 0 Flow rate L/min (ANR) w INA-48-1-06, 10 142 (Max. 146) Conditions/ Inlet pressure

Linearitv Within t 1% Within t 2% Hvsteresis' Within 1% Repeatabilitv Within 0.5% Within 1% Sensitivitv Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (Max.) less than 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFM @ 20 psi 0.7 SCFM @ 70 osi 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi Supply Pressure Variation Effect (Max.)

Linearitv Within t 1% Within t 2% Hvsteresis' Within 1% Repeatabilitv Within 0.5% Within 1% Sensitivitv Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (Max.) less than 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFM @ 20 psi 0.7 SCFM @ 70 osi 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi Supply Pressure Variation Effect (Max.)

Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

2 w u !0 !5 !4 Component Parts Replacement Parts No. Description Material Note No. Description Material Part no. Qty.

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: S (w/Flow Adj.

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve: None; Stop Valve: None, Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Stations: 08 (8 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.