SMC Corporation of America
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Analog output Output impedance Approx. 1 k Output current (Rated pressure range) Current output: 4 to 20 mA2.5%F.S. Current output 4 Linearity 1.5%F.S. 1.0%F.S.

4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No. Description Material Note 1 Valve PBT 2 Valve sheet A PBT 3 Valve sheet B PBT 4 Valve sheet C PBT No.

ZS-28-C-1 Sensor connector 1 pc. ZS-27-C Panel mount adapter Mounting screw (M3 x 8 L) 2 pcs. ZS-27-D Panel mount adapter + Front protective cover Mounting screw (M3 x 8 L) 2 pcs. ZS-27-01 Front protective cover -11No.PF-OMJ0018-F Summary of Product parts Front Item Description Displays the flow value, setting mode, and error indication.

(Note 4) One type only. Suffix R: Bracket, Name plate, Mounting on the opposite side Note1) Type of setting 1 : Air operated Port size 02 : 1/4 Note4) Accessories NIL: None B: Bracket (P36202028) G: Pressure gauge Note2) Note3) Thread type when Rc and G. Thread type when NPT. IR2120 : G43-10-01 G43-P10-N01-X30 2 : 0.010.8MPa Set pressure Thread type NIL:Rc F:G N:NPT 4.

Add/dEC P1AH/n2AH P1dH/n1dH (39 ) P2L/n2L P2H/n2H/H2 (38 ) P_2/n_2/H_2 (38 ) 4. 4. 4. 4. [F 2] OUT2 36 No.LFE*-OMY0008 1. 1. 1. 1. [F 2] [oUt2] OUT2 [-] 2. 2. 2. 2. (ON-OFF ) 37 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_2]) 4. 4. 4. 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. 4. 4. 4. [F 2] OUT2 38 No.LFE*-OMY0008 c. / Add/dEC OUT1 (31 ) ( [n2AH]) ( [n2dH]) c.(32 ) 4. 4. 4. 4.

/AWG20 (4 pcs.), AWG28 (6 pcs.) Nominal cross section 0.54 mm2 (4 pcs.) 0.09 mm2 (6 pcs.) Outside diameter 0.96 mm2 (4 pcs.) 0.38 mm2 (6 pcs.)

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -53No.PF-OMX0007-A Characteristics data Flow rate/Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A701H 10 L

N L H L H k Pa MODE S ET HYS Air supply port (P port) Note 4) (M3 x 0.5, piping not required) 71.9 (74.9) 66.9 (63.1) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 (M5 x 0.8) SM C 29.4 3 20.2 30.5 P 20.3 9.7 V Exhaust part 17.7 22.8 0.8 (Grommet type) 3 107 10 Note 1) The above dimensions are for ZQ11U-K1 -DC.

S R U N L H L H k Pa MODE S ET HYS Air supply port (P port) Note 4) (M3 x 0.5, piping not required) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 71.9 (74.9) 66.9 (63.1) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 (M5 x 0.8) SM C 29.4 3 20.2 30.5 P 20.3 9.7 V Exhaust

Inlet pressure (MPa) 14-20-5 4 Series AMG Dimensions AMG150 to AMG650 Accessory D: With auto-drain (N.O.) Drain cock: Black One-touch fitting C: With auto-drain (N.C.)

AMH550 AMH650 AMH850 Port size N.C. auto-drain N.O. auto-drain Drain guide 01 B 06 10 14 B 3 4 1B 1 8 Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 4 B 1 B 1 2 20 2B IN-OUT reversal direction -T Element service indicator Option HA AT ID AMG AFF AM Misc. 14-20-31 3 Series AMH Flow Characteristics/Select the model taking the max. flow capacity into Element oil saturation Initial condition Note)

Model AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 AMG150 (1) Flow rate (l /min (ANR)) 750 1500 2200 3500 6000 12000 300 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 3/4, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow is at 0.7MPa. Max. flow depends on operating pressure.

Size For D-M9 Excluding CRBW---CM D-M9 With vertical auto 10 P811010-4M P811010-4 switch and angle 15 P811020-4M P811020-4 adjustment 20 P811030-4M P811030-4 30 P811040-4M P811040-4 Standard type (Double shaft) 40 P811050-4M P811050-4 With vertical auto switch and angle adjustment With angle adjustment unit Rotary actuator with angle adjustment Part number for CRBW---BPart number for vertical

H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section Air Preparation Accessories n 1 2 3 4 5 6 7 8 9 10 L1 28 44 60 76 92 108 124 140 156 172 L2

mA 4.16 mA 20 mA B D 0 L/min C*2 D Voltage output (0 to 10 V)*1*3 0 V 0.1 V 10 V Model Minimum value of rated flow range*4 Maximum value of rated flow range PF3A703H 30 L/min 3000 L/min PF3A706H 60 L/min 6000 L/min PF3A712H 120 L/min 12000 L/min A C 0 0 *1 Analog output accuracy is within 3% F.S. *2 A and C will change according to the setting of the zero cut function. *3 The analog output

2 No.VQZ100V-OMT0001 / / / / 1 1 1 1 1.5 1.5 1.5 1.5 * * * *3 3 3 3) ) ) ) 3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / 1 DC VQ DC N.O.() 3 () 0.1 2 C-R C-R () C-R 3% 8% (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) (C-R ) OFF 2)() / / / / () 3 3 ( ( ( ( ) ) ) ) () 3 4 No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / -10 /

Note 4) Not available as standard with C, R mount, with rod boot. Note 5) See specifications for standard and maximum stroke lengths. Note 6) Bumper is offered at no additional cost on 7/8" and 1-1/4". They are options on the other bore sizes. The C after the bore size must be included in either case. Bumper affects cylinder overall length of some models. Refer to the dimensional data.

Remarks Sensor connector (For PFMB) ZS-28-C-1 Sensor connector (For PFMC and PF3A7) ZS-28-CA-4 Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01

Press this button to change to the bottom display mode. button (SET): Press this button to change the mode or set a value. 20-22 0.3-0.5 1.2 to 1.6 Blue ZS-28-C-4 Manual setting [Default setting] Auto preset 1.6 to 2.0 Grey ZS-28-C-5 Operation with OUT2 Operation with OUT1 [Default setting] To obtain more detailed information about operating this product, please refer to the SMC website (