Electric Actuator

80 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 Overhang: L2 [mm] Overhang: L3 [mm] Overhang: L4 [mm] Overhang: L5 [mm] 600 600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work load [kg] Work load [kg] 1,000

Air Catch Sensor Series ISA

Detection nozzle: 1.0 Detection side piping: 6 x 4 tubing Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing Detection nozzle: 2.0 Detection side piping: 6 x 4 tubing 70 70 70 60 60 60 Supply pressure Supply pressure Not detectable 50 50 50 0.1MPa Hysteresis (m) Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa

4/5 Port Solenoid Valve

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 65 Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length) Manual override L1 14 L2 4-4.5

Membrane Air Dryer

70 0 40 80 120 160 0 40 80 120 160 200 240 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) IDG100LA, 100SA IDG75LA, 75SA Outlet air atmospheric pressure dew point (oC) Outlet air atmospheric pressure dew point (oC) 0 P1 = 0.3 MPa P1 = 0.3 MPa 0 10 10 P1 = 0.5 MPa P1 = 0.5 MPa 20 20 P1 = 0.7 MPa 30 30 IDG100S P1 = 0.7 MPa IDG75SA 40 40 50 50 IDG75LA 60 60 IDG100L 70

KQ2

K P. 70 M Union Y Bulkhead male elbow Union tee Use to connect tubes through a panel, changing by 90 in a tube fetching direction. H KQ2U KQ2LE KQ2T P. 72 P. 73 Use to connect tubes in both 90 directions. Use to branch line in the same direction.

Mechanically Jointed Rodless Cylinders

80 96 55 70 80 29 35 40 48 130 152 185 19 20 23 30 35 40 46 8 8 9.5 68 80 92 108 10 10 14 14 5 5 6 6 Note) Floating brackets are shipped as a set of left and right brackets.

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control LEC-MR-J3BAT 8 1000 1000 100 100 0 0 MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

LEC-OM02704CN

A B C L AERSBAN-DSET 100 86 30 2 A 70 AERSBAN-ESET 70 56 1 B 45 13 23 13 (d) (FR-BSF01FR-BLF()) ( )0.5MHz5MHz (L1L2 L3)(UVW) 4 4 2 FR-BSF01() (3.52(AWG12)) (110) 950.5 2-5 (22.5) 11.250.5 (65) 33 (65) NFB 1 MC 4.5 L 1 L 2 L 3 FR-BLF() (5.52(AWG10)) ( 4 NFB 2 MC 7 L 1 31.5 L 2 7 130 85 L 3 2 35 80 2.3 (4 ) 160 180 13 24 13 (e) (FR-BIF-(H)()) 10MHz [mm] FR-BIF 4mA

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control 8 1000 1000 100 100 0 0 LEC-MR-J3BAT MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

2.3 45 1/4, 3/8 70 150.5 36 68 70 70 54 70 55.5 27.5 7 65.5 85 12.5 8.5 75 2.3 50 1/4, 3/8, 1/2 23 Regulator with Built-in Pressure Gauge with Back Flow Mechanism Series ARG20K/30K/40K How to Order ARG 20 K 01 G1 Option Body size Description 0.02 to 0.2 MPa setting Non-relieving type Name plate and pressure gauge in imperial units (PSI) Symbol Nil 1 N Z Symbol 20 30 40 Port size 1/8 3/8

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43 80.3 70 43.3 66 65.8 11 13 90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

Vacuum Unit

Ejector Exhaust Characteristics/Flow Rate Characteristics (Representative value) ZK212 Exhaust Characteristics Flow Rate Characteristics 100 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 90 90 60 80 80 40 Vacuum pressure 70 70 Port exhaust 20 Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Silencer exhaust/Complex

HRX-OM-X071

/ 70 Dimensions 18 mm W483xD550xH710 Accessory19 Power supply connector,Maintenance handle for particle filter10, Operation manual,Particle filter element10 Weight 20 kg 74 67 1: No condensation should be present.

HEC-OM-Y008

These instructions indicate the level of potential hazard by label of Month y Z A B C D . 0 0 0 10 20 30 40 50 60 70 Do not use devices that generate electromagnetic radiation such as Jan o yo Zo Ao Bo Co Do . 0 10 20 30 40 50 60 70 Caution, Warning or Danger, followed by important safety information which must be carefully followed.

HEC_001W-E

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

HEC-OM-U015

HECR008-W HECR012-W 1 Unused BUS + 0 0 Operation temp. range 10.0 to 60.0 C (No dew condensation) 5 4 3 2 1 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 During operation or maintenance of the product, do not disable the Communication Indication temp. range -9.9 to 80.0 C 2 RXD (RD) Unused Circulating fluid temp. deg.C Circulating fluid temp. deg.C connector Temp: 10 to 35 C Humidity : 35

CNG

1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) M6 x 0.75 26.5 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3 12 40 30 17 62 215 (223) M5 x 0.8 depth 7.5 11 193 (201) Stroke x M8 x 1.0 26.5 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204) 28 M10 x 1.25 6 14 M14 x 1.5 44 1/8 2.5 81 169 (178) 12 4 12 50 35 17 70

MGZ Series

100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.