3 Position Cylinder Series RZQ

U U U U U U U U 32 40 50 63 27 29 31.5 32.5 38.5 35 38 34 30.5 32.5 35 36 42 38.5 41.5 37.5 44 REA 36.5 38.5 41 42 48 44.5 47.5 43.5 50 40 42 47.5 48.5 54.5 51 54 50 56.5 REB REC Operating Range CY (mm) Bore size Auto switch model 32 40 50 63 CX D-A9 (V) 9.5 9.5 9.5 11.5 MQ D-M9 (V) D-M9W (V) D-M9A (V) L D-A7 (H) (C) D-A80 (H) (C) 6 5.5 6 6.5 RHC 12 11 10 12 RZQ D-A79W 13 14 14 16 D-F7 (

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

PEEK

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM105R Description No. Material Component Parts: LVM10R3, 10R4, 10R6, 105R !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bushing assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 SUY u Spacer 8 i !

0.55

Exploded view q r How to Calculate the Flow Rate u For obtaining the flow rate, refer to front matters 44 to 47. t y e o i o Magnifying figure Self-up screw 2 1 3 1504

Mechanical Valves Series NVM, NVFM, NVZNI

E G H K M N P 5.66 143 9 4.39 r 1 1 4 ) 1 '18 't 28 32 5) ) 0 6 1 s ) 012 (3) 080 204 1 5 4 (39) o 7 1 (18) 1 2 6 (321 1 4 2 (36) 1.20 o,24 (6) (30) NV:2il450-N012 U T 4-63 lbs. (2.1 Ko) P.T 0.1 7 in. (4.4 mm) u 0.08 in. (2.0 mm) 0.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A B c U E F G H K M N P R 525 t33 4) 4 3 9 1 1 1 4 ) 1 1 8 t30l ) 4 7 t22\ 0 0 6 a1 5l ) l t (3) 0 8 0 20 4\ 1 5 7 r4nl )

High Purity Chemical Valve

This can cause damage to the valve body. 482 Series LVH Manually Operated Integral Fitting Type/Threaded Type Construction Integral fitting type Threaded type u u q q e w e w LVC A B A B r LVA Description Material Parts list No.

Electromagnetic Digital Flow Switch

Sea water u Corrosive to the product GALDEN u Electric conductivity is too low. Fluorinert u Electric conductivity is too low. Ethylene glycol u Electric conductivity is too low. Ethanol u Electric conductivity is too low. Methanol u Electric conductivity is too low. Chloride water (Hypochlorous acid) u Corrosive to the product 1. Never use in the presence of explosive gases.

Thermo-chiller

Applicable model HRL-BB002 HRLE050-m-m HRL-BB001 HRLE090-m-m y u t Parts List r i No. Description Material Applicable model Size Qty.

Manifold Specifications

1U For U side End block assembly t VZ3000-52A-1D For D side End block assembly y u VZ3000-52A-2U For U side, set with e End block assembly VZ3000-51A-1M Without D-sub connector For indicated location SUP/EXH block assembly i To add a manifold block assembly, add it to the U side so that the terminal number of the D-sub connector and the valve link position will be in accordance with the circuit

SJ3A6

U D B M U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Special specifications SUP/EXH block fitting spec.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

HEC_W-E

This item is applicable U n i t N u m b e r M O D E < 0 only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

HEC_001W-E

U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f 7-10 Operation 7.6.3 Setting mode, Level 3 1.Unit Number Setting range : 0 to F (Hex decimal) Indicated content : Unit number (Ex. : 0) Function : Sets unit number used. This item is applicable only when multiple units are used. U n i t N u m b e r M O D E < 0 2.

Air cylinder

C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2. Storage of seals C a u t i o n Store seals in sealed packaging such as polyethylene bag and place it in a box. Avoid locations exposed to direct sunlight and high temperature and humidity.

Vacuum Unit Ejector / Vacuum Pump System

Exploded View of Manifold Individual wiring (3)Tension bolt (2) End plate U (1) End plate D (6) (4) (5) (7) U side Single unit for manifold (8) (Individual wiring specification) D side Common wiring (9) -37No. ZK2-OM01301 7.2. How to Increase Manifold Stations 7.2.1 Individual wiring specifications 1) Remove two tension bolts. 2) Remove the end plate U.

Air cylinder

C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 25 3-2-1. Disassembly / Reassembly C a u t i o n Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth. Make sure no particles are present. Do not scratch the seals.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

side D side Lead wire kit, with 1.5 m cable 1 to 12 stations U side D side Lead wire kit, with 3.0 m cable Lead wire kit U side NKE Corp.: Uni-wire System S kit 16 stations 16 NKE Corp.: Uni-wire H System 1 to 8 stations SUNX Corp.: S-LINK System (16 output points) 8 SUNX Corp.: S-LINK System (8 output points) 1 to 4 stations 8 stations D side DeviceNet, CompoBus/D (OMRON Corp.) 16 16 stations

Electric Actuators

3 e u !

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.