SMC Corporation of America
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O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122

O f o r e b m u N g n i t c e n n o c s e b u t h c n I h c n I h c n I c i r t e M c i r t e M c i r t e M 8 / 1 1 0 P 0 1 M D K 1 0 S 0 1 M D K 2 . 3 3 2 P 0 1 M D K 1 0 S 0 1 M D K e u l B 2 3 / 5 3 0 P 0 1 M D K 3 0 S 0 1 M D K 4 4 0 P 0 1 M D K 3 0 S 0 1 M D K 0 1 d e R 4 / 1 7 0 P 0 1 M D K 7 0 S 0 1 M D K 6 6 0 P 0 1 M D K 7 0 S 0 1 M D K 6 1 / 5 9 0 P 0 1 M D K 9 0 S 0 1 M

5 1 l 3 = % =V2 0 1 0 3 NVEP 31 4 Size I Pressure Size Code PSIG (Kg7cm2) NPTF (Base mount type) 2 1 7-90 (0.s-5.5)O2=t/c 03=% 2 15-135 (1-9) 4 1 o.7 -22.5 (0.051.s) 03=% O4=th 06 =Vr Subplates (NVEF2120; NVEFII20; NVERI I20) Part No.

The indicator light is lit when switch is off for D-P70 and D-P75. Thus, leak current is EXPECTED (D-P70 .. Max. 1 .8 mA, D-P75.. Max. 1.2 mA). This leak current could interfere the micro current control circuit.

8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 (R) Applicable tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm2 D1 Model

5 1 l 3 = % =V2 0 1 0 3 NVEP 31 4 Size I Pressure Size Code PSIG (Kg7cm2) NPTF (Base mount type) 2 1 7-90 (0.s-5.5)O2=t/c 03=% 2 15-135 (1-9) 4 1 o.7 -22.5 (0.051.s) 03=% O4=th 06 =Vr Subplates (NVEF2120; NVEFII20; NVERI I20) Part No.

0.8 (116) 5.9 (0.33) 3 1/8 (6A) 1/4 (8A) 3.0 (435) 1/8: 0.21 (0.46) 1/4: 0.24 (0.53) 2 VCB2 0.5 (72) 9.2 (0.51) 4 0.3 (43) 11.7 (0.65) 5 2.0 (290) 6.3 (0.35) 3 0.8 (116) 9.7 (0.54) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 3 VCB3 0.5 (72) 14.4 (0.80) 5 3.0 (435) 0.2 (29) 24.8 (1.38) 7 0.1 (14) 37.8 (2.10) 10 3.0 (435) 6.3 (0.35) 3 1/4 (8A) 3/8 (10A

-04M-1) 8 8 KKA6 Series (KKA6P-04M-1+KKA6S-04M) Flow rate m3/min (ANR) Flow rate m3/min (ANR) 7 7 KKA4 Series (KKA4P-02M-1+KKA4S-02M-1) 6 6 KKA4 Series 5 5 (KKA4P-02M-1+KKA4S-02M) 4 4 3 3 2 2 1 1 KKA3 Series (KKA3P-01M-1+KKA3S-01M) KKA3 Series (KKA3P-01M-1+KKA3S-01M-1) 0 0 0 0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Pressure MPa Pressure MPa Pressure

Connection thread size NPT , NPT, R NPT, R NPT, R NPT, R Standard torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 Connecting Female Thread: Rc, NPT, NPTF 1 16 1 8 Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 4 3 8 1 2 1 8 1 4 3 8 1 2 30 to 60 30 to 60 15 to 45 15 to 30 5 to 7 11 to 13 14 to 16 20 to 22 Courtesy of Steven Engineering

M5 x 0.8 4.45 5.8 7.45 8.9 10.9 14.1 17.9 21.8 5.2 8.3 10.5 13.1 6 8 10 12 2.45 3.05 3.95 4.9 5.4 1.4 1.4 1.6 2 2H9 2.5H9 3H9 4H9 5 8 10 12 MHZ2-16D3 1), 2) 7.4 MHZ2-20D3 1), 2) 11.6 MHZ2-25D3 1), 2) 16 1) Specifications and dimensions other than the above are the same as the basic type (Narrow type is not available for D3). 2) The overall length is the same as the MHQ(G) flat finger

Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 26.1 3 R, NPT1/8 13.6 18.3 26.1 Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times.

The indicator light is lit when switch is off for D-P70 and D-P75. Thus, leak current is EXPECTED (D-P70 .. Max. 1 .8 mA, D-P75.. Max. 1.2 mA). This leak current could interfere the micro current control circuit.

Valve + Digital vacuum switch + Filter ZR100-K1M-D1 Circuit diagram 1 2-Elliptical hole (mounting hole) 2 10 2 10 2 23 PS PE Note) 1 indicates the dimension when bracket A is mounted.

to output the ON/OFF signal to an external device. 3: When the 1 switch output type (output specification symbol is L) is used, [F5] is displayed as [---] and cannot be set. 1 to 5 V or 0 to 10 V can be selected when the analogue voltage output type is used.

Mounting screw (M3 x 5 L) There is a flow of 5% or more in the wrong direction. Ensure the flow is in the correct direction. Flow error Panel mount adapter (can be rotated 90 degrees for mounting). Function selection mode Do not operate in an atmosphere containing flammable, explosive or corrosive gas. Fire or an explosion can result. This product is not designed to be explosion proof.

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

L5 L6 L7 L8 M1 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 12 9.3 12 13.2 15.2 13.2 15.2 18.5 18.5 21.7 36 37 39.5 40.7 42.6 53.4 57.2 59 65 69.8 76.9 81.3 4.5 5.2 6.1 5.2 6.5 6.9 8 7.4 8.2 9.8 10.3 11.3 11.2 11.9 12.8 12.3 13.6 16.5 17.6 19.3 20.1 21.7 22.7 23.7 23.8 24.5 25.5 28.9 30.2 33.4 34.5 38.6 39.4 41 51.6 52.6 21 21.7 22.7 25.4 26.7 28.4 29.5 33.6 34.4

exhaust center 3 position pressure center 2 3 4 5 5 24VDC Rated voltage 2 1 Station U side D side Pilot type 24VDC -COM SMC Nil R Internal pilot External pilot SS5X3-45GD-05U-C6 .1 set (manifold part number) SX3140-5LOZ ... 3 sets (single solenoid part number) SX3240-5LOZ ... 2 sets (double solenoid part number) The "" symbol indicates mounting.