Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: 02 (Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: D (D Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: None, Option 2: W (IP65 Protection Compatible)

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: 02 (Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: D (D Side Mounting)

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: 02 (Rc1/4), Thread: N (NPT), Kit Name: T (Terminal Box), Box Mounting Position: D (D Side Mounting)

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: 02 (Rc1/4), Thread: N (NPT), Kit Name: T (Terminal Box), Box Mounting Position: D (D Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: N (Name Plate)

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: 02 (Rc1/4), Thread: Rc (PT), Kit Name: T (Terminal Box), Box Mounting Position: D (D Side Mounting), Control Unit: None, Release Valve Rated Voltage: w/o Air Release Valve, Option 1: N (Name Plate)

Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

X500 AC (50/60 Hz) 1 2 3 4 7 B DC 5 6 24 VDC 12 VDC X600 TRIAC output specification (Refer to page 14.) 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC PE port EA/EB port VF1000 VF3000 > VF5000 > A, B port size VF5000 > > VF1000 > > VF3000 > > Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 Refer to Made to Order (Page 14) when piping to PE port is required.

SS5V 02 Station Manifold, Cassette Base. VVM.

SS5V 02 Station Manifold, Tie-Rod Base.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D

Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D

Function: 1 (2 Position Single), Piping: 3 (Body Ported), Exhaust: 0 (Individual), Low Wattage: None, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 6 (12VDC), Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: D (Push-turn Locking Slotted Type), A, B Port Size: 02 (1/4), Thread: T (

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 6 (12VDC), Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Without light/surge voltage suppressor, Manual Override: D (Push-turn Locking Slotted Type), Port Size: 02 (1/4)

Function: 2 (2 Position Double), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 6 (12VDC), Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Without light/surge voltage suppressor, Manual Override: D (Push-turn Locking Slotted Type), Port Size: 02 (1/4)

Function: 2 (2 Position Double), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 6 (12VDC), Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size: 02 (1/4), Thread: T (NPTF)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 6 (12VDC), Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size: 02 (1/4), Thread: T (NPTF)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 6 (12VDC), Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Without light/surge voltage suppressor, Manual Override: D (Push-turn Locking Slotted Type), Port Size: 02 (1/4), Thread: T (NPTF)

Function: 2 (2 Position Double), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 6 (12VDC), Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Without light/surge voltage suppressor, Manual Override: D (Push-turn Locking Slotted Type), Port Size: 02 (1/4), Thread: T (NPTF)

Min. Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm³): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1/4, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1/4, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional

Size: 1/8, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: None, Option 1: Metal Bowl, Option 2: Flow Direction: Right->Left