Dedicated Controller Series LC1 Uniaxial Type

T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

Fluoropolymer Piping Equipment

Basic size With reducer Refer to the pamphlet High-Purity Fluoropolymer Fittings Hyper Fitting/LQ1, 2 Series Work Procedure Instructions (M-E05-1) for connecting tubing and special tools. (Downloadable from our web site.)

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x 8 12-CY3R20 18.5 19.5 26.4 18.5 6 44 42.5 44 41 23.5 43 23.5 3 5.2 23.5 15 M6 x 1 x 8 12-CY3R25 10.5 111. 33.6 10.5 7 55 53.5 55 52 291. 54 291. 3

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Steam Valve

G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3

HAA

70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 13

Air Cooled Aftercooler Series HAA 1

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto-drain).

Series HAW Water Cooled Aftercooler 1

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto drain).

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 52, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Port thread type: M Screw, Auto

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 52, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Port thread type: M Screw, Auto

Side Seal: None, Piping Format: Standard type, Port Screw Type: M screw, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.1 to 0.8, End Block: No unit, Custom-made: None

Side Seal: None, Piping Format: Standard type, Port Screw Type: M screw, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.1 to 0.8, End Block: No unit, Custom-made: None

Side Seal: None, Piping Format: Centralized piping type, Port Screw Type: M screw, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: M9P, Lead Wire Length(m): 0.5, Lead Wire Connector: M8 3‑pin plug connector, The number of the switches: 2, Custom-made Specifications: 0.1 to 0.8, End Block: L, Custom-made: None

Side Seal: Yes, Piping Format: Standard type, Port Screw Type: M screw, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.1 to 0.8, End Block: No unit, Custom-made: None

Side Seal: Yes, Piping Format: Standard type, Port Screw Type: M screw, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: M9B, Lead Wire Length(m): 0.5, Lead Wire Connector: -, The number of the switches: 2, Custom-made Specifications: 0.1 to 0.8, End Block: L, Custom-made: None

Side Seal: Yes, Piping Format: Centralized piping type, Port Screw Type: M screw, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: M9P, Lead Wire Length(m): 0.5, Lead Wire Connector: M8 3‑pin plug connector, The number of the switches: 2, Custom-made Specifications: 0.1 to 0.8, End Block: L, Custom-made: None

Side Seal: Yes, Piping Format: Centralized piping type, Port Screw Type: M screw, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.1 to 0.8, End Block: No unit, Custom-made: None

Side Seal: Yes, Piping Format: Centralized piping type, Port Screw Type: M screw, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: M9BA, Lead Wire Length(m): 3, Lead Wire Connector: -, The number of the switches: 2, Custom-made Specifications: 0.1 to 0.8, End Block: L, Custom-made: None

Side Seal: Yes, Piping Format: Centralized piping type, Port Screw Type: M screw, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.1 to 0.8, End Block: No unit, Custom-made: None