IZx-OMT0049

Procedures to Operation . 22 2-1. Flow chart to operation . 22 2-2. Initial setting (IZT41/42) Initial setting is not necessary for IZT40) . 22 3. Installation and wiring . 23 3-1. Installation of Ionizer . 23 3-1-1. Precautions for Installation . 23 3-1-2. Adjustment of Pressure (Flow adjustment) . 23 3-1-3. Selection of piping port size . 23 3-1-4.

HRX-OM-T002

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when the set time has passed. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

KS/KX

5.0 3.5 5.0 8 12 24 14 12.8 23 17 6 25.5 26.5 1 8 1 4 17 23 23 29 38 56 64 82 76 93 14 8.6 8.6 4 K 26 26.5 29.5 31 34 35 38 36.5 39.5 30 31 32 37.5 38 39.5 40.5 42 1 8 Applicable tubing M 17 15.2 26 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 8 17 21.6 14.9 Connection thread H 10 22 18.5 31.5 21 22 30.5 25.0 7 D 24 24 20.9 34 22 8 12 35.1 35.1 MS Reference dimensions after R thread installation

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief

NAAMS Standards Compliant

8.5 R7 22 20 R7 22 12.5 22 20 [mm] [mm] Model NAAMS code A B Weight [kg] CKZ-63A025 ACA025M 135.0 81.3 1.7 CKZ-63A026 ACA026M 165.0 111.3 1.9 CKZ-63A027 ACA027M 195.0 141.3 2.1 CKZ-63A028 ACA028M 225.0 171.3 2.3 CKZ-63A029 ACA029M 255.0 201.3 2.5 CKZ-63A030 ACA030M 285.0 231.3 2.7 Model NAAMS code A Weight [kg] CKZ-63A037 ACA037M 135.0 2.1 CKZ-63A038 ACA038M 165.0 2.3 CKZ-63A039 ACA039M

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

to 1000 150 to 700 150 to 700 21 19.5 19.5 15.5 14 12 10 8 20-0.033 56.2 46.5 37.5 33.5 7 5.5 5.5 5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26.5 22 20 20 51 42.5 34.5 30 181 159 146 146 M26 x 1.5 M26 x 1.5 M20 x 1.5 247 217 204 200 1/8 40 32 25 20 24 22 22 18 26-0.033 0 1/4 1/8 1/8 16 13 13 26-0.033 0 32-0.039 0 8 10 M32 x 2 1011Axial foot (L): RECL G H G F Width across flats B2 A K 2

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA Both Ends Tapped (mm) Bore size (mm) 63 O1 R O1 thread R R M10 x 1.5 18 80 M12 x 1.75 22 100 M12 x 1.75 22 H thread effective depth C 4-N through 8-O counterbore U Q F 2-P (Port size) (Rc, NPT, G) I 22 M E D Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J B + Stroke A + Stroke L Rod end male thread H1 Rod

Vacuum Pad

15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

•

R13g 1 3 15 12 21 29.9 46 5 6 3 1.8 '2.~,1 ''2,H 23 22 ZPR13 -,ZPR16g 1 6 18 12.5 21.5 30.' 46.5' 5 6 3.5 1.2 ZPR10 23 22 23 22 22 Deep type (mm) I Model M ,.8 C D E F M:M5xO~J M:M6X1 y G ! G ZPR16 23 22 ZPR20' !

NCA1

See Pg 22 for auto switch options when using composite or stainless steel tube.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 C J G5-S 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 M14 x 1.5 32 CV (mm) Boss-cut ZZ Bore size (mm) MVGQ 20 25 32 40 103 107 CC 109 138 RB J D-X 20Data 10-4-11 12 Smooth Cylinder Series CG1Y 20, 25, 32, 40, 50,

Compact Cylinder

36 22 4 16 22 6.6 2.8 8 38 55 68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon

HRX-OM-W058

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when it reaches the set time. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

HRX-OM-X027

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when it reaches the set time. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

HRX-OM-M005

The functions also apply to the Status screen 4 . 1 2 3 5 4 Figure 5-22 Status Screen 3 Table 5-12 Status Screen 3 No. Item Descriptions Date and time of operation listed below are recorded and displayed.

Soft Start-up Valve

No indication is necessary for R; however, indicate N for NPT. -22- Optional Parts Nos.

IDU/IDF

C IDU BP 22 C Applicable dryer Applicable dryer Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 IDF FL 22 C IDF BP 22 C Applicable dryer Applicable dryer Dryer IDF1D IDF2D

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23