Table of Contents

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Move Speed Position Accel Decel PushingF TriggerLV PushingSp Moving F Area1 Area2 In posn mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 39 - Details of step data

Smooth Cylinder

32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Step Motor Driver （ Pulse input type ）

2000 2000 2000 2000 Step data default Deceleration 2000 2000 2000 2000 Pushing force 100 100 100 100 Trigger LV 100 100 100 100 Pushing speed 50 50 50 50 Moving force 100 100 100 100 Area1 0.00 0.00 0.00 0.00 Area2 0.00 0.00 0.00 0.00 In position 0.50 0.50 0.50 0.50 100 - LEHS Basic parameter default Model LEHS10 LEHS20 LEHS32 LEHS40 Lead [mm] 255 / 76 235 / 56 235 / 40 235 / 40 Controller

0.4

Station 9 SQ SOL.B SOL.A 23 10 Station 10 SOL.A VFS SOL.B 24 11 Station 11 SOL.B SOL.A 25 12 Station 12 VFR VV5Q21 COM. () Orange Red (+) 13 VQ7 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 419.)

VZ100/300/500

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Cylinder with Lock Series MNB

72 37.5 15 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

After assembly is completed, perform an operation test and check that there is no air leakage. 17 10 14 15 3 5 27 11 12 6 9 14 1 4 11 9 27 2 4 19 15 Cushion seal 8 Body Left cover Rack 18 Direction of the shaft(key) About10 Fig. (17) Direction of assembly of the shaft 42 - . Size 50 to 100 Disassembly procedure 1.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Bore size (mm) Model Bore size (mm) Port size Lubrication Action Standard stroke (mm) Auto switch mounting Cushion Rubber Air Model Relief type Vacuum suction type 10-/21-CJ2W10 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ2W16 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Non-lube Band mounting only Standard M5 x 0.8 acting, 11-/22-CJ2W10 10 15, 30, 45, 60, 75, 100, 125, 150

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 18 22 26 32 3 4 5 6 13 14 17 23 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

LEF-OM007xx

200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Actuator cable type 11-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25

Solid State Auto Switches

Weight (g) Applicable bore size(mm) Weight Applicable bore size(mm) Weight Auto switch model Auto switch model D-A33C-4, A34C-4 D-A33C-5, A34C-5 D-A33C-6, A34C-6 D-A33C-8, A34C-8 D-A33C-10, A34C-10 D-A44C-4 D-A44C-5 D-A44C-6 D-A44C-8 D-A44C-10 162 166 184 210 232 160 164 182 208 230 40 50 63 80 100 40 50 63 80 100 Dimensions (mm) T Applicable bore size (mm) 40 50 63 80 100 C 44 52 64 78 92

CNG

40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) 20 21 Series CNG Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20

ZPT/ZPX

x 1.5 Vacuum entry direction Mounting 100, 125 40 to 80 25 mm, 50 mm, 75 mm, 100 mm Buffer stroke ZR 40, 50 63, 80 100, 125 Thread dia.

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds