2 4(A) (B) (A) (B) (A) 2 4 2 4 B (EB)3 5(EA) 1 (P) VF3000 VF5000 = 2(B) (A)4 5 1 3 1 5 3 (EA) (P) (EB) (P) (EA) (EB) (EA)5 1 3(EB) ; B (P) 2-position double Symbol @ = : 2-position single > > : @; VF1000 4(A) (B)2 (A) (B) (B) (A) 4 2 2 4 5(EA) 1 (EB)3 (P) VF3000 VF5000 2(B) (A)4 5 1 3 3 1 5 = (EA) (P) (EB) (EB) (P) (EA) (EA)5 1 3(EB) ; (P) 3-position closed center/exhaust center/pressure
(Refer to Rod boot/Air cushion on page 11.)
Slotted locking type B (tool required) Note) 2 Note 1) Electrical entry: D or DZ only 15A 1 2 15 14 3 20 16 Note 2) Semi-standard 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Electrical entry/With light/surge voltage suppressor Flange E GS G Symbol Electrical entry Valve size
Characters Number of digits 1 2 3 4 5 6 7 8 9 seg 11 seg 7 seg 7 seg 7 seg 7 seg 11 seg 7 seg 7 seg 7 seg : 1st. and 6th. digits are displayed in 11 seg. Others are displayed in 7 seg. Character for 7 segment display Character changes as below by pressing the or button.
B Body B Needle Seat ring Needle guide Lock nut Lock nut U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer NBR PBT 13 POM, Stainless steel 2 PBT 14 NBR 3 PBT 15 NBR 4 SUS303 16 NBR 5 SUS303 17 NBR 6 SUS303 18 NBR 7 SUS303 19 NBR 8 SUS303 20 NBR, Stainless steel 9 M5 type only SUS303 21 10 POM Note1) SUS303 11 NBR Note 1) 3/16", 3/8" and 1/2" are SUS303. 12 Stainless
Do not let the gasket get caught. 11) Mount the end plate U and D with the appropriate length of tension bolts for the number of stations required. (Tightening torque: 0.75 Nm.) 12) Mount the connector for all stations to the junction box B. (Refer to Fig.3) (Engage the recess of the connector and the protrusion of the junction box B.
Setting Position (mm) D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, A34 D-A44 D-B5 D-B6 D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B59W Bore size (mm) A B A B A B A B A B A B A B 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 25 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5 58.0 35.5 55.0 32.5 57.0 34.0 56.5 33.5 53.0
For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 Paddle Style Flow Switch Series
New valve (Blue) Manual override + B A Interface Pilot valve (V111) Adapter plate Existing valve (Orange) Manual override + B A Interface Pilot valve (SY114) Adapter plate 647
ACA201M ACA202M ACA203M CKZ-50A001 CKZ-50A002 CKZ-50A003 CKZ-50A007 CKZ-50A008 CKZ-50A009 0.6 (1.32) 0.7 (1.54) 0.9 (1.98) 0.7 (1.54) 0.8 (1.76) 1.0 (2.20) Straight-Machined 25 mm Offset-Machined A A B B 8F7+0.013 +0.028 through C C D D E E F G 8F7+0.013 +0.028 through F G 20 0.03 10 3 20 0.03 30 0.025 30 0.025 10 H 11 through 30 0.025 30 0.025 I 11 through M6 x 1.0 M6 x 1.0 H I 15 0.03 15
CKZ-50A007 CKZ-50A008 CKZ-50A009 NAAMS code ACA201M ACA202M ACA203M NAAMS code ACA211M ACA212M ACA213M Straight-Machined 25 mm Offset-Machined A A B B C C 8F7 through +0.028 +0.013 D 8F7 through +0.028 +0.013 D E E F G F 200.03 10 G 200.03 10 300.025 300.025 11 through 11 through H 300.025 300.025 250.05 I M61.0 H M61.0 150.03 150.03 I R45 6.5 500.05 6.5 18 30 3 10 10 3 18 R6 R6 R25 R25 19
A B C D E F Part no. B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 10 20.5 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 16 22.5 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 20 24.5 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 25 33.5 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 30, 40 40.5 22 Applicable bore size (mm) Part no.
11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 A 14 12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.
Combination examples of modular applicable products Arrangement example AMH250C-B 1 pc. AME250C 1 pc. Y300 1 pc. Arrangement example AMH250C-B 1 pc. AME250C 1 pc. AMF250C-B 1 pc. Y300 2 pcs.
Series 10-, 11CQSX Series10-,11CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (built-in magnet) (built-in magnet) Microspeed cylinder Mounting Microspeed cylinder Bore size 32 40 32mm 40mm Number of auto switches
Auto switch a c b d Proper Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV Auto switch model D-M9 D-M9V D-M9W D-M9WV D-A9 D-A9V Proper Mounting Position (mm) A B A 15 19.5 24.5 B A 14 18.5 23.5 B Bore size 63 80 100 a b 14 18 17 c 20 24 23 d Auto switch model 15 18 22.5 19 23.5 28.5 11 14 18.5 10 13 17.5 D-A9 D-M9 D-M9W 2 6 5 8 12 11 Note) Adjust the auto switch after confirming
D-F9W 12 A B W 16, 20, 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W A B 32, 40 D-A9 D-M9 D-F9W Auto switch model D-F9BAL Symbol A B W A B W A B W Standard Stroke 12 16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5
(Same surface) 10.5 16.5 D-A93 50 50 50 D-M9B D-M9BW D-B54 50 50 75 8.5 Auto Switch Mounting Position and Its Height Unit: mm Auto switch set value and its height 50 7.5 30.5 40 11.5 34.5 40 2 25 43.5 Auto switch D-B54 Symbol 63 7.5 30.5 47 11.5 34.5 47 2 25 50.5 40 11 23.5 34.5 15 27.5 34.5 5.5 18 38 32 3 30.5 30 7 34.5 30 0 25 33.5 Hs A B Hs A B Hs A B Hs B A 33 D-A93 D-M9B D-M9BW 24.5
closed center/exhaust center/pressure center: SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 X 0.5 (Pilot port) 1.8 10 4 A B 1.5 8.2 7 19 2-M3 X 0.5 (Pilot port) (Mounting holes) 3.2 222 3 49 2.5 (Mounting holes) 3.2 2A B 1.5 18.5 11 17.5 (Non-locking) Manual override A B 1.5 33 16 18.9 18.5 21 54.5 13.5 15 Manual override (Non-locking) 21.6 54.5 28.5 R2 P P1 21 1(Bleed port) 2P R R 13 11 0.5 10 5
0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !