Clean Room Rodless Cylinder Series CYP ø15, ø32

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

IDX-OM-W020

5 5-1 3 ON OFF 600mm 1 10% () ( ) 60cm 1 10% 3 IDFB Series 5-1 5 1 IDX-OM-W020 5 () 60cm 1 2 INOUT INOUT () IDFB Series 5-1 5 2 IDX-OM-W020 6 6 6-1 IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E 10 SCFM 15 SCFM 25 SCFM 41 SCFM 59 SCFM 71 SCFM (ANR) (1) 37 F (2.8C) (17 m 3/h) (25 m 3/h) (43 m 3/h) (70 m 3/h) (100 m 3/h) (120 m 3/h) 11 SCFM 16 SCFM 26 SCFM 43 SCFM 62 SCFM

RQ

Stroke 25 36.5 5 22.5 10 14 20 10 20 10 (All dimensions but A and CL are identical to those of the basic style.)

IDX-OM-W093

. 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R .11-1

S070

26.5 31.5 3.5 150 (Lead wire AWG#26) VT 33 3.5 2-3.4 Mounting hole VP VG VP P = 7.2 4 7.1 L2 L1 S070 VQ n U side 1 2 3 4 5 D side VKF (11.5) VQZ 9.5 5 VZ VS VFN Dimensions Formulas: L1 = n x 7.2 + 7, L2 = n x 7.2 + 15, n: Stations (maximum 20 stations) n L 12 93.4 101.4 19 143.8 151.8 2 21.4 29.4 3 28.6 36.6 4 35.8 43.8 5 43 51 6 50.2 58.2 7 57.4 65.4 8 64.6 72.6 9 71.8 79.8 10 79 87 11 86.2

VXF

530 10 to 60 VXF2150 VXFA2150 170 0.03 1.0 2.0 20 3 4 VXFA 2150 5 to 40 350 0.7 DC DC VXF 2160 5 to 60 580 VC 1.0 AC AC 10 to 60 VXF2160 VXFA2160 1.0 0.03 330 2.0 1 27 VXFA 2160 5 to 40 400 0.7 DC DC VDW Solenoid type VXF 2280 5 to 60 1.0 1500 AC AC VXF2280 VXFA2280 VQ 10 to 60 1.0 0.03 810 2.0 40 1 2 1 VXFA 2280 5 to 40 0.7 1300 DC DC VX2 Note 1) Dew point shall be 10C or less.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Flow Rate and Effective Area AS22IF-U01 AS23IF-U02 AS42IF-U04 AS43IF-U04 AS22IF-U02 AS23IF-U02 AS32IF AS33IF Model 6, 8 4 3.2 4 10 12 8, 10 Metric size 6 6 8 10 12 4 JIS Symbol Tubing O.D. 1 8" 3 16" 1 4" 1 4" 5 16" 5 16" , 3 8" , 5 32" 3 16" 1 4" 5 16" 3 8" 3 8" " 1 2 Inch size 5 32" Flow rate (/min (ANR)) 260 390 660 790 920 1580 180 230 460 1710 Flow Direction Symbols on Body Controlled

CG1

Note) ( ): Long stroke 1.6-8 Standard: Double Acting Single Rod Series CG1 With Mounting Bracket Axial foot (mm) Z ZZ Bore (mm) LT W X B LC LD LH LS LZ M LX Y Without rod boot With rod boot Without rod boot With rod boot 67+l 74+l 75+l 83.5+l 95.5+l 95.5+l 104+l 104+l 20 25 32 40 50 63 80 100 10 10 10 10 15 15 16 4 4 4 4 5 5 6 6 6 6 45 (53) 3 3 3 3 34 20 44 49 58 71 86 3 32 36 44 54 66 82

High Power Cylinder:

Composed effective area So (mm2) 6 2000 h=0.7 10 1/4, 3/8 7.5 2500 REC 0.5 10 10 1/4, 3/8 0.1 0.3 9 3000 RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500

LEKF-OMZ0035

Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for every additional 5 m. (At 15 m: Reduced by up to 20%) 12. When checking the conductivity of the cable, be careful not to deform the connectors mating hole and terminals.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

High Power Cylinder Series RHC

/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4 2000 10 32 2500 3000 12.5 15 1/4 1/4 30 6 10 1/

CEx-OMQ0013

5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC DC LCD 21 7. 7-1 7-1-1 1 ISO VG32 060 1m 7-1-2 M4 DIN [050] [25%85%] [1055Hz 0.75mmXYZ 2 ] 7-2 7-2-1 AC100V15AC85VAC115V 50/60Hz DC24V100.4A 2 0.75mm 2D FG0.75mm 100 FG FG 7-2-2 5m 20m5m20m CE1-H0374 22 CE1-R 20m 200m 5m 20m

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

CC

Model CCVS CCVL Bore size (mm) Intermediate stop accuracy of CCVS: 50 mm/s x 0.015 sec. = 0.75 mm in case of 50 mm/s Graph 5 10-17-4 5 Air-hydro Unit Precautions Be sure to read before handling.

CLS

/F59F D-F5W/J59W D-F5BAL/F5NTL Proper Auto Switch Mounting Position/ Auto Switch Mounting Height 6 6 5.5 5 5 D-G39/K39 D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL 10 10 10 11 11 Common for each auto switch Since this is a guideline including hysteresis, not meant to be guaranteed.

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

FQ1

accuracy (m) 5 10 20 40 74 105 No.

IDX-OM-W035

3 ON OFF 3 2 R T () 5-2 600mm 1 5-2 5-2 10% 5-2 () 60cm 1 10% 3 IDFB Series 5-1 5-1 IDX-OM-W035 5 () 60cm 1 2 INOUT IN OUT IDFB Series 5-1 5-2 IDX-OM-W035 5 5-2 (IDFB55E,75E) (IDFB55E, 75E) 1-2 5-1 OFF OFF () ON OFF () ON IDFB Series 5-2(IDFB55E,75E) 5-3 IDX-OM-W035 6 6 6-1 IDFB22E-11 IDFB22E-23 IDFB37E-23 IDFB55E-46 IDFB75E-46 107SCFM 161SCFM 226SCFM 300SCFM

Digital Gap Checker

Lead wire color Description 1 Brown DC (+) 30.8 2 White N.C. 3 Blue DC () 4 Black OUT1 15 ISA-19-m (Centralized lead wire) 19 6 5 4 30.8 MADE IN JAPAN 3 2 1 15 23.5 33 70 108 43.5 146 5000 55 184 10 222 Unit: mm 260 10 Stations Part no. L L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 M12 connector no. Pin no.