bit input from sequencer (parallel) Note 5) Input method: No-voltage contact or NPN open collector input Minimum pulse width: 50 msecwInput method: 4 point input with keys(Interval time can be set by programming.)12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC Note 2)24 VDC (Max. 300 mA) with accuracy of 22.0 to 26.8 VDCq0 to 10 VDC (Output resistance: 6.5 k or more with accuracy of

S Couplers

0.7 0.8 0.9 1 Charging pressure [MPa] 10 Handling Precautions for screw piping !

Low torque Metal seal type Rotary joint Series MQR

leakage [cm3/min] 5000 4000 MQR8 3000 MQR4 2000 MQR2 MQR1 e.g.: If adjacent ports are connected to positive vacuum pressure of -0.1 MPa and 0.1 MPa in MQR12, then differential pressure is 0.2 MPa, and leakage is 300 (cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20

Series 12-REA Sine rodless cylinder ø25, ø32, ø40, ø50, ø63

Specifications Bore size (mm) 25/32/40/50/63 Item 1.05MPa 0.7MPa 0.18MPa 10 to 60C (With no freezing) 50 to 300 mm/s Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Stroke length tolerance Grease +1.8 0 +1.4 0 +1.0 0 0 to 250 st: , 251 to 1000 st: ,1001 st to Fluorine grease Particle generation grade (Refer to front matter pages 13

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Specifications Bore size (mm) 25/32/40/50/63 Item 1.05 MPa 0.7 MPa 0.18 MPa 10 to 60C (With no freezing) 50 to 300 mm/s Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Stroke length tolerance Grease Cleanliness class (ISO class) +1.8 0 +1.4 0 +1.0 0 0 to 250 st: , 251 to 1000 st: , Over 1001 st: Fluorine grease Class 5 Magnetic

Adsorption Plate SP Series

x 300 mm 0.3 (sphere) mm Adsorption surface 15% or more Stainless steel Wrapping processing Aluminum casted Body Chromated (except for adsorption surface and seating surface) Surface processing Finishing Grinding processing Ambient temperature Suction port Rc 10 to 40 1/8 Sintered metallic element Body Suction port Circuit example Vacuum ejector Switching valve Supply valve Air source Vacuum

Air Cylinder/Standard Type: Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube Type: Air-hydro Type:

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Air-hydro type CS1H125A-PS 125 140 160 CS1H125A-PS CS1H140A-PS CS1H160A-PS Component part numbers: @3, @5, @6, @7, @8, #0. CS1H140A-PS CS1H160A-PS 42

08-cs1-e

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Air-hydro type CS1H125A-PS 125 140 160 CS1H125A-PS CS1H140A-PS CS1H160A-PS Component part numbers: @3, @5, @6, @7, @8, #0. CS1H140A-PS CS1H160A-PS 42

2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or less (without load)IP65Operating: 0 to 50C, Stored: ?

2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or less (without load)IP65Operating: 0 to 50C, Stored: ?

2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or less (without load)IP65Operating: 0 to 50C, Stored: ?

2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or less (without load)IP65Operating: 0 to 50C, Stored: ?

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Hydraulic Cylinder

(However, they are auto switch mounting brackets are shipped with the mounting brackets mounted already). 297 CHN Series Specifications 20 25 32 40 Bore size (mm) Action Fluid Nominal pressure Proof pressure Maximum allowable pressure Minimum operating pressure Double acting/Single rod Hydraulic fluid 7 MPa 10.5 MPa 9 MPa 0.3 MPa Without auto switch: 10 to 80C With auto switch: 10 to 60C

MLU

, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 Max. manufacturable stroke 25, 32, 40, 50 300 Strokes other than the above are produced upon receipt of order.

SFA100/200/300 Series Clean Gas Filter: Cartridge Type/Disc Type

(Refer to page 300.) GD 299

2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or less (without load)IP65Operating: 0 to 50C, Stored: ?

2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)20 mA or less (without load)IP65Operating: 0 to 50C, Stored: ?