0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.
16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0
0 o w !0 o AS-F AS-F w !0 o u r e !3 !1 u u TMH r t r t ASD e !3 e !3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.
1 AS-FP w Meter-out type Meter-in type AS-FM AS-D Universal type AS-T Seal method: Gasket seal For Uni thread ASP !1 !1 r r ASN q q !2 !2 AQ y y ASV !3 w t t AK w i i VCHC o ASR ASQ o !0 e !0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.
L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis
1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !
9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !
Air operated style fluid control valve Vacuum valve Vacuum pad 2(A) 1(P) 2(A) 1(P) 2(A) 1(P) 2(A) 3(P) 3(R) 3(R) 3(R) 1(R) Atmospheric air or micro pressure for vacuum release 22 Multi-purpose Valve Series VCA Direct Operated 2 Port Solenoid Valve for Air Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity
TB N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR TDR MC MC TDR TDR MC PTC MC OLR OLR MC PTC MC CM CM MC TDR MC MC TDR C11 PRS FM1 PRS FM1 P P C12 FM2 FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2
Symbol: A0 Symbol: A1 Symbol: A2 Symbol: A3 DA C0.5 C 30 30 H H W1 T H A H Symbol: A4 Symbol: A5 Symbol: A6 Symbol: A7 RD B RD AL MM AL MM 30 H L 30 30 30 H L W H H Symbol: A8 Symbol: A9 Symbol: A10 Symbol: A11 C0.5 file chamfer AL B MM Made to Order Auto Switch WA C R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C
Outlet air pressure dew point Model Rated inlet condition Air flow capacity (m3/h [ANR]) Port size IDFA100F-38 IDFA125F-38 IDFA150F-38 IDFA100F-40 IDFA125F-40 IDFA150F-40 960 1210 1500 860 1100 1340 R 2 R 2 1/2 DIN flange 80 R 2 R 2 1/2 DIN flange 80 40C 0.7 MPa 10C 35C 0.7 MPa 3C 89 A INDEX 1.
DSM-60S DSM-75S Cast iron DSM-75S(H) Piston r t y u i o !
However, if there is any problem, use a 3 wire DC style. 3.8-11 Series CXT Auto Switch Mounting Position and Mounting Height Reed switch Solid state switch A B W D-F9NW D-F9PW D-F9BW D-A90 D-A93 D-A96 D-F9N D-F9P D-F9B D-F9BAL 12 A B W 16, 20, 25 W A B 32, 40 (mm) D-A90 D-A93 D-A96 D-F9NW D-F9PW D-F9BW D-F9N D-F9P D-F9B Auto switch model D-F9BAL Symbol A B W A B W A B W Standard stroke 12
P port size SlA 04F 06F 08F 10F 12F 4 Knob color 6 VlA Blue Gray A port size 2 port valve 3 port valve (Standard) 8 10 04F 06F 08F 10F 12F 4 2 port valve 3 port valve R (Option) Red 12 6 M5 M5 X 0.8 8 10 VM/VR 01S 02S 03S 04S 1 8 1 4 3 8 1 2 R(PT) R(PT) 12 VH M5 R(PT) M5 X 0.8 01S 02S 03S 04S 1 8 1 4 3 8 1 2 R(PT) R(PT) R(PT) R(PT) R(PT) Standard 1(P): One-touch/2(A): One-touch 1(P): One-touch
r 9 se 9 e e is e wi g w g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
When sum of load rate does not exceed 1, it is possible to use. n=1+2+3 1 < = < = 47 MXS Series Air Slide Table How To Select Allowable load: W(N) Fig.1 Overhung: Ln(mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Kinetic moment L1 A1 L3 A5 L2 A3 W Mp Mr My W W L3 A6 W L1 A2 L2 A4 W Mey Mep L2 A4 A2 L3 Work
x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x
(p.4.6-4 through p.4.6-5) w e Tempered glass Sight glass AM850 is aluminum cast. Replacement Parts AM450 Part No. No. Description Material AM150 AM250 AM350 AM550 AM650 AM850 Glass fiber NBR Element assembly AM-EL150 AM-EL250 AM-EL350 AM-EL550 AM-EL650 AM-EL850 AM-EL450 r With gasket and O ring Max. Flow Max.
Refer to dimensions p.4.6-25 and 4.6-26 for details. w e Sight glass AM850 is aluminum casting. Tempered glass Replacement Parts AME450 Part No. No. Description Material AME150 AME250 AME350 AME550 AME650 AME850 Element assembly Glass fiber NBR AME-EL150 AME-EL250 AME-EL350 AME-EL550 AME-EL650 AME-EL850 AME-EL450 r With gasket and O ring Precautions Be sure to read before handling.