Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 40, Vacuum entry port thread diameter: M6 × 1
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Urethane Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 40, Vacuum entry port thread diameter: M6 × 1
Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Fluororubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Urethane Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Pad Shape: [Other Shape] Flat Type, Pad Type: Ribbed, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Fluororubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Pad Shape: [Other Shape] Flat Type, Pad Type: Ribbed, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Pad Shape: [Other Shape] Flat Type, Pad Type: Ribbed, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Pad Shape: [Other Shape] Flat Type, Pad Type: Ribbed, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Urethane Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1
Adapter Material: Brass, Standard, Vacuum Inlet Direction: Vertical, Pad Diameter: ø13, Pad Styles: Flat Style, Material: Urethane Rubber, Vacuum Entry: Female Thread M6X1
Adapter Material: Brass, Standard, Vacuum Inlet Direction: Vertical, Pad Diameter: ø50, Pad Styles: Flat Style, Material: Fluoro Rubber, Vacuum Entry: Female Thread M6X1
Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø10, Pad Styles: Flat w/Ribs, Material: NBR, Vacuum Entry: Female Thread M6X1
Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø20, Pad Styles: Flat w/Ribs, Material: NBR, Vacuum Entry: Female Thread M6X1
Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø40, Pad Styles: Flat w/Ribs, Material: NBR, Vacuum Entry: Female Thread M6X1
4-channel Flow Monitor ( compatible) Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to
20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T
Example 1) ASCII mode Received function code: 04(0 0100)ASCII code 30h34h Abnormal function code: 84(1000 0100)ASCII code 38h34h Example 2) RTU mode Received function code:04 (0 0100) Abnormal function code:84 (1000 0100) 2) Error Code Assign error code below. 01: Function code of a command is outside the standard. 02: The specified address of register is outside the range. 03: Data field