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3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm 200 200

(Page 11) 7 1000 fR[N] 100 Lateral load applied to rod 100 80 63 10 50 40 1 0 500 1000 1500 Cylinder stroke [mm] Fig 1. Allowable lateral load applied to rod end C a u t i o n Be certain to align the rod axis with the load and direction of movement when connecting.

(Refer to page 11) Please order separately. -22No.PS-OMM0007-I Pressure Setting Measurement mode The measurement mode is the condition where the pressure is detected and displayed, and the switch function is operating. This is the basic mode, and other modes should be selected for setting changes and other function settings.

Installation and Wiring . 11 3-1 Installation . 11 3-1-1. Precautions for Installation . 11 3-1-2. Installation of Ionizer . 12 3-2. Wiring . 13 3-2-1. Connection Circuit . 13 3-2-2. Wiring of the Power Supply Cable . 15 3-2-3. Wiring of the AC Adapter . 15 3-3. Timingchart . 16 4. Function . 17 4-1. Name of Parts. 17 4-2. Adjustment of Offset Voltage . 17 4-3.

Description Qty 1 Rod cover 1 2 Head cover 1 3 Cylinder tube 1 4 Piston rod 1 5 Piston 1 6 Cushion ring 1 7 Cushion ring B 1 8 Bushing 1 9 Cushion valve 2 10 Snap ring 2 11 Tie rod 4 12 Tie rod nut 8 13 Wear ring 1 14 Rod seal 1 15 Piston seal 1 16 Cushion seal 2 17 Cushion valve seal 2 18 Cylinder tube gasket 2 19 Piston gasket 1 20 Rod end nut 1 21 Magnet (1) 33 Revision history A: 125

Also make sure that the rotational torque applied to the cylinder body does not exceed the allowable rotational torque (given on page 11). (Otherwise, the excessive rotational torque will damage the non-rotating mechanism and lead to a malfunction.) 6.

Mechanical Valve Series VM Model VM1000 VM100 VM200 Side piping Bottom piping Side piping Bottom piping Dimensions (mm) 11 X 36 X 16 11 X 28 X 25 17 X 44 X 25 17 X 44 X 30 25 X 40 X 52 Basic Roller Lever One Way Roller Lever Straight Plunger Roller Plunger Cross Roller Plunger Toggle Lever Push Button (Mushroom) Push Button (Extended) Push Button (Flush) Twist Selector (2 position) Key Selector

The units cannot Refer to reference No.12 be changed Refer to The buttons cannot reference No.13 be operated The product Refer to reference No.14 is noisy Refer to reference No.15 45 - NO.

No.12 No.13 No.14 No.15 No.16 No.17 [Er13] No.18 No.19 -68No.PS-OMU0005CN-C No.

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

How to install the EQY Series Work fixed/ Rod end female thread Model Bolt used Max. tightening Max. screw Tip socket torque [Nm] depth [mm] opposite side [mm] EQY25 M81.25 12.5 13 17 EQY32 M81.25 12.5 13 22 Socket Work fixed/ Rod end male thread Rod end nut Model Bolt used Max. tightening Effective screw Tip socket torque [Nm] length [mm] opposite side [mm] EQY25 M141.5 50 20.5 17 EQY32

13 01: R 1/8 T1: NPTF 1/8 Dimensions/Base Mount Type: ZSE2-0R Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2 x M2.5 x 41L Mounting thread 25 25 2 x M2.5 x 41L Mounting thread 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum

10 223 212.5 191.5 16 11 235.5 225 202 17 12 248 237.5 212.5 18 13 248 237.5 223 12.5 14 260.5 250 233.5 13.5 15 273 262.5 244 14.5 16 285.5 275 254.5 15.5 L1 L2 L3 L4 32

IP67 protection class cannot be guaranteed if the screws are not tightened to the specified torque. 13 No.VQC1000V-OMM0002-B VQC1000/2000 series Specific Product Precautions 6 Be sure to read this before handling EX600 Precautions 11. Do not use in direct sunlight. Operating Environment Do not use in direct sunlight. It may cause malfunction or damage. 12.

Then reapply the power supply and push MIDDLE button. 3 positions : See the circuit on page 13. 5 positions : See the circuit on page 25. ( ) Check the voltage and adjust it if necessary and then perform alarm reset. Power supply voltage is excessive or lower than limit for operation.