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PFxx-OMJ0005CN

2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L 2 -68No.PF-OMJ0005CN-I PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Description Model Without With Air cushion Parts name Amount Air cushion 9 CRA130 90Z P694010-20 P694010-22 Slider 2pcs 11 Tube gasket 2pcs CRA130 180Z P694010-21 P694010-23 12 Piston seal 2pcs CRA150 P694020-20 P694020-21 19 Spring pin 4pcs Cushion seal CRA163 P694030-20 P694030-21 27 2pcs CRA180 P694040-20 P694040-21 (Grease pack) (10g) CRA1100 P694050-20 P694050-21 39 - Table (16) Angle

CEx-OMB0060

Counter operation 21 7-3-1. Handling data range 21 7-3-2. Reset and hold input 21 7-3-3. Correspondence of banks and bank terminals at switching 21 7-3-4. Correspondence of preset numbers and output terminals 21 7-3-5. Output 22 7-3-6. Preset output forms list 23 7-3-7. Output timing chart 24 7-4. Memory (E2ROM) 26 Chapter 8: RS-232C Communication Functions 8-1.

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

Digital Gap Checker

-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 Regulator AR20-02-1-B -12No.PS-OMT0002-E 2 About this product 2 port solenoid valve VX210X276 Bracket (when control unit fitted) (Nominal size:3 x 8, 2 screws) ISA-17 Spacer with bracket Y200T-A Modular adapter E210-U01 Spacer ISA-18 With O-ring : When a 2 port solenoid valve is connected to the right. -13No.PS-OMT0002-E 2 About this product

Fieldbus System

L1 = 10.5 x n1 + 135.5 + 47 x n2 L2 = 10.5 x n1 + 42 L4 = L3 10.5 L5 = (L3 L1)/2 L6 = 47 x n2 + 82 L3: DIN Rail Overall Length (mm) Valve stations (n1) I/O Unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 185.5 198 210.5 223 223 235.5 248 260.5 273 285.5 285.5 298 310.5 323 335.5 348 348 360.5 373 385.5 398 410.5 423 235.5 248 248 260.5

Manifold Specifications

Manifold: Common SUP/Individual EXH Type Applicable solenoid valve series VZ3000 VK Common SUP/Individual EXH type VV5Z3-21-3 VZ VF Model no.

Manifold Specifications

A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

CLS

For details, refer to page 9-9-21.

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

EXxx-OMQ0015CN

4095 10.5 5.25 21 3868 5 20 3901 10 5 20 2048 3 12 2048 5.25 2.625 10.5 228 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 3901 -48No.EX-OMQ0015CN (2) & 2 : 010 V,05 V,020 mA : 15 V,420 mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 2047 5.25 21 2047 10.5 5.25 21 1934 5 20 1950 10 5 20 1024 3 12 1024 5.25 2.625 10.5 114 1 4 0 0 0 0 0 0.75 3 : 010 V 10

EXxx-OMY0004

Table 21-2 i-Parameter parameter errors AddValue (hex) Error cause Remedy 03F2 iPar_CRC is incorrect. Check i-Parameters. Repeat calculation. 03FD PST_Device_ID is incorrect. Contact SMC 104 No.EX##-OMY0004 21.

HRX-OM-X037

Panel screw (Recommended tightening torque3.0Nm) Filter tapping screw (Recommended tightening torque2.0Nm) Fig. 3-21 CH2 side Installation of filter bracket. HRL Series 3.3 Installation 3-35 HRX-OM-X037 Chapter 3 Transport and Setting Up In case of HRL300-A-40-T3. 7.

HRX-OM-Z002

5.8.12 Contact type switching of contact input . 5-21 5.8.13 Alarm switching for contact input . 5-21 5.8.14 Delay time setting for contact input . 5-21 5.8.15 OFF detection time setting for contact input . 5-22 5.8.16 Switching the signal type of contact output . 5-22 5.8.17 Contact type switching of contact output . 5-23 5.8.18 Selective alarm setting for contact output . 5-23 5.9 ELECTRIC

Rotary Table

Figure 21 shows the piston position and Figure 22 shows the pinion gear assembly angle. Fig. 20 Fig. 21 Size 10 Size 20305070100200 Fig. 22 Piston assembly Push nut side 40 - (4) Install the bearing, bearing holder and table on the body.

EXxx-OMQ0016

10 V, 0 to 5 V, 0 to 20 mA Range: 1 to 5 V, 4 to 20 mA Settable value Settable value Output signal range Output signal range by PLC by PLC (a to b) (0 to b) (AD value) (AD value) Voltage Current Voltage Current [mA] Decimal [mA] Decimal [V] [V] number number 1 to 5 4 to 20 0 to 10 0 to 5 0 to 20 2047 5.25 21 2047 10.5 5.25 21 1934 5 20 1950 10 5 20 1024 3 12 1024 5.25 2.625 10.5 114 1 4 0