Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump
4 A 2 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, 8 A DC24 V +10/-5%, 4 A 2 A Enclosure IP67 (With manifold assembled) 1 Environment Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.
PA05 10 10 Electronic gear numerator *3. PA06 1 262144 (Position control mode) 5400 Electronic gear denominator *3.
Specification for Option R 10 1 Safety instructions . 10 1 10 2 Specifications of the GFCI . 10 1 10 3 How to connect the power supply . 10 1 10 4 Cautions for handling the GFCI . 10 3 10 5 Electric circuit . 10 3 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 1 11 4 How to connect the power supply and signal cable
Free Free E Free Pitch dimensions (without magnet) (mm) Bore Size E 4 6 8 10 10 13 13 13.5 Free Easy seal replacement With front boss (h9) Seals can be replaced easily by removing rod cover. Centering can be done easily. Rod cover Tolerance h9 Clean room series Series 10-, 11-CUJ Two auto switches can be installed even for 4mm strokes.
20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 Features
For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.
x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30
10 G 1 K 5 Straight 15 15 H 2 M 10 Straight N None J 3 S 3 To use AC adapter, specify "N", and select AC adapter with the option number.
less 31 49 37 5 or less 20 190 35 62 50 10 or less 39 66 33 5 or less 30 190 39 68 43 10 or less 43 72 29 5 or less 50 190 49 83 33 10 or less 53 87 22 5 or less 70 190 54 95 30 10 or less 58 99 21 5 or less 100 190 61 108 27 10 or less 65 112 18 5 or less 200 190 81 139 21 10 or less 85 143 15 5 or less Operating range m: Value of the operating range Lm of a single auto switch converted
Outlines of Product 7 2.1 Features 7 2.2 How to Order 8 2.3 Product configuration 9 2.4 Start up procedure 10 (1) Checking the contents of the package 10 (2) Mounting the controller 10 (3) Wiring and Connection 10 (4) Supply of power 10 (5) Configuration 11 (6) Setup of the operation parameters 11 (7) Test run 11 3.
5 2.86 20 10 5 Parameter *1,*2 Para.
4W IDU Series 9-1 9 1 IDX-OM-W029 9.M Ball valve Heavy duty auto drain (ADH4000-04) (10) Drain tube 9-3 (1 1 )() 9-4 M 6-4 6-3 T 10-6 10-3 IDU Series 9-3 9 2 IDX-OM-W029 10 R 10 R R (GFCI) GFCI 1 GFCI 10-2 10-1 1. 2. 3. 4.
Thrust Setting Value1 0 0 0 2 4 6 8 10 0 2 4 6 8 10 Pushing Position [mm] Pushing Position [mm] LAT3-20 LAT3-20 6 6 Thrust Setting Value4.8 5 5 Pushing thrust [N] Pushing thrust [N] Thrust Setting Value4.8 4 4 Thrust Setting Value2.8 3 3 Thrust Setting Value2.8 2 2 Thrust Setting Value1 1 1 Thrust Setting Value1 0 0 0 5 10 15 20 0 5 10 15 20 Pushing Position [mm] Pushing Position [mm] LAT3
Parts and description Fig. 10-1 Allocation of parts on the EX245-EA2-1 Fig. 10-2 Allocation of parts on the EX245-EA2-2 70 No.EX-OMW0011-B Fig. 10-3 Allocation of parts on the EX245-EA2-3 Fig. 10-4 Allocation of parts on the EX245-EA2-4 71 No.EX-OMW0011-B Fig. 10-5 Allocation of parts on the EX245-EA2-5 72 No.EX-OMW0011-B 10.2.
Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30
Outlines of Product 7 2.1 Features 7 2.2 How to Order 8 2.3 Product configuration 9 2.4 Start up procedure 10 (1) Checking the contents of the package 10 (2) Mounting the controller 10 (3) Controller Setting 10 (4) PLC set up 10 (5) Wiring and Connection 10 (6) Supply of power 11 (7) Configuration 11 (8) Setup of the operation parameters 12 (9) Test run 12 3.
FLT 09 Alarm10 Return High Temp WRN 10 Alarm11 Reservoir High Temp.
) Note 10) Note 10) Note 10) Note 10) Note 10) Note 6) The only difference from the standard specifications is the adjusting spring for the regulator.
ZP C ZCU Dimensions H B AMJ Ball joint type: 10 to 32 Misc.