Rotary Table: High Precision Type

35 How to change the auto switch detecting position 35 Auto switch operating angle and hysteresis angle 36 Operating range and hysteresis auto switch 37 Internal construction and component parts 37 Internal construction of rotary table with auto switch 39 MDSUA1/3 auto switch mounting 40 Maintenance and Inspection 40 Maintenance unit How to replace table unit / How to replace rotary unit 41

Rotary Table

Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.

DOC1023125

Refer to the operation manual of the setting software for how to perform a trial run. 41 - Operation . Operation flow The startup procedure varies depending on the power-on situation.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Crack on the back of the belt 41 - 7.6 How to detach and attach the dust seal band For the internal-check as the maintenance, the method of detaching and attaching the dust seal band is shown as the following. 1. Loosen the fixing bolts of end side of the Band holder. (The picture shows LEFB, but LEFS is same instruction as LEFB.)

DOC1023126

Refer to the operation manual of the setting software for how to perform a trial run. 41 - Operation . Operation flow The startup procedure varies depending on the power-on situation.

LEH_C

/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General

LEC-T1_C

DRV mon 1 Posn 123.45mm Speed MENUESC 41 - 6. 6.1 (1) LECP LECA No. TB Ver1.** TB Ver2.**2 TB Ver.5.11 LECPA PLC LECPLECA , , 1 1 LECPA aLECPLECA 100mm 42 - bLECPLECA 43 - (2) (2-1) LECPLECA INP ON ON INP OFF No.Step No.

SFOD-OMT0009CN

() Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 1 INC 500 800.00 1000 1000 1 0 0 10 2 INC 500 900.00 1000 1000 1 0 0 10 1 3 INC 500 900.00 1000 1000 1 0 0 10 4 INC 500 900.00 1000 1000 1 0 0 10 Step No. 02047 No.41

LECA6_C

CN5I/O . 23 6.1 . 23 6.2 (NPNPNP ) . 23 (1) I/O (NPNPNP ) . 23 (2) I/O . 23 6.3 . 24 6.4 I/O . 27 7. . 28 7.1 . 28 7.2 . 31 7.3 . 33 8. . 34 8.1 . 34 8.2 . 34 8.3 . 35 (1) . 35 (2) (). 35 (3) . 35 8.4 . 36 8.5 . 36 9. (). 37 9.1 . 37 9.2 . 38 10. . 39 10.1 . 39 10.2 I/O . 39 (1) . 39 (2) . 40 (3) . 41 (4) HOLD. 42 (5) . 42 2 - 6 . 42 (7) . 43 11. . 44 11.1 . 44 11.2 (). 45 11.3 I/O . 46 11.4

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

JXCx-OMT0062

Refer to the electric actuators instruction manual for details. 41 - 10.

JXCx-OMT0034CN

(CN2SW) . 16 4.3 (LEC) . 17 5. . 19 5.1 CN4 . 19 5.2 CN3 . 19 5.3 CN1CONT . 19 5.4 CN2PC/TB . 20 .CN4 . 21 6.1 . 21 1 - 6.2 . 21 6.3 . 22 . 23 7.CN3 . 24 8.CN1IF (CONT) . 25 8.1 . 25 8.2 . 27 9.CN2TB/PC . 28 9.1 . 28 10.LED . 29 10.1 LED . 29 10.2 IF LED . 29 11. . 30 11.1 . 30 11.2 . 30 11.3 . 30 11.4 . 32 12. . 33 12.1 . 33 12.1.1 . 39 12.2 IF ( ) . 40 12.3 (IO ) . 41

SI unit for DeviceNet TM

Specifications 41 Dimensions 43 Accessories 46 -1No.EX-OME0015-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

HRX-OM-M005

Figure 5-41 Serial Communication Setting Screen 2 [Tips] The setting has not taken effect while the box is flashing. 2. Touch the [Enter] key. The MESSAGE screen is displayed. Figure 5-42 Serial Communication Setting Screen 2 3. Touch the [YES] key. The setting takes effect.

EtherNet/IP TM Compatible Fieldbus System

GEN2 EX500-S103 EX500-DXP# Table of Contents Safety Instructions 3 Product Overview 9 System construction 9 EX500 GW unit Model Indication and How to Order 10 Summary of Product parts 10 Mounting and Installation 11 Installation 11 Wiring 12 LED Display 17 Setting of EtherNet/IPTM using RSLogix5000TM 20 I/O memory map 22 Web server function 30 Specification 39 Specifications 39 Dimensions 41

LV50-OMQ0004

Width across flats of attachment 3/8 24 mm 1/2 28 mm 3/4 35 mm 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Operations . 39 8.1 Return to origin . 39 (1) Return to origin operation . 39 (2) How to command the return to origin . 40 8.2 Positioning operation . 41 8.3 Jog operation / inching operation . 42 (1) Jog operation . 42 (2) Inching operation . 42 8.4 Servo ON . 43 8.5 Response time for the controller input signal . 43 9.

High Vacuum L Type Valve

XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016

EXxx-OMU0020EN

Wiring 41 7.4. Process data 41 7.5. LED indicators 42 7.6. Block diagram 43 8. Digital Output Module EX245-DY1 44 8.1. Parts and description 44 8.2. Specifications 45 8.3. Wiring 46 8.4. Process data 46 8.5. LED indicators 47 8.6. Block diagram 48 -2No.EX##-OMU0020-A 9. End Plate EX245-EA2-1/2 49 9.1. Parts and description 49 9.2. Specifications 50 10. Accessories 51 10.1.

Digital Pressure Switch

Measurement mode 20 Function Setting 22 Function selection mode 22 Default setting 22 F0 Units selection function 24 F1 Setting of OUT1 25 F2 Setting of OUT2 28 F3 Response time 30 F4 Auto-preset function 31 F6 Fine adjustment of display value 33 F11 Display resolution 34 F80 Power saving mode 35 F81 Security code 36 F90 Setting of all functions 37 F97 Copy function 39 F98 Check of output 41