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101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

Motor (24 VDC) Guide Rod Slider Step Motor (Servo/24 VDC) Belt drive Basic type (R type) Series LESHmR Symmetrical type (L type) Series LESHmL In-line motor type (D type) Series LEL Series LESHmD Size 25 Stroke 100 to 1000 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 CAT.NAS100-78 CAT.NAS100-101

work load lb (kg) Size Stroke Max. work load (mm) (kg) (mm) 40 63 40 63 121 (55) 187 (85) 200 to 1200 300 to 1500 44 (20) 66 (30) 200 to 2000 300 to 3000 Features 7 SMC Electric Actuators Slide Table Guide Rod Slider Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Step Motor (Servo/24 VDC) Basic type Symmetrical type Belt drive Series LESH;R Series LESH;L Series LEL CAT.NAS100-78 CAT.NAS100-101

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MX printing OZ 12450SZ Printed in Japan. D-DN

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved 1st printing QT printing QT 8100SZ Printed in Japan. D-DN Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing RU printing RU 8600SZ Printed in Japan. D-G

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LY printing NZ 6000SZ Printed in Japan.

Single unit Note 1) Port exhaust B Ejector system t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications Common Silencer exhaust Pressure sensor C Type Pressure range [kPa] Specifications Symbol P 0 to 101 Analog output 1 to 5 V Pressure sensor For manifold T Analog output 1 to 5 V 100 to 100 Individual port exhaust A B C D E F H J K Q R S Unit selection function Note 9) NPN

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow