VQ5000

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 7 Base Mounted Series VQ5000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 2 position single: VQ5150 1-G H 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

Vacuum Module Series ZX

(VJ324M) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] Solenoid valve N.C. (VJ114) K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Solenoid valve Release valve N.C. (VJ314) External release (ZX1A) Air operated N.C. (VJA314) None [ ]: Mass (g) How to Order /Refer to page 866 for details.

Plug-in/Plug Lead: Single Unit

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc

Thermo-chiller

type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller

ZP

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

KQ2

19 41 41 19 20 42 69 30 47 74 69 76 147 72 78 149 Applicable tubing 9.6 10 17.5 1 8 42.5 36.6 43 37.1 43.5 39.6 46 47.4 42.6 49 50.4 55.5 56.9 63.6 57.5 58.9 65.6 16 3 10.4 10 18 5 32 16.5 3.5 11.4 10 19.5 3 16 1 4 17 4.6 13.2 10 20.5 5 16 18.5 6 15.2 12 23.5 17.46 3 8 21 7 17.9 17 25.5 Connection thread (with sealant) 22.23 9 17.46 1 2 9.6 22 21.7 17 28 22.23 Reference dimensions after

Manifold Type: 42 (Base Mounted), Valve Stations: 15 Stations, A, B Port: 02T (NPTF1/4), CE Marked: Q (CE Marked)

This is a legacy product, and replaced byVQZ2151-5YZ1-02T

This is a legacy product, and replaced byVFR2100-3FZ-02T, VALVE SOL/PILOT 110VAC *LQA, VALVE, VFR2000 SOL VALVE 4/5 PORT, PD, VFR2000 BASE MT 1/4, .74800 lb

This is a legacy product, and replaced byVFR2100-5FZ-02T, VALVE, SOL/PILOT 24VDC *LQA, VALVE, VFR2000 SOL VALVE 4/5 PORT, PD, VFR2000 BASE MT 1/4, .88000 lb

This is a legacy product, and replaced byVFR2200-5FZ-02T, VALVE SOL 24VDC *LQA, VALVE, VFR2000 SOL VALVE 4/5 PORT, PE, VFR2000 BASE MT 1/4, .92400 lb

This is a legacy product, and replaced byVFR3310-3D-02T

This is a legacy product, and replaced byVF3130-3D1-02T, VALVE, PILOT *LQA, VALVE, VF3000 SOL VALVE 4/5 PORT, ED, VF3000 BODY PT 1/4NPT (F), .46200 lb

This is a legacy product, and replaced byVF3130-3T1-02T, VALVE, PILOT *LQA, VALVE, VF3000 SOL VALVE 4/5 PORT, ED, VF3000 BODY PT 1/4NPT (F), .46200 lb

This is a legacy product, and replaced byVF3130-5D1-02T

This is a legacy product, and replaced byVF3130-5DZ1-02T

This is a legacy product, and replaced byVF3130-5MZ1-02T

This is a legacy product, and replaced byVF5120-3DD1-02T