Table of Contents

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

ITV

ITVX 20 Output pressure (kPa) 0.5 0.5 Return PVQ 40 0 0 Out VEF VEP 60 0.5 0.5 VER VEA 80 1 0 25 50 75 100 1.0 0 25 50 75 100 0 2 4 6 8 10 VY1 Input signal (% F.S.) Count Input signal (% F.S.)

CRB2/CRBU2/CRB1

Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.

Electric Slide Tables

300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500

Table of Contents

0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

5

0 4 2 6.5 4.5 11.5 9.5 0 0 3.5 1.5 5.5 3.5 3 1 Smooth Smooth 40 9 9 5 5 0 0 3 3 5.5 5.5 10.5 10.5 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 0 0 4 3 6.5 5.5 11.5 10.5 0 0 3.5 2.5 5.5 4.5 3 2 Low Speed 63 10 9 6 5 0 0 4 3 6.5 5.5 11.5 10.5 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 4.5 1.5 8.5 5.5 11 8 16 13 4.5 1.5 8 5 10 7 7.5 4.5 MQ 100 14 12 10 8 4 2 8 6 10.5 8.5 15.5 13.5 4 2 7.5 5.5 9.5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(Refer to section 7.6.) 0h Refer to Name and 0 0 function column.

Smooth Cylinder/Low Speed Cylinder

0.033 0 0.033 0 0.033 0 0.039 (mm) Mounting bracket is supplied with the product.

Step Motor Driver （ Pulse input type ）

0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 101 - Appendix 1.5 LER series setting value LER Step data default Model LER10K LER10J LER30K LER30J LER50K LER50J Gear Ratio [] 8 12 8 12 7.5 12 No. 0 0 0 0 0 0 Movement MOD ABS ABS ABS ABS ABS ABS Speed 280 420 280 420 280 420 Position 0.00 0.00 0.00 0.00 0.00 0.00 Acceleration 3000 3000 3000 3000 3000 3000 Step data default Deceleration

CV/MVGQ

(0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7) 7.5 (4.5) 7.5 (4.5) 12

CV/MVGQ

(0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7) 7.5 (4.5) 7.5 (4.5) 12

Parallel Style Air Gripper Series MHZ

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

Vacuum

(mm) 0 2 o 2 0 4 a 4 0 6 0 6 0 8 0 8 1 0 0 1 0 13 s13 1 6 s 1 6 20 s2O 25 o25 92 o32 40 s4O 50 o50 S Silicone rubber U Urethane rubber F Fluorine rubber GN Conductive NBF (o2-o16) GS Qonductive Silicone (o2-o 16) Vacuum thread dia.)

Vacuum

See example on page 14. 0 1 ^ oo7 J 005 fl o.oe E ,* c', 001 .F o.ooz d0.005 _a z I z 0.003 0.002 I it E 0 001 0.0007 0.0005 0 . 2 0 . 3 0 5 0 . 7 I 2 3 5 7 1 0 Length of Tube L (m) 0 5 1 0 1 5 m 0 1 2 3 4 5 6 Suclion Flow Rals \ !

Digital Flow Switch (Integrated display type) ( compatible)

(Page 87) Lower level screen 1822 0x071E 0 R/W Line name 3rd letter U8 0 Y 1823 0x071F 0 R/W Line name 4th letter U8 0 Y 1824 0x0720 0 R/W Line name Left side bot U8 0 Y 1825 0x0721 0 R/W Line name Centre bot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 1826 0x0722 0 R/W Line name Right side bot U8 0 Y Refer to "Inclination and intercept".

Fieldbus system EtherNet/IP TM compatible SI Unit

to +21.00 mA -0.00 to -21.00 mA 0..10 V 0 to 1050 0 to 1050 +0.00 to +10.50 V 0..5 V 0 to 525 0 to 525 +0.00 to +5.25 V 1..5 V 75 to 525 75 to 525 +0.75 to +5.25 V 0..20 mA 0 to 2100 0 to 2100 +0.00 to +21.00 mA 4..20 mA 300 to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

Fieldbus system Ethernet POWERLINK compatible SI unit

, 3: 0..10V (default) , 4: 0..5V, 5: 1..5V, 6: 0..20mA, 7: 4..20mA 01h Channel 0 .. .. .. 300Bh Slot0_AnalogRange 0: -10..+10V, 1: -5..+5V, 2: -20..+20mA, 3: 0..10V (default) , 4: 0..5V, 5: 1..5V, 6: 0..20mA, 7: 4..20mA 04h Channel 3 00h NumberOfEntries 4 01h Channel 0 0: None, 1: 2 value (default) , 2: 4 value, 3: 8 value .. .. .. 300Ch Slot0_AnalogFilter 04h Channel 3 0: None, 1: 2 value

Digital Flow Switch (Integrated display type) ( compatible)

(Page 85) Lower level screen 1822 0x071E 0 R/W Line name 3rd letter U8 0 Y 1823 0x071F 0 R/W Line name 4th letter U8 0 Y 1824 0x0720 0 R/W Line name Left side bot U8 0 Y 1825 0x0721 0 R/W Line name Centre bot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 1826 0x0722 0 R/W Line name Right side bot U8 0 Y Refer to "Inclination and intercept".