CE

Steel wire Stainless steel 9 20 to 63 27 Sensor setting piece assembly Case gasket NBR 10 12 to 32 28 Case screw gasket Stainless steel Pin NBR 11 32 to 63 29 Piston seal Lead-bronze casting NBR Sensor guide 12 32 to 63 30 Rod seal Carbon steel NBR Case setting nut 40 to 63 31 Gasket 13 Rolled steel NBR Cushion ring A 40 to 63 32 Cushion seal Rolled steel 14 NBR Cushion ring B 40 to 63 33

2–4

7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA

CXT

Bore (mm) QW RW S T W X Y Z CY1 32 60 33 140 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 MY1 Long stroke Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) X Y Z Bore (mm) Stroke range (mm) 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 SCXT Tube bore size A, #2(#2+#3) SCXT

Dedicated Controller

Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command.

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

3 Port Solenoid Valve Series VQ100 1

Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

Mechanically Jointed Rodless Cylinder Series MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2C 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Cylinder with Lock Series CNS

E1 NX CLS 25 +0.084 0 28 +0.084 0 32 +0.1 0 I-12 I-14 I-16 125 140 160 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 54 46 100 M30 x 1.5 27 33 L1 U1 54 48 105 M30 x 1.5 30 39 CLQ 60 55 110 M36 x 1.5 34 39 RR1 RLQ MLU MLGP ML1C Clevis Pin/Knuckle Pin l L 5 5 Material: Carbon steel (mm) Applicable bore size (mm) Applicable cotter pin Dd9 Dd9 L l Part no.

Compact Cylinder/Guide Rod Type Series CQM

0 38 10 5 60 58.5 4.5 28 0.2 19.8 7 34 5.5 9 10 7 M5 x 0.8 M6 x 1.0 14 +0.2 0 46 10 10 5 69 67.5 5 33 0.2 23.3 7 40 5.5 9 7 M5 x 0.8 M6 x 1.0 14 +0.2 0 58 12 6 86 84.5 7 42 0.2 29.7 8 50 6.6 11 14 8 M6 x 1.0 M8 x 1.25 19 D-X Individual -X Technical data 799 Series CQM Dimensions 63 to 100 2 x HB through 2 x HA through Auto switch V 2 x P 2 x N through 2 x 2 x OB counterbore with depth

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L1 L2 H M E A 11.5 LQ1L1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 18 15 1/8" 10 11.5 LQ1L4C-M LQ1L4B-M LQ1L4A-M LQ1L3D-M LQ1L3C-M LQ1L3B-M LQ1L3A-M LQ1L2F-M LQ1L2E-M LQ1L2D-M LQ1L2C-M LQ1L2B-M LQ1L2A-M 1/8" 16.5 27 20.5 14 15 14.5 1/4" 1/4" 23 20 35 17 26.5 20 3/8" 3/8" 28 21 24 45 33 25 1/2" LQ1L4D-M LQ1L5D-M LQ1L5C-M

TL/TIL

Type Length Type Fluorine ion Type Al Fe Ni Na Ca 50 Ft. (16 m) Roll 100 Ft. (33 m) Eluting amount 0.1 or less Eluting amount 4.5 0.3 0.2 7.1 1.3 Please refer to the Series and Specifications above, as the tubing length differs dependant on each size.

VCA

Area: (800) 258-9200-www.stevenengineering.com VX3 = 280 25 VXA U side D side Stations 1 2 3 4 5 n VN LVC LVA For manual override J2 LVH W T R N Z M LVD Manual override 16 LVQ 1 1 LQ L 2 2 2 2 LVN n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J3 P = K (Pitch) J1 TI/ TIL 2-1/2 (VCA30), 3/4 (VCA40) IN port (Front ported) PA PAX L Dimension (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33

VNC

50 33 50 0.7 0.5 1 2 VC 3 4 1.0 0.8 VDW 1.4 1.2 1 VQ 1 4 1 2.4 2.2 VX2 5.2 5.0 32 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 1 3.8 3.6 VX3 7.0 6.8 40 JIS Symbol Valve type Operation N.C.

Series SY100 3 Port Solenoid Valve Rubber Seal

Blank Plate Assembly Combination with Solenoid Valve and Gasket Manifold Base Parts No.: SY100-77-1A Body ported Base mounted Cross round head screw SY100-33-1 (M1.7 X 13, Matt nickel plated) Cross round head screw SY100-33-2 (M1.7 X 7, Mat nickel plated) Blank plate A SY100-77-1 Gasket VJ100-20-1 VJ100-6-2 Gasket VJ100-6-1 Gasket Applicable base Sub-plate SS3Y130 type SS3Y131 type SS3Y1S41

VCA

219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry Grommet: G Conduit: C DIN connector: D Conduit terminal: T A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

Thermo-chiller

35C) Automatic uid ll port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, PTFE, PU, EPDM, PVC, NBR, PE, NR, PBT, PP , POM, Carbon, Ceramic Temperature range 41 to 104F (5 to 40C) Pressure range 44 to 73 psi (0.3 to 0.5 MPa) Required ow 50/60 Hz 8.7/9.0 gal/min (33