Series: SY9000, Port Size: Standard, Thread Type: G
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: Base Mounted w/Sub-plate 1/4 Side Piping, Thread: -
Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: Base Mounted w/Sub-plate 1/4 Side Piping, Thread: -
Function: 2 Position Double, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: Base Mounted w/Sub-plate 1/8 Side Piping, Thread: NPTF
Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Pilot: External Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: Base Mounted w/Sub-plate 1/8 Side Piping, Thread: NPT
Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Pilot: External Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: Base Mounted w/Sub-plate 1/8 Side Piping, Thread: NPTF
Function: 2 Position Double, Body Option: Plug-in, Option: Standard, Pilot: Internal Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Sub-plate 1/2, Thread: -
Function: 2 Position Single, Body Option: Plug-in, Option: Standard, Pilot: Internal Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Sub-plate 1/2, Thread: -