MU

20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Vacuum System Peripherals:

Series ZM 13-14-20 4.

MU

These are installed with double clevis style and double knuckle joint style as standard. 2.4-17 Plate Cylinder Series MU Accessory Dimensions Single Knuckle Joint Double Knuckle Joint (mm) (mm) Applicable pin Model MUl25 MUl32 MUl40 MUl50 MUl63 Z LX RR 8.5 10 11 16 16 LD LU 11 14 15 20 20 LC 16 18 20 28 28 LB 27 31 36 46 46 Z LA 35.5 41 47 62 62 LX RR 8 10 10 16 16 LB 27 31 36 46 46 L 52.5

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH L-PIPING ADAPTERIS10L-20-D to IS10L-60-D Model IS10L-20-D Port size A B C D 1/81/4 28 77.6 60.1 42 1/81/43/8 31 85.6 64.1 53 1/43/81/2 39 93.6 68.1 71 1/23/4 47 96.6 69.6 71 1/23/41 62 106.6 74.6 90 IS10L-30-D IS10L-40-D IS10L-50-D IS10L-60-D -20- 11-5.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-20 20 Rotary Table: Basic Type Vane Style Series MSUB These drawings indicate the condition when the B port is pressurized.

Rotary Table/Vane Style Series MSU

Connection port location B Basic type Nil E Side ported Axial ported Free mount type Available with side ported only, when equipped with auto switch unit. 20 90 S M SUB Without auto switch 20 90 S D SUB L T79 M With auto switch Number of auto switches S Nil 1 pc.

Free-Mounting Cylinder with Air Cushion Series CU

6.6 25 6.7 32 7.7 Standard Strokes Standard strokes (mm) 20, 30, 40, 50, 60, 70, 80, 90, 100 Bore sizes (mm) 20, 25, 32 Intermediate strokes are also available upon receipt of order.

Rotary Table: High Precision Type

Fig.12 Component parts of MSUA7/20 switch unit No.

HRX-OM-M005

Use assistance to carry object over 20 kg.

70pvpump

SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example: Find

EXxx-OMN0029CN

TM(DeviceNet TM2) -48No.EX-OMN0029CN-D (Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50+10.45 V -10.45+10.50 V -5..5 V -5.25+5.22 V -5.22+5.25 V -20..20 mA -21.00+20.90 mA -20.90+21.00 mA 0..10 V 0.00+10.45 V +0.05+10.50 V 0..5 V 0.00+5.22 V +0.03+5.25 V 1..5 V +0.75+5.22 V +0.78+5.25 V 0..20 mA 0.00+20.90 mA +0.10+21.00 mA 4..20 mA +3.00+20.90 mA +3.10+21.00 mA -49No.EX-OMN0029CN-D (1) No.

VZA2000

VV5ZA2-20-051 1 pc. VV5ZA2-50-051-01 1 pc. VZA2121-M51 pc. VZA2141-21 pc. VZA2221-M53 pcs. VZA2241-23 pcs. VVZ2000-31A-2 1 pc. VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Thread type Mounting bolt and gasket are not included.

F

37 41 21 3/8 (N)ASN2-03 25 49 55 24 1/2 (N)ASN2-04 30 y, South San Francisco, CA 94080-6370 !

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

VZA2000

VV5ZA2-20-051 1 pc. VV5ZA2-50-051-01 1 pc. VZA2121-M51 pc. VZA2141-21 pc. VZA2221-M53 pcs. VZA2241-23 pcs. VVZ2000-31A-2 1 pc. VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Mounting bolt and gasket are not included.

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 10 L/min) below 20 L/min) 20 to 1050 L/min 40 to 2100 L/min 2.0 0 to 2%F.S. (Displays 0 when the value is (Displays 0 when the value is below 20 L/min) below 40 L/min) 30 to 1050 L/min 60 to 2100 L/min 3.0 0 to 3%F.S.

2/3 Port Valve

flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 VND50D-32F VND60D-40F VND70D-50F 4.2-41 VND Precautions Be sure to read before handling.

AHC System Series MA

M4 x 14 (4 pcs.) 15 20 24 25 Additional Installation Unit of Electrical Contact Point Part no.

VQ7-6/7-8

(20) (port B) 16 (20) (port A) 16 (20) (port B) Manual override A B A B B PB B PB 75 (86) 62 (72) 108.5 (121.5) 141 (154) 153 (166) 75 (86) 62 (72) 50 38 50 38 Indicator light PA PA R2 R1 P R2 R1 P Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole 2-7.5 Mounting hole 49 (64) 49 (64) G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 153 (166) 141 (154) 108.5 (121.5) 50 (63) 5 3 38 (53) 32 (42