Modular F.R.L. Unit

27 25 28 0 26 13.5 4.5 2.8 40 89 114 26.5 40 83 5.5 12 33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 75 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 20 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43

MU

style D-A73C, D-A80C, D-J79C 25, 32 40, 50, 63 22.6 30.5 HS HS HS Auto switch D-A79W, D-F7WV, D-F7V D-F7BAVL 25, 32 40, 50, 63 22 30.5 HS Auto switch D-P5DWL 40, 50, 63 20 HS Auto switch 7-8-20 21 Series MDU With Auto Switch Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

A

-06 S E R I E S Y50T .B510T 5/6000 S E R I E S Y60T .B610T D I M E N S I O N S T T Y P E B R A C K E T Spacer with T-type bracket A B C D E F G R L H Y10T 20 12 4.5 3 25 5 8 2.25 27 40 Y20T 24 15 5.5 3 30 5 10 2.75 33 40 Y30T 35 16 7 4 41 7 11 3.5 45 70 Y40T 40 22 9 4 50 7 14 4.5 50 80 Y50T 40 22 9 4 50 7 14 4.5 50 80 Y60T 50 24 12 4 70 10 15 6 62.5 100 Courtesy of Steven Engineering, Inc

MRQ

20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Intrinsically Safe Valve

foot bracket 53-SY7120-L-02-F1 57 29.4 20 2 x M4 x 0.7 thread depth 6.5 (For mounting bracket) 46 5.5 24.5 7 19.8 28 38 14.7 79.2 40 Manual override Insulator: Black () 13.6 B A Insulator: Red (+) 2 x 4.2 (Manifold mounting hole) 20 42 2 x 1/4" {A(4), B(2) port} 44 (E-type) (14) (52) 1.2 (2 x 4.2 mounting hole) 1.2 125 (49.5) 0.3 mm2 (42.5) 40 40 14.7 (39.4) 123.3 L (Lead wire length) 1/

High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

CJ2

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions.

Free Mount Cylinder for Vacuum Series ZCUK

Symbol 2 to 8 10 to 16 20 to 32 40, 50 02 04 06 08 10 13 16 20 25 32 40 50 Suffix 2 4 6 8 10 13 16 20 25 32 40 50 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 B4 M4 x 0.7 Female thread Applicable cylinder model Symbol M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Nil ZC(D)UK 16 to 32 M10 x 1.25 B10 Material Note) -X11 pad: 2 to 8 diameter and flat style

Hydraulic Cylinders

Standard Strokes Bore sizes (mm) Standard strokes (mm) 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Made to Order Hydraulic Fluid Compatibility Manufacture of Intermediate Stroke Cylinders Pages 10 to 12 Intermediate strokes in 5mm increments can be manufactured by installing spacers

LEH_C

0 2 0 D D 32 32 1DIN I/O (m) 40 40 1.5 1 1.5 1 K K 3 3 3 3 5 5 5 5 (mm) LECP6 LECP6 ( NPN NPN 32 16 16 32 10 10 PNP PNP 48 20 24 20 24 48 LECP1 1 LECP1 ( 1 NPN NPN 64 32 32 32 32 64 PNP PNP 1P 1P 80 40 40 40 40 80 AN LECPA ( AN LECPA NPN NPN AP AP PNP PNP (m) () 8 8 8 8 L L 1.5 1 1.5 1 A A 10 10 3 3 3 3 B B 15 15 5 5 5 C C 20 20 5 () () R R S S / P.42 7.3 <> (NPNPNP)

V

(i) Side Entry Single Sub-base for use with the Base Mounted Valve (Type 40). (ii) 2-10 Station Type 20 Mmanifold for use with the Body Ported Valve (Type 20). (iii) 2-10 Station Type 40 Side Entry Manifold for use with the Base Mounted Valve (Type 40). (iv) 2 10 Station Type 40 Bottom Entry Manifold for use with the Base Mounted Valve (Type 40).

Clamp Cylinder with Lock Series CLK1

3 x 38l 17 30 30 17 20 20 2-M6 thread depth 11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Digital Flow Switch (Manifold type)

14 40 2 to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -62No.PF-OMW0004-B Integrated display type (straight type): PF3WC (mm) Flow range (L/min) a 0.5 to 4 (symbol 04) 40 2 to 16 (symbol 20) 40 5 to 40 (symbol 40) 45 -63No.PF-OMW0004-B Remote sensor type (supply type): PF3WS (mm) A B Flow range a (L/min) Open Close Open Close 0.5 to 4 (symbol 04) 33 14 33 14 40 2 to

Hydraulic Filters

56 65 73 12 17 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 20 25 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 3.5 63 199.5 0 25 (1B) 0 1 0 1 32 (1 1/4B) 106 120 80 56 100 120 60 435 545 285 87 4 x M10 x 1.5 150 260 347 455 214 50 0 23 4.6 40 (1 1/2B) 50 (2B) 155 100 70 45 361 152 94 62 60 0 0 4 x M12 x 1.75 2 x M8 x 1.25 28 14 6.4 4.5

0.55

How to Order Manifold VV5F 3 40 02 2 05 Common exhaust F Series Stations Thread type 02 Nil Series P, R port size A, B port size 2 stations Rc Symbol F N T 3 5 1/4 3/8 1/4 1/4 G VF3000 VF5000 xx 20 20 stations NPT NPTF Up to 10 stations for VV5F5. The A and B ports are made on the bottom.

Bag Filter

FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

Electric Actuators

(80) stroke 4 6 8 12 10 16 20 25 32 40 10 20 32 40 10 20 32 40 10 16 20 25 CAT.NAS100-77 Controller Step data input type for step motor Step data input type for servo motor Programless type Series LECP1 Series LECP6 Series LECA6 Control motor Control motor Control motor Step motor (Servo/24 VDC) Servo motor (24 VDC) Step motor (Servo/24 VDC) Driver AC Servo Motor Driver Incremental type