Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing spacers in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF Series MQQ is not auto switch capable.

Refrigerated Thermo-chiller

Note 11) Mass in the dry state without circulating fluids. 88 Thermo-chiller Series HRZ Cooling Capacity HRZ010-WS/010-W1S HRZ010-W2S 12 12 HRZ010-WS/010-W1S HRZ010-W2S 10 10 Cooling capacity (kW) Cooling capacity (kW) 8 8 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 6 6 4 4 2 2 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) 0 10 20 30 40 50 60 Circulating

Standard Combinations

Threads for IN and OUT ports are not machined. 1/8, 1/4 40 40 28 11 11 1/8, 1/4 53 48 34 14 13 1/4, 3/8 70 54 42 18 15 How to Order Refer to the attachment table on page 4 or 7 for standard bypass port sizes applicable to ACG. 30 01 00 AKM Check valve Bypass port size for redirecting air flow Body size Body size 20 30 40 Port size Symbol 30 40 20 01 02 03 1/8 1/4 3/8 Thread type Nil N F Rc

VXA21/22

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

Vacuum Regulator

plate thickness: Max. 4 R R 50 46 40 8 x 6.5 Rc 1/8 Pressure gauge port Pressure switch 103 5.2 (mm) Fitting Part Dimensions 66.4 Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 22 20 6 1/4" 8, 5/16" 10, 3/8" 10.5 10.5 10.5 11 21 21 21 21 27.5 27.5 28.5 30.5 21 21.5 24 27 26.6 40.5 65 One-touch fitting 6 Vacuum Regulator Series IRV10/20 Dimensions/IRV20A: Single Sided Connections

VHK

B Q L2 L3 L4 L5 L6 L1 H 1(P) 2(A) C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 1.2 26 23 11 3.5 41 18 54 51 11 M5 M5 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 2.0 2.0 29.1 16.5 29 29.1 61.6 58.2 1 8 11 3.5 41 8.6 1.2 13 18 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 32.6 16.5 VHK-01S-01S 1 8 1 8 30 57 32.6 65.2 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 2-5-40 to 2-5-43 for control unit.

VCHR

Adjusting bolt 40 ARX20 VCHR40 VCHR 100 ITV 60 2 x Rc 1/4: with plug Set pressure detection port 4 10.5 IC 56 Port size: G1,G11/2 PVQ 11 Max. 331 5 85 10 VEF VEP 44 52 OUT VER IN 128 VEA VY2 269.5 VBA VBAT AP100 85 Relief port 11 Adjusting bolt 40 633 Series VCHR Specific Product Precautions Be sure to read before handling.

Line filter

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AFF20) 23 to 24 2) Bowl assembly (AFF20) 25 1) Element assembly (AFF30/AFF40) 26 to 27 2) Bowl assembly (AFF30/AFF40) 28 to 29 11. Exploded Drawing 30 12.

Mist Separator

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AM20) 23 to 24 2) Bowl assembly (AM20) 25 1) Element assembly (AM30/AM40) 26 to 27 2) Bowl assembly (AM30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Micro Mist Separator

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AMD20) 23 to 24 2) Bowl assembly (AMD20) 25 1) Element assembly (AMD30/AM40) 26 to 27 2) Bowl assembly (AMD30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

Pilot Operated

40 40 DIN terminal Conduit terminal J 58.5 58.5 54.5 56.5 J 1/4, 3/8 1/2 I 19.5 19.5 I H 54 56 46.5 46.5 I H I Normally closed 26 28 20 24 30 26 80.5 86 11 14.5 21 28 61 61 92 92 VXD2130 Model Grommet Electrical entry (AC/Class B coil) Conduit H 53 55 48.5 48.5 DIN terminal Conduit terminal J 65.5 65.5 53 55 Normally closed H 58 60 I 30 30 I H 54 56 53.5 53.5 I H I J 69.5 69.5 100.5 100.5

17

D 40 55 74 H 3.2 4.5 4.5 J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B 78 94 112 C 39 47 56 F 100 124 144 Ea 1 1 1 Eb 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 55 60 72 22 22 32 M6 x 1 M6 x 1 M8 x 1.25 5.5 5.5 6.5 12 12 16 9.5 9.5 11 Mounting direction (2) B1 28 40 44 Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Applicable cylinder MY1B25 MY1B32 MY1B40 A2 B2 C2 D2 F2 K2 Q2 Part

Silencer Series AN

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 M5 x 0.8 15 Body (Resin) A 1/8 23 11 A 16 14 1/4 32 Hexagonal flats D 16.5 14 1/4 45 20 17 3/8 58.5 Port size 24 21 1/2 68 2 Silencer Compact Resin Type/One-touch

Digital Flow Switch (Integrated display type)

Otherwise, chattering will occur. 9: This function is available when the model includes an analogue output. 10: When selecting 0 to 10 V, refer to the analogue output graph for the allowable load current. 11: Standard condition (STD): 20 [oC], 101.3 [kPa] (Absolute pressure), 65 [%R.H.]

3 Port Air Operated Valve

812 796 853 837 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1573

Rotary Gripper Series MRHQ

40 Overhang H mm Overhang H mm 30 0.3MPa 0.3MPa 0.3MPa 0.6MPa, 0.7MPa 30 0.4MPa 0.4MPa 0.4MPa 0.3MPa 0.5MPa 0.5MPa 0.5MPa 20 0.4MPa 0.5MPa 20 0.6MPa 0.6MPa 0.6MPa 10 10 H H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm

Compact Cylinder

50 63 17 16.5 16 M10 x 1.25 6 14 26 19 17 16.5 16 M10 x 1.25 6 14 26 19 19 19.5 20 M12 x 1.25 7 17 30 22 19 19.5 20 M12 x 1.25 7 17 30 22 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5

LEKF-OMZ0035

Slider type LEKFS series . 7 2.1 Specification . 7 2.2 How to Order . 9 2.3 Construction . 11 3.