Compact Type

Refer to page 21 for detailed specifications. Auto switch type Part no.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

Compact Type Dual-Rod Cylinder Series CXSJ

Refer to page 21 for detailed specifications. Auto switch type Part no.

Air Slide Table Series MXQ

27 29.5 35.5 Model 150 56.5 64 125 42.5 55 64 100 34 42.5 53.5 50 75 28.5 34 33 37.5 43 50 18.5 28 25 30 33.5 43 40 18.5 20.5 25 27 29.5 35.5 30 14.5 18.5 21 27 29.5 35.5 10 14.5 16.5 21 27 29.5 35.5 Allowable moment coefficient: Graph 2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 6 7 9 10.5 14 16.5 13.5 16 19.5 24.5 30 37 13.5 16 19.5 24.5 30 37 6 7 9 10.5 14 16.5 1.0 Allowable moment coefficient

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52 38.5 25 M5 x 0.8 6 499 Series LVD With flow rate adjustment (Max.

EXxx-OMO0027

Occupied byte Unit Unit part number Input Output EX600-SEC (32 outputs) 0 4 EX600-SEC (24 outputs) 0 3 SI unit EX600-SEC (16 outputs) 0 2 EX600-SEC (8 outputs) 0 1 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs)(with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 2 0 EX600-DXE (16 inputs) 2 0 EX600-DXF (16 inputs) 2 0 EX600-DYB (8 outputs) 0 1

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O.

Thermo-chiller

Operation Display Panel Page 16 List of Function Page 16 Alarm Page 17 Communication Function Options Page 18 With Caster Adjuster-Foot Page 18 With Earth Leakage Breaker Page 18 With Fluid Fill Port Optional Accessories Page 19 q Piping Conversion Fitting Page 19 w Caster Adjuster-foot Kit Page 20 e Electric Conductivity Control Set Page 20 r Bypass Piping Set Page 21 t Relief Valve Set

Vacuum Gripper

URCap . 16 5. Dimensions. 21 5.1. Vacuum Gripper . 21 5.2. Center of gravity . 22 5.3. Suction cup with adapter . 23 6. How to change the number of cups . 25 6.1 Change to 1 cup (with flange) . 25 6.2 Change to 1 cup (without flange) . 26 6.3 Change to 2 cups . 27 7.Maintenance . 28 7.1. Maintenance for vacuum gripper . 28 7.2.

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

LEG series guide rod type / Common precautions . 21 3.1 Design / selection . 21 3.2 Handling . 21 3.3 Mounting . 22 3.4 Precaution on maintenance . 24 3.5 Replacement of belt . 25 4. Troubleshooting . 28 LEG Series / Electric Actuator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

,

M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting

,

M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting

Thermo-chiller

Mounting dimensions: HRLE090 21 A Optional Accessories HRLE Series rParticle Filter Set This set can be used to remove foreign matter from the circulating fluid. If foreign matter such as scales in the piping enter the circulating fluid, this may cause the pump to malfunction. Therefore, it is strongly recommended to install the particle filter set.

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

Pilot Operated

AC Specification (Class H coil) AC Specification (Class B coil) Apparent power (VA) Energized 19 16 43 35 62 52 Apparent power (VA) Energized 19 16 43 35 62 52 Temperature rise (C) Note) Temperature rise (C) Note) Model Model Inrush Frequency (Hz) 45 40 55 50 65 60 Inrush Frequency (Hz) 45 40 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 9 7 19 16 30 25 VXD21 VXD21 VXD22

240

Dimensions [mm] Model L1 L2 L3 A B C D E F G J LEPS6-25 127.1 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6-50 156.6 169.6 13 22 45 30 52 22 52 60 107.4 393 LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1

Modular Type Lubricators Series AL

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

CEx-OMB0060

Data setting range 16 7-2. Setting 17 7-3. Counter operation 21 7-3-1. Handling data range 21 7-3-2. Reset and hold input 21 7-3-3. Correspondence of banks and bank terminals at switching 21 7-3-4. Correspondence of preset numbers and output terminals 21 7-3-5. Output 22 7-3-6. Preset output forms list 23 7-3-7. Output timing chart 24 7-4.

Air Combination

How to Order 16-20 5. Options 21 6. Structural Drawing and Replacement Part 21 7. Trouble Shooting 22 8. How to Replace the Products 23 9. Disassembly Drawing 24 10. Dimensions 25-29 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.