S Couplers

Stopper ring Stainless steel 304 13 5.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i 48 Series PF2D Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A Internal circuits and wiring examples z to , are the terminal numbers. 4-4.5 Display unit (PF2D30/31) Sensor unit 52 1 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 8 4 Load + 12 to 24 VDC White 7 3 Black 5 1 Blue 18

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

LZ-OM004xx

F G H [Tightening torque] No.LZ-OM00401 B (1/3) Electric Cylinder LZC series L[]ZC[]3[] 1.5 8 M4 x 0.7 x 6 deep [0.75Nm ] L[]ZC[]5[] 3 13 M5 x 0.8 x 8 deep [1.5Nm ] L[]ZC[]3[] M4 screw 0.75Nm M4 screw 0.75Nm L[]ZC[]3[] 4.5 8 2 7.5 11.5 12 L[]ZC[]5[] 6.5 13 3.2 10.7 16.7 15 L[]ZC[]5[] M5 screw 1.5Nm M6 screw 2.6Nm Model no.

AHC System Series MA

Closed: 6.6 Open: 12.6 745 Series MA2 Tool Stand MA210-S140 2 x 4.5 mounting hole Height can be adjusted With auto switch 13 4 x 4.5 mounting hole Mass: 520 g 746 AHC System Series MA2 Construction: Component Parts Single acting type When disconnected When connected Air supply (0.4 to 0.7 MPa) Exhaust AHC unit Tool adapter MHZ MHF MHL Component Parts Component Parts Description Description

Precision Regulator

Description Material Qty. 11 Diaphragm assembly NBR, other P362010-1 1 1 1 1 1 P362020-13 P362020-2 P362020-13 P362020-2 12 Diaphragm assembly NBR, other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Process Data Diagnosis items Bit offset Item Note Internal product malfunction Outside of zero-clear range Outside of rated pressure range Upper temperature limit exceeded inside the product 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 2 Diagnosis 0: Normal 1: Abnormal 3 to 15 Measured pressure value Unsigned 13 bit Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Measured

Refrigerated Air Dryer For Use in North, Central and South America

For Use in North, Central and South America Refrigerated Air Dryer (UL, CSA Standards) Applicable for the high-temperature environments Ambient temperature : Max. 113F (45C) Inlet air temperature : Max. 149F (65C) Air flow capacity * IDFB90-23, Dew point of 50F (10C) 459 SCFM (780 m3/h) (13% increase compared to the current model) Power supply voltage Single-phase 230 VAC (60 Hz) Single-phase

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

Low Profile Guide Type

17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 100,150,200,250,300,350,400,450,500,550,600 CYP Model KC KA KB KH KW L LA LL LW LZ ML MM N PA PB PC Q QA QB QW CY1F10 6.5 44 8 19 59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52

Ejector Valve Unit Series ZYY/ZYX

Supply pressure Reliable adsorption Set pressure Unstable adsorption High vacuum High pressure No adsorption Atmospheric pressure 0 Set pressure ON Hysteresis OFF Atmospheric pressure 0 1087 Series ZYY/ZYX Construction ZYY3000 B B A A 10 11 4 5 3 12 Section A-A' (Ejector) 13 8 2 7 9 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part

AMD

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMD850 1 2 13 42 348 220 57.5 220 10 14-20-27 7 Series AMD AMD801/901/800/900/1000 Dimensions AMD801/901 ORIENTATION Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

AME

239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

Voltage Monitor for PFMV5

(Refer to page 42) Check that the brown, blue, black and white wires are connected correctly. Incorrect wiring Correct the wiring. External input does not operate No reaction to the external input For external inputs, the white wire should be connected to GND for 5 ms or more.

Magnet Gripper

Width across flats Tightening torque for nut B (Nm) Holding force Adjustment bolt Nut A Nut B adjustment range Model Adjustment bolt Nut A Nut B MHM-16D1 2 10 6 1.5 5 MHM-25D1 3 14 8 5.2 5 MHM-32D1 3 14 8 5.2 5 MHM-50D1 5 24 17 42 5 15 - Caution 1. Do not apply external forces to the holding force adjusting part other than for the purpose of holding force adjustment.

Digital Gap Checker

OFF displayed ON displayed (Refer to page 42) Press button for 5 seconds or longer. Press button Press for 2 seconds or longer. button once. Switch point change mode Function selection mode Key lock mode Each function can be changed individually. (Refer to page 58) The switch point value can be changed.

ML1C

43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Special friction material Stainless steel Stainless steel Stainless steel Carbon steel Carbon steel Hard chrome plated Nickel plated Chromated Chrome