• I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!
FSC() FSt FSt FStFSt 1 digit 15 2CH1 CH2CH3CH4 CH1 OUT1 CH2CH3CH4 CH1 CH2CH3CH4 OUT1 CH1 OUT1 CPy CPy CPy CPy 1 digit -24No.PS-OMH0005CN-D 26 SH1 CH1onoF SH1 ON OFF CH2 CH3 CH4 12 -25No.PS-OMH0005CN-D 10 ms oooC_5C_3 CH1 OUT1OUT2 P_1 P_4n_1 n_4C_5 CH2CH4 OUT1 P_1 P_2n_1 n_2C_3 15 ms oF oFLo() ooo () EEPROM Aon ((PSE530 ) (PSE530 ) (PSE530 ) -26No.PS-OMH0005CN-D
3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37 168.5 58.5 63.5 39 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 40 184 63.5 69 36.4 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M6 x 0.75 M14 x 1.5 46 214.5 76 78 42.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 297 MSZ
, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.
fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!
Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.
OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF. FrG. 1) QW tP3100 METHOD OF OPERATION Signal pressure trom a controlled pressure source enters the lP3l00 positioner through the signal port.
Removal of cover Hook the finger on the front cover ridge and rotate it in the direction of the OPEN arrow until it stops (15). Then pull out and remove the cover. Throttle setting for blowing to prevent water and cutting oil from entering the nozzle. (Clockwise: Close throttle; Counterclockwise: Open throttle) IF Data The setting is not applicable to valves without throttle. 1.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!
Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.
03-10W2 AS321F-03-12W2 AS421F-04-10W2 AS421F-04-12W2 11.6 6 9 13.5 22.9 11.7 28.8 26 25.2 22.4 18.1 8 6 9.6 M5 x 0.8 13.2 6 19 17 31 23.9 13.4 15.2 R 1/8 8 21 18.5 32.4 36.4 31.4 33.3 28.3 25.3 12 10 14.2 18.5 10 23 21 39.2 15.2 32.1 13.2 6 34 17 34.4 25.2 17.7 15.2 17 8 36 12 18.5 36.4 41.1 36.1 35.6 30.6 27.2 18.5 18.5 10 38 21 18.3 44.5 35.3 13.2 6 R 1/4 63 17 39.3 27.8 15.2 8 65 18.5 41
For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.
Model: 41 (AC), Bar Length: 232 (2320mm), Emmiter Cartridge, Material: S (Energy Saving High-efficiency Cartridge, Silicon), High-voltage Cable Length: 3 (3m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage
Model: 41 (AC), Bar Length: 58 (580mm), Emmiter Cartridge, Material: L (High Energy Saving De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1)
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller
SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003
5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003
6 6-1. 1 1P4P5 10 XL-OMY0003
6-2 1 2 b 3 1 2 O 4 a aa b O O
5 . , ' , . i u , , MGQbll2 Slide bearing 0.24 0.24 o.32 0.35 0.39 MGOLI2 Ball bush bearing o.23 0.26 0.29 0.35 0.38 16 vepr,lrol Slide bearing 0.36 o.41 o.47 0.52 0.57 vcbr-ro Ball bush bearing 0.3s o.3s o.44 o.52 o.57 n MGOM20 Slide bearing 0.56 0.63 0.70 o.77 0.s6 1.10 MGOt20 Ball bush bearing 0.54 o.60 0.70 o.90 1.04 ,' .is MGOM25.