S070 -www.stevenengineering.com VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 6 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-
Note) Order is accepted in 10 units. 4-11-4 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 V100 7 SY 12 18 SYJ 2-3.4 mounting hole VK 150 (Lead wire AWG#26) 5 22 6 VZ VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug
(Example) SS3YJA3-41-03-M3 . 1 set SYJA314. 1 set SYJA324. 1 set SYJ300-10-2A . 1 set The asterisk denotes the symbol for assembly.
SS3YJA3-41-03-M3 . 1 set SYJA314 . 1 set SYJA324 . 1 set SYJ300-10-2A . 1 set The asterisk denotes the symbol for assembly.
Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.
Fax: 03-3508-2480 URL http://www.smcworld.com 2005 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JO printing JO 120DN Printed in Japan.
Additionally, when the barrier is selected, the barriers equivalent to the number of solenoids are included with the product. 52-SY9000 Electrical entry Port size (Base mounted type) Plug connector type Plug connector with cover type Cable type L LL TT Symbol Port size Applicable series Without sub-plate Nil 02 02 03 03 04 1/4 1/4 3/8 3/8 1/2 52-SY5000 Lead wire length 52-SY7000 3 6 10 15
slave modes, 2 power supply systems 1 to 12 stations (24) 1 to 12 stations (24) AS-Interface, 4 in/4 out, 31 slave modes, 2 power supply systems EtherNet/IP AS-Interface, 8 in/8 out, 31 slave modes, 1 power supply systems SDTD Note 1) AS-Interface, 4 in/4 out, 31 slave modes, 1 power supply systems S F P kit (Serial transmission: EX126 integrated type (Output)) kit (D-sub connector) kit
/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 167 Series KK Flow Characteristics Air (0 to 1 MPa) Water (0 to 0.4 MPa) KK2 KK2 0.007 0.50 Series KK2 (KK2S-M5M + KK2P-M5M) Series KK2 (KK2S-M5M + KK2P-M5M) 0.45 0.006 0.40 0.005 0.35 Flow rate m3/min (ANR) Flow rate m3/min Flow rate m3/min 0.30 0.004 0.25 0.003 0.20
Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A
(SI unit side) Valve manifold Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories Bit No. 1 3 5 7 1 1 5 7 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.
(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED and switch LED display to indicate the status of the SI unit 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.
(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PFMC7501/7102 (M3 x 5, 2 pcs.)
Option Note ZS-40-A Lead wire and M8 connector Length: 3 m ZS-42-A Bracket Mounting screw for PFMC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket Mounting screw for PFMC7202 (M3 x 5, 2 pcs.) 4 Series PFMC For Flow Switch Precautions, refer to Handling Precautions for SMC Products on SMC website. For Specific Product Precautions, refer to the Operation Manual on SMC website.
BUS IN BUS OUT DRAIN 1 1 1 5 4 3 2 5 4 3 2 V+ 2 2 2 0 0 0 Bit No. 6 4 6 4 3 VSolenoid on side A Output No. 0 2 4 6 8 16 28 30 CAN_H 4 Side D 5 CAN_L (SI unit side) To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 4 5 Solenoid on side B 1 3 5 7 9 17 29 31 Output No.
M3 hexagon screw Tightening torque 0.6 Nm Troubleshooting If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.