Suction Guard (Produced upon receipt of order) FHG Series

L-type block (75) (50) W R P Q Port size Weight (kg) d K W Y AE (mm) (75) (50) W J W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69

Modular Type Regulator Series AR

60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option Note 1) 1 Symbol Nil B G Note 2) Applicable model AR25 to 60 AR25

CEx-OMQ0011

100 100 50 50 0 0 0 5 m/s m/s 19 4-3.

AIR COMBINATION

30.5 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-A 1/8 167.4 115.1 27 30 55.1 50 30.5 41 57.2 35 7 14 4 41 AC40C-A 1/8 220.4 147.1 33.5 38.4 72.6 75 36.1 50 75.2 40 9 18 5 48 1/43/81/2 AC40C-06-A 1/8 235.4 149.1 33.5 38.4 77.6 75 39.6 50 80.2 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications Round type Metal bowl With Round type With With auto drain Metal bowl Metal

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

Nil S n Bore size 20 25 32 40 50 63 80 Auto switch 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm Nil Without auto switch (Built-in magnet) Thread type For the applicable auto switch model, refer to the table below. 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Nil TN Cylinder stroke (mm) Refer to Standard Stroke on page 429.

VXZ

The apparent power in parentheses is for VXZ2232. 50 66(60) 20 60 57(51) 15 AC VXZ22 DC 50 93 25 60 79 20 AC VXZ23 DC JIS Symbol OUT IN 17-3-63 Applicable Fluids Check List Refer to pages 17-3-62 and -63 for models and specifications. Refer to pages 17-3-62 and -63 for models and specifications.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

Long spacer -20 -30 -40 -70 -10 -50 -60 -80 0 0 to 16 32 to 48 16 to 32 MY140 Without spacer Short spacer Long spacer 0 to 20 20 to 40 40 to 60 MY150 Short spacer Long spacer Without spacer 0 to 25 25 to 50 50 to 75 MY163 Short spacer Without spacer Long spacer Table 1: Stroke adjustment range (Without spacer, with short spacer, with long spacer) Warning 1.

“

are used 200 200 When 20 units are used Approx. 100% reduction Current model IR3000 Series Approx. 100% reduction 49000 yen reduction 150 150 128000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1200-A Series IR2200-A Series 50 50 IR3200-A Series 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Bleed air 0 IR No fixed throttle in the new design.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

) 114 VN LVC 53 63 43 LVA LVH LVD LVQ LQ LQ-GM LQ-GL LVN 50 TI/ TIL 50 207 85 PA 342 85 PAX LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60 87 60 112 112 17-5-129 34 Series LQ 1 2 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

G FZ FT E 2 x 7 Mounting hole F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 40 32 25 20 20-0.033 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37 P S H2 H1 Bore size MM K

Power Valve: Economy Valve Series VEX5

Port size port 3(R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

Digital Gap Checker

Function number Function name Default setting Page F 0 (Unit) Unit selection [ PA] kPa Page 49 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 50 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot:

ZQ-OM01301

25 -60 Air consumption 20 -40 -40 15 Suction flow rate 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 Supply pressure[MPa] Suction flow rate [L/min (AMR) ] ZQ10A Exhaust Characteristics Flow Rate Characteristics Supply pressure0.43MPa -100 70 -100 Air consumption [L/min (AMR) ] 60 -80 Vacuum pressure Vacuum pressure [kPa] -80 Vacuum pressure [kPa] Suction flow rate [L/min (AMR) ] 50 -

Compact Vacuum Unit

) (20) (20) 0 0 0 0 0.05 (1.5) 0 0.11 (3) 0.16 (4.5) 0.21 (6) 14.5 (0.1) 29 (0.2)43.5 (0.3) 58 (0.4)72.5 (0.5) 87 (0.6) Supply pressure psi (MPa) Suction flow SCFM (L/min (ANR)) K Nozzle Size 0.6 mm Supply Valve, Large Flow Type (N.C.)

Compact Vacuum Ejector Series ZA

28 Supply pilot valve 20 30 38 30 40 48 Release valve 40 50 58 50 60 68 60 70 78 57.6 70 80 88 Approx. 3000 80 90 98 9.6 5.8 5 Suction filter 10 12 14 n x 10 M5 both sides common air pressure supply (P) port P P Note 1) The above dimensions are for ZZA103-00.

EX510

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

E-MY2_E_D

Phone AUSTRIA / (43) 2262-62 280 ITALY / (39) 02-92711 BELGIUM / (32) 3-355 1464 NETHERLANDS / (31) 20-531 8 CZECH REP. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30)

PF-OMN0009_C

40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4

SFOD-OMT0005CN

Axis mode (mm/s) (mm) Selection (mm) (mm) 2) 2) (mm/s (mm/s (mm) 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 -41- () () (TB) No. Step No. 063 No. TB PLC 0 No.