HRX-OM-X027

Table 3-4 Piping port size Name Port size*1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more 1.0MPa more Automatic water-fill port *2 Rc3/8 22 to 24Nm (Automatic water-fill pressure 0.2 to 0.5MPa) Overflow port *2 Rc3/4 28 to 30Nm Inside diameter 19mm more of piping

HRX-OM-O021

Piping port size Table 3-5 Piping port size Name Port size1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more Faiclity water inlet3 Rc1/2 28 to 30Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet3 Rc1/2 28 to 30Nm 1.0MPa more Automatic water-fill

MLGP

Flat head watchmakers screwdriver Hexagon wrench key 2 Auto switch mounting bracket BMG1-040 Hexagon socket head cap screw (M2.5 x 8l ) Switch mounting screw (M2.5 x 4l ) (Included as accessory) Auto switch Hexagon wrench key 2.5 Hexagon socket head cap screw (M3 x 16l ) Auto switch 9-11-28 28 Compact Guide Cylinder with Lock Series MLGP Operating Range Auto switch model Bore size (mm) 25

MK

D-A7lH, A80H D-A73C, A80C D-F7l, J79 D-F7lV, J79C D-A79W D-F9l D-F9lV D-F9lWV D-F9lW D-F9BAL D-P5DW D-A9l D-A9lV D-A7, A8 Model B 6.5 7 6 8.5 11.5 14.5 A 28.5 29 33 24 28.5 28.5 B 7 7.5 6.5 9 12 15 B 4 4.5 3.5 6 9 12 B 11 11.5 10.5 13 16 19 B 4.5 7.5 10.5 B 5 7.5 10.5 13.5 B 9 11.5 14.5 17.5 A 34.5 25.5 30 30 B 8 10.5 13.5 16.5 A 19.5 24 24 A 28 28.5 32.5 23.5 28 28 A 25.5 26 30 21

Free Mount Cylinder for Vacuum Series ZCUK

23 46 35 12 24 47 18 25 48 28 29 52 12 25 48 15 18 29 52 22 27 33 56 34 38 61 ZPT-B6 ZC(D)UKC20 ZC(D)UKQ20 21. 5 23. 5 27. 5 32. 5 44. 5 46. 5 50. 5 55. 5 ZQ DQ HQ HP 43 32 57 53 33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5 38. 5 47. 5 51. 5 ZH 76. 5 54. 5 67. 5 63. 5 72. 5 DQ HQ HP 43 35 67 27 42 74 53 53 36 68 34 47 79 43 28

Compact Cylinder with Lock Series CLQ

40 M18 x 1.5 16 20 50, 63 I-G05 14 22 56 18 28 40 M18 x 1.5 16 20 14 80 Y-G08 71 23 38 50 M22 x 1.5 21 27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

Clamp Cylinder Series CK1

D-P4DWSC D-P4DWSE D-P4DWL D-P4DWZ BA8-032 Dimensions 25 28 5 6 12 3 x Rc 1/8 3 x Rc 1/8 9.5 20 4 Speed controller valve Cushion valve 4 32 12 4 45 45 M10 x 1.25 Max. 26.5 12 40 26 41.5 Width across flats 36 12 R12 12 +0.5 +0.2 Shaft: 10 0.040 d90.076 28 26 Hole: 10 +0.022 H8 0 41.2 38 5 20 34 + Stroke 70 + Stroke 55 137 + Stroke Double knuckle joint Single knuckle joint 10 +0.022 H8 0 3

SQ1000/2000

Dimension L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No. Dimension L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 50 Series SQ1000/2000 Manifold Options for SQ1000/SQ2000 Negative COM specifications The following valve part numbers are for negative COM specifications.

Rotary Table/

61 60 28 40 22 6 65 67 65 32 48 19.5 30 6 76 13.5 67 65 32 48 22 6 68 77 75 35 54 21.5 34 7 87 15.5 77 75 35 54 24 7 77 Dimensions other than above are identical to the high precision type.

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

Compact Cylinder with Air Cushion Series RQ

40 M18 x 1.5 16 20 20 28 40 M18 x 1.5 16 20 44 50.6 14 22 56 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 28 IY-G08 71 21 38 50 M22 x 1.5 21 27 23 38 50 M22 x 1.5 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10 100 22 32 IY-G10 79 21 44 55 M26 x 1.5 24 31 24 44 55 M26 x 1.5 24 31 64 72 22 32 79 Knuckle pin and retaining ring are included.

3

22 32 40 50 4.5 5 1.5 78 54 30 60 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 3/8, 1/2 34 30 42 48 58 4.5 5 1.5 98 71 38 68 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 1/2, 3/4 44 36 48 58 70 5.5 7 2.0 124 92 46 77 62.6 57.6 23.0 41 42 63 48 28 18.0 3.5 depth 14 3/4, 1 104 74 31 52 39.5 1 1/4, 1 1/2 PF3W721/521 108 76 56 91 76.6 71.6 28.5 54 33 54 41.5 25 27.5 3.5 depth 14 G1 1/4

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Always use the power supply designed exclusively for the electromagnetic brake. 3 28 3.

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Step Motor Controller

INP Outputs when servo is on Not output when EMG stop is instructed Not output when alarm is generated SVRE ESTOP Note) ALARM Note) Note) Signal of negative-logic circuit (N.C.) 28 Series LECP6 Step Data Setting 1. Step data setting for positioning 2.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

The grommet type is only available for the JSX10. 57 15 IN 8 25 25 2 x G1/8 1(IN), 2(OUT) port 2 x M3 x 5 Glossary of Terms Specific Product Precautions 14 JSX Series Dimensions: JSX20, 20U Port Size 1/8 Body Material Stainless Steel G: Grommet JSX20 only GS: Grommet with PCB 18 28.5 300 36 300 38 18 36 63 63 39 33.3 IN IN 8 8 30 2 x Rc, NPT1/8 1(IN), 2(OUT) port 30 28 28 2 x Rc, NPT1/

Modular Design with Uniform Body Style

91.4 87.4 93.9 AC30B-V-D m28 32.5 m27.8 43 37.5 63 37.5 64 37.5 64 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AC40B-V-D m28 41.5 m27.8 52 42.5 73 42.5 73 42.5 73 186.9 155.6 153.9 149.5 154 169.5 174 AC40B-06-V-D m28 41.5 m27.8 52 42.5 73 42.5 73 42.5 73 188.9 157.6 155.9 151.5 156 171.5 176 AC50B-V-D m28 51 m27.8 61.5 42.5 82.5 42.5 82.5 42.5 82.5 259.9 228.6 226.9 222.5 227 242.5 247 28

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

KJ10D KJ12D KJ16D KJ20D KJ27D M10 x 1.25 10 43 28 14 20 4 15 M12 x 1.25 12 50 32 16 22 4 17 M16 x 1.5 16 64 42 21 28 4 23 M20 x 1.5 20 77 50 25 33 4 27 M27 x 2 30 110 70 37 51 4 36 83 Series CP96/C96 Simple Specials These changes are dealt with Simple Specials System.