AMX-OM-L023_e

W ARN I N G Chem i cal s Corrosi ve gas + At m osphere Cont ai ni ng organi c sol vent *N . C. aut o drai n: M i n. 0. 15 M Pa *N . O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent .

Vacuum Gripper

Vacuum pressure Theoretical lifting force Horizontal lifting force [N]Safety factor 1/4 [kPa] [N] 1 cup gripping -50 40.2 10 2 cups gripping -67 53.8 13.4 3 cups gripping -73 58.7 14.6 (Calculated by W = P X S, S = r2, r = 32 / 2. Refer to 3.3 How to calculate theoretical lifting force for the detail.)

PSxx-OMV0003CN

-2No.PS-OMV0003CN-G / *3) 1 1.5 *3)1 1 [] -3No.PS-OMV0003CN-G () () () () -4No.PS-OMV0003CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMV0003CN-G * FG (35 N () ,() *() 6 33 () 20 m DC(-)() * ( ) -6No.PS-OMV0003CN-G () CE 0~50(5 ) (FKMHNBR) * 1015 10 1% 1959 LCD * -7No.PS-OMV0003CN-G ISE70 02 L2 M 3 Y K T ISE70 0~1MPa ISE71 0~1.6MPa 02 Rc1/4 N02

Rotary Table

4 13 Magnet 4 12 Bearing retainer 1 11 Table 1 10 Cushion pad 2 Size : 3, 7 9 Adjusting bolt 2 8 Hexagon nut 2 7 Pinion 1 6 Piston 2 5 End cover 2 4 Seal 1 3 Plate 1 2 Cover 2 1 Body 1 No Description Qty Note . 20 - Basic circuit Circuit structure The standard circuit for operating a rotary cylinder with an air filter, regulator, solenoid valve and speed controller is shown in Figure 1 below

Compact Cylinder

Double clevis: CVQD CT Rod end male thread 4 x N Cap bolt Shaft d9 CD hole H10 L1 Rod end nut CU +0.4 +0.2 CX RR CW L B + Stroke CZ 0.1 0.3 CL + Stroke A + Stroke (mm) Bore size (mm) Stroke range (mm) 32 40 50 63 B CL CD CT CU CW CX CZ L L1 N RR A 70 Note 1) 33 Note 1) 60 10 5 14 20 18 36 7 28.5 M6 x 1 10 5 to 100 68.5 10 6 14 22 18 36 7 28.5 M6 x 1 10 78.5 39.5 5 to 100 90.5 Note 2) 40.5

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

OFF n-1 n-2 Error correction Real-time flow rate Window comparator mode H : Hysteresis For PF2D300/301 Note 2) "n" H H LED display Contents Solution ON Check the load and the wiring for OUT1. A current of more than 80 mA is flowing to OUT1. NO OFF n-2 n-1 Real-time flow rate Check the load and the wiring for OUT2. A current of more than 80 mA is flowing to OUT2.

SYJ Series

Connector mounting position SYJ300 M1.7 0.12N.m SY3000-37-81A-2-N Single1 to 4stations SYJ500 M2.5 0.45N.m SY3000-37-81A-2-5 Double/3 position : 1 to 4 stations SS5YJ3-21,32SA SY3000-37-81A-1-N Single5 to 8 stations SYJ700 M3 0.8N.m SY3000-37-81A-1-4 Double/3 position : 5 to 8 stations SS5YJ5-20,40,42,43SA SY3000-37-81A-2-N Single1 to 8stations SY3000-37-81A-2-5 Double/3 position : 1 to 8

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

40 J M6 x 1 MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !

AMX-OM-L022_e

M I CRO M I ST SEPARATO R Seri es AM D W ARN I N G Chem i cal s Corrosi ve gas + At m osphere Cont ai ni ng organi c sol vent *N . C. aut o drai n: M i n. 0. 15 M Pa Keep f ol l ow i ng t o operat e M i cro m i st separat or properl y. *N . O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage.

AMX-OM-L021_e

C. aut o drai n: M i n. 0. 15 M Pa *N . O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Keep f ol l ow i ng t o operat e M i st separat or properl y. Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons.

VPA4

M3 x 0.5 x 32 VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge

No more element replacement!

Features 2 Low Maintenance Filter Series FN1/FN4 How to Order 0 1 N S 020 With single element FN11 10 0 2 N S 020 With four elements FN41 20 Pressure gauge Housing material Symbol Pressure gauge Symbol Housing material Nil G Note 1) None (With plug) 1 Stainless steel 304 With pressure gauge Note 2) (Wetted part: Brass) Note 1) Contact SMC for the pressure gauge specification for stainless

PF-OMN0009_C

* , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12

Vacuum Gripper

Vacuum pressure Theoretical lifting force Horizontal lifting force [N]Safety factor 1/4 [kPa] [N] 1 cup gripping -50 40.2 10.0 2 cups gripping -67 53.8 13.4 3 cups gripping -73 58.7 14.6 (Calculated by W = P X S, S = r2, r = 32 / 2. Refer to 3.3 How to calculate theoretical lifting force for the detail.)

Vacuum Gripper

Vacuum pressure Theoretical lifting force Horizontal lifting force [N]Safety factor 1/4 [kPa] [N] 1 cup gripping -50 40.2 10 2 cups gripping -67 53.8 13.4 3 cups gripping -73 58.7 14.6 (Calculated by W = P X S, S = r2, r = 32 / 2. Refer to 3.3 How to calculate theoretical lifting force for the detail.)

VXA31/32

VC Model VDW VQ Thread type Nil T F N Orifice size Rc NPTF G NPT 1 2 3 4 1.5 mm 2.2 mm 3 mm 4 mm VX2 VX Refer to the table (1) given below for availability. VX3 Port size 01 02 03 1 8 1 4 3 8 VXA Valve/Body 4 Common/Single unit Refer to the table (1) given below for availability.

Air Cylinder NCM Series Stainless Steel Cylinders

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .