Stepless control of air pressure proportional to an electrical signalMaximum supply pressure: 5.0 MPaSet pressure range: 0.01 to 3.0 MPaMaximum flow rate: 3000 L/min[ANR]Fluid: Air, N2, O2, ArWetted parts: Fluorine grease, Hi Pressure Electro-Pneumatic Regulator, REGULATOR, ELECTROPNEUMATIC, 853, 570 lb

Stepless control of air pressure proportional to an electrical signalMaximum supply pressure: 5.0 MPaSet pressure range: 0.01 to 3.0 MPaMaximum flow rate: 3000 L/min[ANR]Fluid: Air, N2, O2, ArWetted parts: Fluorine grease, Hi Pressure Electro-Pneumatic Regulator, REGULATOR, ELECTROPNEUMATIC, 853, 830 lb

Stepless control of air pressure proportional to an electrical signalMaximum supply pressure: 5.0 MPaSet pressure range: 0.01 to 3.0 MPaMaximum flow rate: 3000 L/min[ANR]Fluid: Air, N2, O2, ArWetted parts: Fluorine grease, Hi Pressure Electro-Pneumatic Regulator, REGULATOR, ELECTROPNEUMATIC, 853, 570 lb

Stepless control of air pressure proportional to an electrical signalMaximum supply pressure: 5.0 MPaSet pressure range: 0.01 to 3.0 MPaMaximum flow rate: 3000 L/min[ANR]Fluid: Air, N2, O2, ArWetted parts: Fluorine grease, Hi Pressure Electro-Pneumatic Regulator, REGULATOR, ELECTROPNEUMATIC, 853, 830 lb

Stepless control of air pressure proportional to an electrical signalMaximum supply pressure: 5.0 MPaSet pressure range: 0.01 to 3.0 MPaMaximum flow rate: 3000 L/min[ANR]Fluid: Air, N2, O2, ArWetted parts: Fluorine grease, Hi Pressure Electro-Pneumatic Regulator, REGULATOR, ELECTROPNEUMATIC, 853, 570 lb

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP)

Digital Flow Switches

Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit PF2D504 PF2D520 PF2D540 PF2D20 0.4 to 4 1.8 to 20 4.0 to 40 PF2D30 Application Examples Application Examples Flow control of pressurized cooling water for welding gun Flow control of cooling water for wafer temperature regulation and high frequency power supply Flow control of N2

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

OFF OFF OFF OFF P1 n1 P2 P1 n2 n1 (Standard: Factory setting) (Reversed) (Standard: Factory setting) (Reversed) Press the SET button to set the mode and proceed to the output type setting. 3 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Pressure setting Auto preset setting Manual setting Press the SET button in the measuring mode to display the set value.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

8 lrg , L1 2.28 (58) 2.91 174) 3.54 (90) (06) 4.80 112.) 5.43 (38) 6.06 054) 6.69 (170) 086) t,n2) 8.58 (a8) 9.21 (234) 9.84 (250) 10.47 (266) 1110 1282) 11.73 (298) (3|4) 12.99 (330) 13.62 (346) L2 1.57 \40) 2.20 (561 2.43 (72) 3.,16 (88) 4.09 (ta) 4.72 0n) 036) 5.98 ,.152) 068) 7.24 (184) 7.87 8.50 (2oo) (26) 9.'13 1232) 9.76 \248) 10.39 l2u) 11.02 \2fi) 11.65 (296) 12.24 \312) 12.91 (328

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Magnetically Coupled Rodless Cylinder O senbs NCY2S Sf ide Bearing Type: 06,01 O,O1 5,025,N2,t40 How to Order Xl16Ah Hydro Xl6lHlgh sp.d X!'1 l.

Shock Absorbers and Rate Controls

i.0 22.41 h 57 .2 51.0 44.0 35.0 51.0 Ottl4.0l{lx4(il|(S) 533.0 100 0f M4.0tttx6(M(Sl 25.42 +a.25/0 5.42 90.5 38.2 +0.5/0 57 .2 51.0 44.0 24.22 kg 35.0 127 .0 51.0 i50 635.0 38.2 +0.5/0 57 .2 51.0 44.0 N/A 3{.20 ks 35.0 127.0 90.5 51.0 olf{lA.Oftx8$r{S) 200 762.0 +n2 25. 0EIY[4.0lUlx | 0(lll(Sl 250 864.025.42 +0.25/A 90.5 38.2 +0.5/0 127 .0 5t .2 5r.05l.0 44.0 N/A 35.0 37 .37 kg ALI dLmensions

Digital Flow Switches, Series PF2A, Series PF2W

resistant construction conforming to IP65 Series PF2A Series PF2A For Air Flow rate measurement range (l /min) For Air For Water For High Temperature Fluid (Water 90C) 0.5 to 4 2 to 16 5 to 40 0.5 to 4 2 to 16 5 to 40 10 to 100 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 Integrated Type Series PF2W Series PF2W For Water Application examples Flow control of N2

Digital Flow Switches Series PF2A

Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit PF2D504 PF2D520 PF2D540 PF2D20 0.4 to 4 1.8 to 20 4.0 to 40 PF2D30 Application Examples Application Examples Flow control of cooling water for wafer temperature regulation and high frequency power supply Flow control of pressurized cooling water for welding gun Flow control of N2

Air Cylinder RSQ Series Stopper Cylinder

polyurelhane tube Seal Kit-How to Order RSory-P"t [,"; Hri'lj,ffL 20 32 40 50 Construction/parts list Fixed mounting heisht SgfieS RSO Ooubfe acling . double acling wift spring . rolle( rd end Lever rod end wi(h buillin shock absorber (only 032, 440, d6o) d20 032.d40.C60 Round bar fod end type (D) Non rotaling rod end type (K) Single acting/roller rod end Q20 Only 1 roller is provided for 032 N2

High Vacuum Angle Valve, XL Series

It is inversely proportional to the molecular density (pressure) and may be characterized as =0.7/n2 or =2.33 x 10-20T/P2. Here is the molecular diameter (cm), n is the molecular density (units/cm3), T is the absolute temperature (K), and P is the pressure (Torr). In the case of air, for example, this becomes approximately 5cm at room temperature with 10-3 Torr.

Clean Regulator/Fluoro Resin Type Series SRF

Washing/assembling procedure Washing parts: Body,Valve diaphragm,Diaphragm Parts Specifications Degrease washing Pure water washing 1.0MPa Proof pressure 0.5MPa Max. operating pressure Alcohol washing 0.02 to 0.4MPa Set pressure range Assembly 0.5MPa Max. pilot pressure Inspection Pure water, N2 Operating fluid Clean pack 5 to 60C Ambient and fluid temperature Connection tubing O.D.

Rotary Cylinder Series MRQ

F(N) F(N) Stroke 15 105 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Number of Auto Switches Mounted Rotation angle Linear motion 0 02 0S 1 S2 SS S0 D2 Nil 2S 20 n n2 nS n0 Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 353 Rotary Actuators Precautions 1 Be sure to read this before handling.

High Purity Chemical Valve

When the diaphragm is made of PTFE Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1cm3/min (when pressurized). Operating Environment Operating Environment Warning 1. Do not use in a location having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3.

Flow Sensor Series PFMV

15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series PFMV5 Specifications PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F Model Dry air, N2