COM1 38 29 29 SVON SVON COM2 20 COM2 20 COM2 39 COM2 39 COM2 40 COM2 40 I/O 1 Input Signal I/O 1 Output Signal Name Details Name Details +COM1 +COM2 Connects the power supply 24 V for input/output signal OUT0 to OUT8 Outputs the step data no. during operation IN0 to IN8 Step data specified Bit No.
Caster Adjuster-foot Kit Optional Accessories p. 38 Height Volume 422 mm reduction 35% reduction Applicable for installation in locations other than 19-inch racks This is a set of unfixed casters and adjuster feet stop.
. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.
0.2 0.2 0.25 Flow rate (L/min(ANR)) 12 38 7 Sonic conductance dm3/(sbar) Free flow 0.04 0.12 0.02 Critical pressure ratio 0.15 0.15 0.3 Note) Flow rate values are measured at 0.5 MPa and 20C.
Applicable bore size A1 E1 D1 L1 MM R1 U1 ND NX NZ L Split pin size Flat washer size Shaft diameter: NDH10 Split pin Hole diameter: NDd9 L L MM Flat washer: Polished round D1 D1 MM Y-04D 40 22 24 10 55 M14 x 1.5 13 25 12 16 +0.3 +0.1 38 55.5 3 x 18 L Polished round 12 E1 NX NZ L A1 L1 U1 A1 L1 U1 Y-05D 50, 63 27 28 14 60 M18 x 1.5 15 27 12 16 +0.3 +0.1 38 55.5 3 x 18 L Polished round 12 E1
39 30 Width across flats 17 (2 locations) 38 79 (117) K 20 Width across flats 19 (2 locations) 4 13 4 38 18 18 18 48 2 x M12 x 1.75 (Piston rod thread) 4 x M12 x 1.75 through (Thread for mounting attachment) 28 When open G When open F 28 60 86 (mm) J 72 130 170 H 348 466 546 G 288 406 486 F 188 246 286 E 80 138 178 D 164 222 262 B C 116 174 214 112211221122MHL2-40D MHL2-40D1 MHL2-40D2 268
M22 x 1.5 Polished round 18 A1 U1 L1 4 x 25l +0.3 +0.1 30 Y-10C 100 37 40 83 21 38 20 61 83 M26 x 1.5 Polished round 20 RR1 Knuckle pin, cotter pin and flat washer are attached.
ZZ (mm) With adjusting bolt ZZ 132 182 232 282 With shock absorber ZZ 176 226 276 326 Z S SS Model F G L P Q R CX2N10-25 CX2N10-50 CX2N10-75 CX2N10-100 94 144 194 244 9.5 20 25 25 19.5 30 35 35 38 63 88 113 48 52 67 92 103 153 203 253 28 32 47 72 27 52 77 102 67 92 117 142 Housing mounting style with auto switch CDBX2N10 Stroke Stroke Plate mounting style with auto switch CDPX2N10 Magnet
TC TH TV TW TX TY MI W S CJ-T010B 6, 10 4.5 29 40 22 32 12 CEP1 CJ-T016B 16 5.5 35 48 28 38 16 Note) For details, refer to page 10-5-24.
Material: Cast iron ND H10 d9 Cotter pin Applicable bore size (mm) E1 L1 MM RR1 U1 ND NX NZ L Cotter pin size Flat washer size Flat washer MM A1 Part no. 3 x 18l Y-04C 40 +0.3 +0.1 16 22 M14 x 1.5 24 55 13 25 12 38 55.5 Polished round 12 NX NZ E1 L 3 x 18l +0.3 +0.1 16 50, 63 Y-05C 27 M18 x 1.5 28 60 15 27 12 38 55.5 Polished round 12 4 x 25l +0.3 +0.1 28 80 Y-08C 37 M22 x 1.5 36 71 19 28
M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.
Setting of switch operation 1_P/1_N (Page 36) (Display type) Setting of Add dEC1 dEC2 (Page 38) 3. Input of set values Setting of Setting of tP1L/tn1L Setting of Setting of tP_1/tn_1 P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 tP1H/tn1H H_1 tH_1 WH1 (Page 39) tWH1 (Page 36) (Page 36) (Page 38) (Page 38) 4.
CH1 setting screen 38. Electric conductivity setting screen Option D1 only 7. CH1 setting screen 15. Temperature rise/drop 18. Pump operation mode 17. OFFSET (TEMP OFFSET) 16. TEMP READY function 19.
P.16 6.4 I/O P.23 3.4 P.14 3.1 P.11 CP.38 2.2 P.7 ALARM ON STOP ON OFF 10 ALARM ALARM ON ON 80 No.JXC-OMU0004-A 16.2 () 2.2 P.7 4.
Auto switch mounting groove 4 (For D-F, D-M9(V)) 3.7 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-38 38 Standard Type/Series MHZ2 Finger Option Through-holes in Opening/ Closing Direction [2/N2] Side Tapped Mounting [1/N1] 4-MM (Thread for mounting attachment) C C MHZ MHF MHL B A MHR 4-H (Hole for mounting attachment) MHK S S MHS O
PD PC Supply port 2-P FF FE EB EA D FC FA GA FG FB FD GD HA, HB GC GB C B A 87 117 105 135 165 125 155 185 215 270 250 310 Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 59 79 72 92 112 86.5 106.5 126.5 144 184 165 205 28 38 33 43 53 38.5 48.5 58.5 71 91 85 105 6 (Effective depth 2.5) 19 20 30 28 38 48 32 42 52 55 75 64 84 16
A CL Extension locking Retraction locking 40 to 100 Bore size (mm) A CL1 Drop prevention for press fitting jig Drop prevention for lifter Flat head screwdriver 20 25 32 40 50 63 80 100 26.5 30.5 31.5 34 35 38 43 51.5 MLGC CNG LOCK MNB 20 to 32 CNA Body length Manual unlocking bolt CNS LOCK Body length is the same as the standard MGP CLS Holding a clamped condition CLQ Locking direction is
Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no
(Example) CUJ-M3 x 27L A A C B B D Axial mounting Side mounting For axial mounting Without Auto Switch For side mounting Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 A B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 C D Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20
AK ASS ASR ASF Flow Rate and Effective Area JIS Symbol ASD230FM ASD330FM ASD430FM Model 6, 8 8, 10 6 Metric size 4, 6 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size Flow rate (l/min(ANR)) Controlled flow (Free flow) 7 12 38 0.1 0.6 0.2 Effective area (mm 2) Note) Flow rate values are measured at 0.5 MPa and 20C.