Fieldbus system Ethernet POWERLINK compatible SI unit

.*1 1:ForcedON Turn on the output forcefully 7 Fault Mode Digital*1 2: Hold Hold the output *1: This function is valid only when Hold/Clear Setting of the SI Unit parameter is set to Via software. 39 EX## OMS1015-A 6. Analog Input Unit ( Unit parameter) No.

EXxx-OMY0006CN

SI 1oo1Input N Input N+4 1 1 1oo2Input N Input N+4 11 1oo2 equivalent non-equivalent 1oo2-channel non-equivalentInput N Input N+4 1 39 No.EX##-OMY0006CN 1oo22 2 2 2 SI 40 No.EX##-OMY0006CN Start inhibit after discrepancy Input N Input N+4 Disable Enable 0 Safety Mode (Channel Passivation)Enable , Disable Safety Mode (Module Passivation/xxx)Enable 41 No.EX##-OMY0006CN 8.2.2.5.

PFxx-OMP0001CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -35No.PF-OMP0001CN-F [F 2] OUT2 OUT2 (28 )(29 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] OUT2 [---] [oU2][] [2ot][] 37 38 39 40 -36No.PF-OMP0001CN-F a.

PFxx-OMS0001CN

OUT1 [CoL] [] , ON OFF ON OFF [F 1] OUT1 -36No.PF-OMS0001CN-A [F 2] OUT2 OUT2 (29 )(30 ) OUT2()[---] <>OUT2 [F 2] [oUt2][]() OUT2 [---] [oU2] [] [2ot] [] 38 39 40 41 -37No.PF-OMS0001CN-A a.

PFxx-OMO0007CN

. -14No.PF-OMO0007CN 90270 IN OUT M4(4) 1.6 mm (39) -15No.PF-OMO0007CN 1.0 MPa IN8 IN IN OUT D D8 () () Rc(NPT)1/8 79 Nm Rc(NPT)1/4 1214 Nm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm PF2A710 PF2A750 24 mm PF2A711 30 mm PF2A721 PF2A751 -16No.PF-OMO0007CN FG PF2A7 1 DC(+) 2 OUT2 3 DC(-) 4 OUT1 -17No.PF-OMO0007CN PF2A7 NPN2(2) PF2A7--27DC(+) OUT1 OUT2 DC1224V DC(-) Max.30 V80 mA 1

PF-OMN0009_C

mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6 15.2 27 18 39

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

HRX-OM-X071

Setting range: 1.0 to 45.0 (initial value: 40.0) Ambient temperature upper limit alarm RUN AMB HITMP (Alternately displayed) HRR Series 5.5 Advanced setting mode 5-39 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions Ambient temperature lower limit alarm 18. Press the [] key. Displays screen for setting the lower limit of the ambient temperature alarm.

A_HEC-OM-J017

from the thermo-con (unit specified) Command Command Unit code specified Host requirement Answer from thermo-con Content ASCII 31 Reading setting temperature 2 01 32 05 31 36 38 0D 01 32 02 31 32 35 30 30 03 32 3C 0D Answer 25.0 deg.C Temperature setting (without writing EEPROM) 2 01 32 02 31 32 35 30 30 03 32 3C 0D 06 32 OD Set at 25.0 deg.C 31 32 Reading internal sensor 2 01 32 05 32 36 39

High Vacuum L Type Valve

seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39

XL-OMY0001

800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

() (SUS316L) External seal (maintenance part) 6 (SUS304) Bellows (material: SUS316L) 5 Valve (material: SUS304) () 2 Valve seal (maintenance part) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39

CEx-OMI0064

.*),10 4(DDD3) BCD LCD ( IC F) 13 (+/-) OFF(OFF):+ ON(ON):38 - (4)BCD NPN PNP ,11 PNP CEU5B BCD PLC NPN IN D0 IN D1 D23 IN COM COM +24V MaxDC30V,15mA DC 0V (5) BCD 1 2 403ms 403ms 243ms 243ms 643ms 643ms ON(ON),BCD 39 - 10 10-1 10 8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-

CEx-OMQ0013

PRG STEP P4 4P4 " " " 63 80 100 25 32 40 50 DOWN UP CE240 1002532 1 WRITE 5P5 PRG STEP P5 " " " <> 100 40 50 0 10 20 30 DOWN UP 1 WRITE 38 6P6 PRG STEP P6 1 WRITE )300.0 ( P.47 11-2 7P7 PRG STEP P7 " " 0.009.99sec10ms " 1 WRITE 8P8 PRG STEP P8 " " 0.009.99sec10ms), " 1 WRITE 9-1-3 PRESET " " PRG STEP P1 P1 UPDOWN " " " 1 READ P1 " UP DOWN P8 P5 P6 P7 P1 P2 P3 P4 39

CEx-OMG0106

Manual mode during motion) (Input) Reset Homing SetHome Man'l / Auto MIN50msec Start Program Selection Man'l(+) Man'l(-) (Output) Driving(+) Driving(-) Brake Origin Determined Position Determined (1) (1) Program END (1) Error Cylinder Movement Origin Note: If Manual mode of RUN mode is activated during Auto mode, motion will stop. (1) Timing between stopping till output is 0.2sec(max). 39

CEx-OMQ0011

DC +30V 50mA050 CEU2 NPN OUT Max DC +30V 50mA CEU2 COM CEU2P PNP OUT CEU2P COM Max DC +30V 50mA 35 9-3-5 3 5V ABBR DC +24V 80mA050 24E +24V COM (+) (-) U VAL.OUT (ABBR) 24E 36 ( MIN50msec / ( (1) (2) (2) END (1) () POWER ON RUN 12.0secmax 2P7T 37 ( / MIN50msec + ( + (*1) (*1) END (*1) )END *10.2secmax. 38 ( / MIN50msec + ( + (*1) (*1) END (*1) ) RUN *10.2secmax. 39