D-F9 D-F9W D-F9V D-F9WV D-F8 D-F9 D-F9W D-F9V D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39
Contents Stainless steel Tooth ring @1 Polyurethane rubber 32 40 50 63 80 100 Damper MB 32-PS MB 40-PS MB 50-PS MB 63-PS MB 80-PS MB100-PS @2 C type retaining ring for unlocking cam shaft A kit containing nos. 39, 40, 41 and 42 (2pcs.) from the table above.
88 44 39 78 63 48.5 43 95 50 43 85 80 56 51 104 57 59 51 93.5 100 63.5 58.5 114 65 70 58.5 104 114
36 M27 x 3 33 15 17 27 M18 x 2.5 100 122 96 26 56 48 41 M30 x 3.5 36 17.5 22 30 M20 x 2.5 Rod end male threads a b e f g h c Part no. suffix X & Y dimensions Bore size (mm) 20 None -XC61 12 14 5.5 10 24 67 M8 x 1 25 4 places on front side -XC61R 14.5 17 6.5 12 28 73 M10 x 1.25 32 4 places on rear side -XC61H 17.5 20 7 13 32 83 M12 x 1.25 40 8 places on both sides -XC61W 22 25 8 16 39 94
Thread R(PT) Port B min. port size Weight (g) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 6 4 KM14-04-06-01S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 19 26 39 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 64 65.5 67.5 1 8 1 4 3 8 8 4 KM14-04-08-01S-3 31 69.5 70.5 71 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 39 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 8 6 KM14
dia. 3.3 4-M3 x 0.5 depth 4 20 0.05 W 8 0.05 28 D B Piping port 2-M5 x 0.8 10 J 6 10 9.5 Section AA Mounting reference planes B D MXP10-20B Max. 5 Without magnet and switch rail 2-M2 x 0.4 depth 3 2-M3 x 0.5 depth 3.5 For rail mounting For magnet mounting 8 2.5 L 4.7 6-M3 x 0.5 depth 4 15 15 (mm) MA Z W V S M L K J H N Model 6 60 40 44 10 21 20 20 52.4 32 6.5 MXP10-10B 18 90 65 74 20 39
B Reverse the mounting direction A Reed switch D-A90(V), D-A93(V), D-A96(A) mm Auto switch mounting Switch operating range Stroke (mm) 20 45 25 51 31 Type 25 50.5 30.5 30 59 39 10 35 15 40.5 20.5 Caution A B A B A B MXP10 Tool for auto switch mounting MXP12 5 Use the screwdriver with grip diameter 5 to 6 mm when set screw (attached to auto switch) is set.
14 ' 140"F {-10-+60'C} 2 16 inlsec {50-400mn/s} Urethane cushion at both sides [lax. operating pressure Min. operating pressure Ambient and fluid temperature Operating piston speed Cushion Lubrication Stroke tolerance 0-9.gstlb6s, 10-39.4st: tbs, 39.sst-:13?
Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41
Refrigerant loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9 / 450 6.1 / 470 Max. electric absorbtion [A / W] 2.9 / 220 3.4 / 260 4.3 / 330 5.6 / 430 7.8 / 600 8.0 / 620 Fan electric absorption [A / W] 0.30 / 27 0.54 / 40 Acoustic pressure level at 1 mt [dbA] < 70 Weight [lb / Kg] 75 / 34 82 / 37 86 / 39
M5, M6 M5, M6 KAU23-M5 38 9.6 15.5 34.5 9 M5 0.8 M6 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 1 8 KAU23-M6 KAU23-U01 11 9.6 KAU04-M5 M5 0.8 M6 1.0 39.5 4 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 KAU06-M5 M5 0.8 M6 1.0 42.5 39 2.2 2.2 13 KAU06-M6 43 13 17 1 8 KAU06-U01 3 8 KAU06-U03 46 45 43.5 12.8 39.5 17 14 12.8 14 6 Uni thread 1 4 KAU06-U02 39
Nylon Urethane M Q L D KCT04-00 KCT06-00 KCT08-00 KCT10-00 KCT12-00 4 6 8 10 12 2.8 2.8 7.6 7.6 13.7 11.1 21.1 19.0 28.3 24.3 18 19 21.5 24 25.5 5.3 6.1 7.1 7.9 8.6 28.6 32.7 39.2 45.5 49.2 10.4 12.8 15.2 18.5 20.9 9 16 24 39 52 Note) D: max. diameter Union Y: KCU Effective orifice(mm 2) Weight (g) Applicable tube O.D. (mm) Part No.
Description Qty. 1 Description Track Guide spacer Eccentric bearing holder Adjustment gear Snap ring Detent fitting No. 1 No. 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 Aluminum alloy Spring steel Special resin Stainless steel Stainless steel Stainless steel Stainless steel Hard anodized 4 8 2 2 2 2 10 4 4 2 4 4 4 2 2 2 2 2 2 4 2 2 2 8 4 Cylinder
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
across flats NA L S + Stroke Z + Stroke ZZ + Stroke (mm) MM L K HX I H1 H Eh8 F D CX CD B1 AL A NA N Stroke range Bore size (mm) 20 25 32 40 0 0.033 30 5 65.3 28 5 41 13 8 10 9 13 15.5 18 Up to 300 24 15 20 M8 x 1.25 0 0.033 30 5.5 70.5 33.5 6 45 13 10 10 9 17 19.5 22 Up to 300 30 15 26 M10 x 1.25 0 0.033 30 5.5 76.5 37.5 6 45 13 12 10 9 17 19.5 22 Up to 300 34.5 15 26 M10 x 1.25 0 0.039 39
(Refer to page 39 for details.) -38No.PS-OMV0006-D Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.
(Refer to page 39 for details.) -38No.PS-OMU0006-D Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.
11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0003 6.
Motor cable: Counter axis side Lock cable: Counter axis side Encoder cable: Axis side (30) L 37.4 LE-CSNA LE-CSNB I/O connector LE C SNA 37.2 52.4 Controller type I/O connector (LECSA) I/O connector (LECSB) SNA SNB 39 39 Regeneration option 6 Mounting hole LA LEC MR RB LEC (12) 144 12 (6) 15 Regeneration option type 032 Allowable regeneration power 30 W 12 Allowable regeneration power 100
B A C D 39 40 Standard Motor 200W Series LJ1H30 High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 20mm/10mm lead Vertical Mount How to Order Stroke LJ1H303 PA 1 K F 2 Cable entry direction Top entry Cable length Cable entry direction Power supply voltage Left entry 100VAC (50/60Hz) 200VAC (50/60Hz) Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial