Step Motor Controller

Refer to page 30 for the noise filter set. Refer to the LECA Operation Manual for installation.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

VCC12(D)-00 38.80.1 230.1 Leakage detection port 16.50.1 1.2 to 2 hole 3.8 hole Pilot port IN port 4 hole 1.2 hole R0.2 30 R0.2 OUT port 210.05 M26 x 1.5 21.60.05 240.05 200.05 C1 30 30 2.5 8.5 330.1 40.80.1 450.1 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Operating Range (mm) Bore size Auto switch model 25 32 40 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 5.0 5.5 5.5 D-A9/A9V 7.0 10.0 9.0 Note) Values which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and may change substantially depending on the ambient environment. Auto Switch Mounting Bracket/Part No.

7.5

side D D D D Max. 14.5 (SJ3000-00-P) (SJ2260) (SJ3260) (SJ2260) SOL.b SOL.b SOL.b SOL.b 15 D side U side (12) (12) (12) (12) With manual operation of the pressure adjustment screw (14) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

High Vacuum Angle Valve, XL Series

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

VFR

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.

AIR COMBINATION

AC-OMQ0008-D PRODUCT NAME AIR COMBINATION MODEL/ Series AC10(A,B)-A AC20(A,B,C,D)-A AC25(B,C)-A AC30(A,B,C,D)-A AC40(A,B,C,D)-A Contents PAGE 1. PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1115 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9.

LEF-OM002xx

30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200 3,000 Max.acceleration/deceleration

Line filter

How to Order AFF D 30 03 B (1) Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Without mounting option a Mounting B With bracket Nil Without auto drain Options C N.C. (Normally close) Drain port is closed when pressure is not supplied. b Float type auto drain D N.O.

Mist Separator

How to Order AM D 30 03 B (1) Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Without mounting option a Mounting B With bracket Nil Without auto drain Options C N.C. (Normally close) Drain port is closed when pressure is not supplied. b Float type auto drain D N.O.

Micro Mist Separator

How to Order AMD D 30 03 B (1) Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Without mounting option a Mounting B With bracket Nil Without auto drain Options C N.C. (Normally close) Drain port is closed when pressure is not supplied. b Float type auto drain D N.O.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Model VV3Z2-20 VV3Z2-30 VV3Z2-50 -S50 Part no.

Compact Cylinder with Air Cushion and Lock Series RLQ

D-A79W 14 14 16 9.5 13 9.5 9.5 11.5 D-F7/F7V D-J79/J79C D-F7W/F7WV D-J79W D-F7BAL/F7BAVL D-F7NTL/F79F D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 5.5 5 5.5 7 6 6 6 6.5 D-A7/A7H D-A73C D-A80/A80H D-A80C 12 11 10 12 The operating ranges are provided as guidelines including hysteresis and are not guaranteed values (assuming approximately 30% variations).

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SYJ3000-22-1 SY114-lll Note white white white Body Piston plate End cover Piston Spool Ass'y y u q w e r t VQZ VQD How to Order Pilot Valve Assembly How to Order Connector Assembly VZS VFS : SY100-30-4ASY114 5 G DC VS : SY100-30-1A100V AC Voltage VS7 24V DC 12V DC 6V DC 5V DC 3V DC 100V AC50/60Hz 200V AC50/60Hz 110V AC50/60Hz [115V AC50/60Hz] 5 6 V S R 1 2 : SY100-30-2A200V AC : SY100-30-

Series VS

Pilot valve assembly SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 SF4-mF-30 6 9 Series VS R8b S VALVES A A F B C B C D D 14 14 14 SMC SMC SMC 12 12 SMC 12 MANUAL MANUAL INDICATOR INDICATOR MANUAL MANUAL INDICATOR INDICATOR OVERRIDE OVERRIDE LIGHT LIGHT OVERRIDE OVERRIDE LIGHT LIGHT E E ALL DIMENSIONS ARE IN MILLIMETERS ALL DIMENSIONS ARE IN MILLIMETERS A B D C E F 188.5 188.5

MGC

, B8 D-B73C D-B80C D-G7, K7 D-K79C D-B5, B6 D-G5lW D-K59W D-G5BAL D-G59F D-H7lW D-H7lF D-H7BAL D-C7, C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-C73C D-C80C D-B59W D-H7 D-H7C Bore size Hs Hs Hs A 21.5 (29.5) A B 20.5 (28.5) A B 15 (22.5) A B 17.5 (25.5) A B 19.5 (27.5) A B 18 (26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18

Refrigerated Air Dryer

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

10 20 30 Cable entry direction Nil None B contact specification 2 pcs.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A Groove Cover For 200 VAC: SY100 30 2A Pin Cover Groove For other voltages of AC: SY100 30 3A DC polar indication Lever Pin Without lead wire: SY100 30 A -+ Socket Lead wire length Nil 6 10 15 20 25 30 50 (with connector and 2 of sockets only) 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35